SMC Corporation of America
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6-2 Refrigerant with GWP reference 6 3 IDX-OM-W013 Air Dryer 6 References 6-3 Dimentions IDU3E / IDU4E / IDU6E Evaporation Illuminated thermometer switch Q3 B3 E D A3 P Compressed air inlet Port size Compressed air inlet Port size F G Inspection Grille [200V AC Inspection Grille specification] Terminal block C3 Ventilation direction Ventilation direction Ventilation air outlet J M K L2 N2

Description Part number Remarks Panel mount adapter ZS-39-B Panel mount adapter + Front protective cover ZS-39-D Front protective cover ZS-39-01 Lead wire with connector + connector cover ZS-39-5G 5 cores, 2 m R1/8 conversion adapter ZS-39-N1 NPT1/8 conversion adapter ZS-39-N2 DIN rail mounting adapter ZS-39-R : Made to Order -10No.PS-OMM0005-J Summary of Product parts Names of individual

Panel mount adapter ZS-46-B Panel mount adapter + Front protective cover ZS-46-D Lead wire with connector ZS-46-3L 3 cores, 2 m Front protective cover ZS-27-01 R1/8 piping adapter ZS-46-N1 NPT1/8 piping adapter ZS-46-N2 One-touch fitting 4 mm straight ZS-46-C4H One-touch fitting 6 mm straight ZS-46-C6H One-touch fitting 1/4 inch straight ZS-46-N7H One-touch fitting 4 mm elbow ZS-46-C4L One-touch

IP65 ZSP Series PF2A Series PF2A Flow rate measurement range (l /min) For Air ISA2 For Air For Water For High Temperature Fluid (Water 90C) IS 0.5 to 4 2 to 16 5 to 40 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 150 to 3000 300 to 6000 600 to 12000 0.5 to 4 2 to 16 5 to 40 10 to 100 ZSM PF2 IF Data Integrated Type Series PF2W Series PF2W For Water Application examples Flow control of N2

F(N) F(N) Stroke 15 105 9 110 115 14 120 8 125 130 13 140 150 7 12 175 5 200 11 0 1 2 Number of Auto Switches Mounted Rotation angle Linear motion 0 02 0S 1 S2 SS S0 D2 Nil 2S 20 n n2 nS n0 Combinations of made-to-order products No. 1 to 4 are available. Please contact SMC for further information. 353 Rotary Actuators Precautions 1 Be sure to read this before handling.

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com n 75 + 50 (n2) n = 2, 3, 4 90 + 50 (n 2) n = 2, 4, 6, 8 100 + 50 (n 2) n = 2, 4, 6, 8 110 + 50 (n2) n = 2, 4, 6, 8 Same side 1 10 90 100 110 20 90 100 110 75 90 100 110 Different sides 2 Same side n = 2, 4, 6, 8 20 + 50 (n 2) 2 n = 4, 8, 12, 16 90

Conduit (With surge voltage suppressor) With bracket (shipped together) Faston terminal 2A 2B 2C 2D 2E 2F 2G 2H 2V 2J 2K 2L 2M 2N 2P 2Q 2R 2S 2W 2T 24 VDC 100 VAC 110 VAC 200 VAC 230 VAC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 24 VDC 100 VAC 110 VAC 200 VAC 230 VAC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC VXZ2 XB DIN terminal (With surge voltage suppressor) Enter standard product number.

SS5Y5-M45Stations B Dimension L: Formulas for dimensions L1 to L4 L3 = 12.5 x n1 + 16 x n2 + 70 L3 12.5 M = ( + 1) omit decimals L1 = 12.5 x M + 23 L2 = L1 10.5 L4 = (L1 L3)/2 n1: Number of SY3000 stations n2: Number of SY5000 stations 1.2-176 Order Made Specifications SY3000/5000/7000/9000 Body Ported Type with External Pilot Main Valve Fluoro Rubber Specification Energy Saving Solenoid

Name plate [-N] VVQ1000-N2-Station (1 to Max. stations) It is transparent resin plate for placing a label that indicates solenoid valve function, etc. Insert it into the groove on the side of the end plate and bend it as shown in the figure.

It is inversely proportional to the molecular density (pressure) and may be characterized as =0.7/n2 or =2.33 x 10-20T/P2. Here is the molecular diameter (cm), n is the molecular density (units/cm3), T is the absolute temperature (K), and P is the pressure (Torr). In the case of air, for example, this becomes approximately 5cm at room temperature with 10-3 Torr.

