Guide Cylinder Series MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

Minimum Stroke for Auto Switch Mounting (mm) 12 16 20 25 32 40 50 63 80 100 Auto switch model No. of auto switches mounted 1 pc. 10 5 D-A9 2 pcs. 15 10 D-A9V D-M9V 1 pc. 5 2 pcs. 10 1 pc. 15 10 5 D-M9 2 pcs. 15 10 1 pc. 15 10 D-M9W 2 pcs. 15 10 1 pc. 10 D-M9WV 2 pcs. 10 D-Z7 D-Z80 1 pc. 10 5 2 pcs. 15 10 D-Y59 D-Y7P 1 pc. 5 10 2 pcs. 15 10 D-Y69 D-Y7PV 1 pc. 5 2 pcs. 5 D-Y7W D-Y7WV 1 pc.

Electromagnetic Digital Flow Switch

LFE Remote type sensor unit 1 3 J Remote type monitor unit For details, refer to p. 10. Remote type sensor unit 3 A LFE 1 Integrated display type Rated flow range Made to Order (Refer to p. 17.)

MHZ

D4-MM thread depth L (Thread for mounting attachment) 20K K J J B A A D G D B F C S W O (mm) Model A B C D F G Open Closed Double acting Single acting J K L Weight (g) MM W MHZL2-103 MHZL2-163 MHZL2-203 MHZL2-253 +2.2 0 2H9 2.5H9 3H9 4H9 0 0.2 0 0.2 0 0.2 0 0.2 +0.025 0 5 8 10 12 0 0.05 0 0.05 0 0.05 0 0.05 70 145 290 505 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 5 6 8 10 60 135 270 460 7 9

MHZ

Flat Type Fingers [3] D4-MM thread depth L (Thread for mounting attachment) 20K J A A D G B D B K J F C S W O (mm) Model Open Closed Weight (g) F G A W B C D J K MM L MHZ2-63 (1) 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +1.2 0.8 2H9 2.5H9 3H9 4H9 5H9 6H9 +0.2 0 2 2.45 3.05 3.95 4.9 7.3 8.7 5 1 1.4 1.4 1.6 2 3 3 4 5 8 10 12 15 18 3.5 6 8 10 12 20 24 7.2 5.2 8.3 10.5 13.1 18 22 7.5

Air preparation filter

Part name (8) (7) (1) Body (2) Element (1) (3) Bowl (4) Auto drain (5) Flange (5) (6) Stopper (7) Element service indicator (8) Bracket (9) Drain port spacer (6) (10) Drain cock (2) (3) (4) (9) (10) Options and spare parts No.

Vacuum Unit Series ZK2

P Single unit Note 4) Vacuum pump system J N.C. None Note 5) Self-holding release valve linked For manifold Q R N.C. Note 7) N None None Silencer exhaust A Note 3) Only non-locking type is available for the manual override for K, J, R. Note 4) When J is selected for vacuum pump system, install a release valve or vacuum breaker.

Process Valve

Applicable cable O.D. 6 to 8 (D, DZ) P Pg9 J (DIN terminal: D, DZ) I (Grommet: G) F (Air operated) Pilot port 12 (P1) 2 x (Back side 10 (P2)) 4 x M 8 1 Manual override (Non-locking push type) P1 D S Q E 15 B A H (DIN terminal: D, DZ) G (Grommet: G) A R B C Main port 1 (A) (Back side 2 (B)) Port side: refer to table below Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S VNB2V

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

MGF Z DA DDH10 (Hole) W1 B DF DH DS DT DR DO DC DU DE DL DX CA1-B04 CA1-B05 CA1-B06 CA1-B08 CA1-B10 40 50 63 80 100 165 10 57 60 52 40 8 17 9 10 85 15 65 11 35 10 +0.058 0 CY1 183 10 57 70 52 40 8 17 9 10 85 18 65 11 35 12 +0.070 0 196 10 67 85 66 50 10 22 11 12.5 105 25 80 13.5 40 16 +0.070 0 MY1 235 12 93 102 90 65 12 24 13.5 15 130 31.5 100 16.5 60 20 +0.084 0 256 12 93 116 90 65 12 24

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

Z DA DDH10 (Hole) DU DC DX DE DO DR DT DS DH DF B W1 DL MGQ CA1-B04 CA1-B05 CA1-B06 CA1-B08 CA1-B10 40 50 63 80 100 10 165 57 11 65 15 85 10 9 17 8 40 52 60 35 +0.058 0 10 10 183 57 35 11 65 18 85 10 9 17 8 40 52 70 +0.070 0 12 MGG 10 196 67 40 13.5 80 25 105 12.5 11 22 10 50 66 85 +0.070 0 16 12 235 93 60 16.5 100 31.5 130 15 13.5 24 12 65 90 102 +0.084 0 20 MGC 12 256 93 16.5 100 35.5 130

Electric Actuator Triple Axis P&P Unit

Y axis/Z axis Axis type Ball screw specifications Rolled ball screw (mm) 15, lead 5 15, lead 10 15, lead 20 16, lead 32 Symbol H A C J Y axis motor in-line mount Z axis motor in-line mount Z axis motor side mount Y ZB ZC 1 2 Stroke(mm) 1) Used for X axis in double and triple axis P&P. 2) Used for Y axis in double and triple axis P&P. 100 150 10 15 Motor specifications 950 1000 95 A0 Brake