Suction rate 24 N2/min Leakage frOm adsorption 350, 0.96 1.50 2.33 3.83 6.00 9,34 " ... , m 0.82 1.28 2.00 3.28 5.12 8,01 Tube length " " lm, lube diajIoB/6 area between work and pad. Pad dia 1610 "'Nil 001 Ejectorl average suction rate 0'1= (Yz X) x 24Ni!

i.0 22.41 h 57 .2 51.0 44.0 35.0 51.0 Ottl4.0l{lx4(il|(S) 533.0 100 0f M4.0tttx6(M(Sl 25.42 +a.25/0 5.42 90.5 38.2 +0.5/0 57 .2 51.0 44.0 24.22 kg 35.0 127 .0 51.0 i50 635.0 38.2 +0.5/0 57 .2 51.0 44.0 N/A 3{.20 ks 35.0 127.0 90.5 51.0 olf{lA.Oftx8$r{S) 200 762.0 +n2 25. 0EIY[4.0lUlx | 0(lll(Sl 250 864.025.42 +0.25/A 90.5 38.2 +0.5/0 127 .0 5t .2 5r.05l.0 44.0 N/A 35.0 37 .37 kg ALI dLmensions

When a lot of carbon dust is generated from a compressor, it can adhere to the interior of valves and cause malfunction. 5) If a pump is operated by dried air and N2 gas, etc., the deterioration of the gaskets inside the switching valve will be accelerated and may result in substantially shortening the life span of the product.

VX3 Conduit (With surge voltage suppressor) VXA Flat terminal 2A 2B 2C 2D 2E 2F 2G 2H 2V 2J 2K 2L 2M 2N 2P 2Q 2R 2S 2W 2T 24 VDC 100 VAC 110 VAC 200 VAC 230 VAC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 24 VDC 100 VAC 110 VAC 200 VAC 230 VAC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC Made to Order Produced upon receipt of order. Please contact SMC for lead times.

) D-B5/B64 8 10 13 4 8.5 9 14 4.5 9 10 14 5 10 10 14 6 9.5 11 17 6.5 10.5 11 16 6.5 10.5 11 18 7 11 9 10 9 10 10 11 11 11 9 10 10 11 RZQ 15 + 45 ( ) n2 2 D-H7 D-H7W D-H7BAL D-H7NF D-B59W 13 (n = 2, 4, 6, ) D-H7/H7NF/H7W/H7BAL 4 10 15 60 60 + 45 (n2) MI W S D-H7C 7 D-A3/A44 D-G39/K39 8 CEP1 D-C73C D-C80C D-H7C 10 15 65 9 9 9 15 + 50 ( ) n2 2 65 + 50 (n2) D-G5/K59/G5WK 59W/G5BAL/G5NTL 4 (n

room Outside of clean room Vacuum pump Duct piping Front matter 10 System Circuit in Clean Room Clean blow system Example of equipment to suit each clean blow grade 100 Line A Particle diameter: 0.1 m or more Valve operating frequency: 0.5Hz Particle generation Particles/min 80 Line A: For oil-free air blow Line B: For clean blow Line C: For clean blow (With clean gas filter) Line D: For N2

Remarks Bracket A ZS-46-A1 Self tapping screws: Nominal size 3 x 8L (2 pcs) Bracket B ZS-46-A2 Self tapping screws: Nominal size 3 x 8L (2 pcs) Panel mount adapter ZS-46-B Panel mount adapter + Front protective cover ZS-46-D Lead wire with connector ZS-46-5L 5 cores, 2 m Front protective cover ZS-27-01 R1/8 piping adapter ZS-46-N1 NPT1/8 piping adapter ZS-46-N2 One-touch fitting 4 mm straight

Remarks Bracket A ZS-46-A1 Self tapping screws: Nominal size 3 x 8L (2 pcs) Bracket B ZS-46-A2 Self tapping screws: Nominal size 3 x 8L (2 pcs) Panel mount adapter ZS-46-B Panel mount adapter + Front protective cover ZS-46-D Lead wire with connector ZS-46-5F 5 cores, 2 m, waterproof Front protective cover ZS-27-01 R1/8 piping adapter ZS-46-N1 NPT1/8 piping adapter ZS-46-N2 One-touch fitting

Panel mount adapter ZS-46-B Panel mount adapter + Front protective cover ZS-46-D Lead wire with connector ZS-46-5L 5 cores, 2 m Front protective cover ZS-27-01 R1/8 piping adapter ZS-46-N1 NPT1/8 piping adapter ZS-46-N2 -9No.PS-OMX1005 Summary of Product parts Names of individual parts Operation light: Displays the switch operating condition.

Alternatively, the user may take measures to prevent dew condensation, such as an N2 purge. To obtain the dew point, refer to page 7-22 7.6 Calculation of Dew Point Temperature (from psychrometric chart). The maximum operating pressure is 0.5MPa. Keep the pressure as low as possible to prevent water hammer.