17

Load Mass Allowable Moment MY1B/M1 MY1B/M3 MY1B/M2 MY1B/m1 200 200 200 300 400 500 20 30 40 50 100 100 50 20 30 40 100 50 10 40 30 20 30 40 50 5 4 3 2 10 Load mass kg Moment Nm Moment Nm Moment Nm 20 5 4 3 2 10 1 10 MY1B40 5 4 3 2 MY1B40 MY1B40 MY1B32 MY1B25 MY1B40 0.2 0.3 0.4 0.5 MY1B32 5 4 3 1 MY1B32 MY1B32 MY1B25 0.5 0.4 1 MY1B25 MY1B25 D0.1 0.3 0.2 2 0.5 0.4 0.3 0.05 0.04 0.03 0.2 -X

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

4 6-14-10 11 Series NCM Construction: Single Acting, Spring Return t y q !1 !2 e r !0 w o CJ1 CJP CJ2 CM2 CG1 !

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

MY2 H/HT MY3A MY3B MY3M Load Mass Allowable Moment MY1H/m3 MY1H/M3 MY1H/M1 MY1H/M2 q r w e t 30 40 50 50 40 30 40 50 30 40 50 30 20 20 20 20 MY1H40 MY1H32 10 10 10 MY1H40 MY1H40 MY1H32 Load mass kg MY1H32 Moment Nm Moment Nm Moment Nm 5 4 3 MY1H25 MY1H40 10 5 4 3 5 4 3 MY1H32 MY1H25 MY1H25 2 MY1H25 5 4 2 2 1 3 1 1 0.5 0.4 0.3 2 0.5 0.4 0.3 0.5 0.4 0.3 D0.2 1 0.2 0.2 0.1 -X 100 200 300 400

212

140.5 LVR50-V19 22 80 120 169 C F E Breathing port M5 x 0.8 J Tube extensions 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Breathing port M5 x 0.8 Model A B C D E LVR20-T07(06) 40 40 49.3 68 20.1 LVR40-T11(10) 82.5 82.5 89 115 33 IN C F Model F G H J K LVR20-T07(06) 8 27 56 33.5 126.2 LVR40-T11(10) 14 64.5 100 40 183.3 E K J J Breathing port M5 x 0.8 5 Applicable Fluids Regulator

Parallel Style Air Gripper Series MHZ

MHZ Flat Type Fingers [3] MHF 4 x MM thread depth L (Thread for mounting attachment) MHL K J MHR A A D G B MHK MHS D B MHC K J F MHT C MHY S W MHW O -X (mm) F G Mass (g) L MM J K D C B W Model A MRHQ Open Closed MHZ2-63 (1) 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +1.2 0.8 +2.2 0 +2.2 0 +2.3 0 +2.5 0 +2.7 0 +2.9 0 +0.2 0 5 4 5 8 10 12 15 18 1 1.4 1.4 1.6 2 3 3 3 5 6 8 10 12 16 M2

Compact Cylinder Series CQS

1 5 5.5 7.5 1 [3.5] 6 5.5 9 10 1 5 5.5 7.5 17 19 22.5 24.5 10 9.5 13 14 5 9 9.5 11.5 5 4.5 0.5 1.5 10 9.5 13 14 5 9 9.5 11.5 10 9.5 13 14 5 9 9.5 11.5 0.5 [3] 3.5 [1] 5.5 [3] DDouble Acting, Double Rod 1.5 2 6 7 19.5 21.5 25 27 2.5 3 2 4 12 16 20 25 5.5 5 10 12 3.5 [6] 3 [5.5] 8 [10.5] 10 [12.5] 1.5 2 6 7 5.5 5 10 12 17 19 22.5 24.5 5.5 6 10 11 9.5 9 14 16 0.5 1 4 6 5.5 6 10 11 9.5 9 14 16

VNB

C.O. 1 2 1 4.1 4.2 Normally closed Normally open Double acting VNB0 VNB02 VNB03 VN 1 4 7.7 7.8 40 12 (P1) 12 (P1) 10 (P2) LVC 6.3 6.4 2 Air operated LVA 2 (B) 1 (A) 2 (B) 1 (A) 2 (B) 1 (A) 11.4 11.5 50 10 (P2) Note) The flange should be JIS B 2210 10K (ordinary style) or its equivalent.

CEx-OMQ0011

LCD 4.DIN 30mm 30mm 10 - 2-2 30mm No. 2-3 (1), (Err6), 1 ML2B25 15 ML2B32 19 ML2B40 24 2-4 5mm 5-10-15 5mm Err5 4.2 5 10 15 20 1.0 1.0 1.0 1.0 5.8 5mm30mm Err6: 20 30 100mm/sec :50cm :0.5MPa 11 - 3 3 3 3 ML2B+CEU2 NO 1 () () YES NO () YES NO YES YES NO YES NO YES YES NO NO NO YES A 12 - A 1.

Mechanically Jointed Rodless Cylinders

50 20 20 10 10 10 5 4 3 2 1 40 30 20 0.2 1 2 3 4 5 0.3 0.4 10 m1max m2max m3max m1max m3max m2max Weight (kg) Weight (kg) 10 Model Selection Series MY3A/3B MY350 w When the external guide is used. 300 400 500 Collision deceleration (m/s2) 200 External guide load factor selection 2300 N 100 External shock absorber Impact force and absorption capacity confirmation 30 40 50 20 10 2 3 4 5 10