High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 A XLS Series Dimensions XLS/Without control power supply D Lead wire AWG20, O.D.: 2.63 mm E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT

LX

E-M5 thread depth 10 6 LJ1 LG1 LC1 LX LC6D/LC6C Switches 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch

Possible to transfer a workpiece at low-speed.

XA39 XA40 XA41 XA45 K K K XA46 Y Y Y Y Y 20, 30, 40 Y J K K, T K, T K 10, 15, 20, 30, 40 K K K K, T K Z X X, Z J J J, Z Z J 20, 30, 40 Z J 10, 15, 20, 30, 40 T J Reversed shaft, Change of double shaft length X 20, 30, 40 Reversed shaft, Change of double shaft length Combination Chart of Made to Order Chart 4.

JXCx-OMU0004

P.50 34 No.JXC-OMU0004-A 7.3 SW (A) (B) PLC PLC SW (C) A,B,C A B C I/O I/O I/O 35 No.JXC-OMU0004-A A e i j PLC h 15 8.1 P.40 8.4 P.43 36 No.JXC-OMU0004-A B PLC I/O PLC PLC PLC PLC 3 i j 3 PLC PLC PLC PLC I/O g 7 LED f L L (1) 7 LED f (2) (3) 3 k n c 37 No.JXC-OMU0004-A C h [15] g 2 i j i h j g i 2 j i i h [0] j j 3 g 3 i OFF j 3 2 e h 0 h i g 3 j

MHS

J)3-40DA MHSH(J)3-40DB M50.8 3.2 10 MHSH(J)3-50DA MHSH(J)3-50DB M61 7.3 12 MHSH(J)3-63DA MHSH(J)3-63DB M81.25 18 16 MHSH(J)3-80DA MHSH(J)3-80DB M81.25 18 16 10 MHSJ3MHSH(J)3 MHS2 Nm MHSJ3-16D MHSH3-16D M30.5 0.88 Nm MHSJ3-20D MHSH3-20D M30.5 0.88 MHS2-16D M30.5 0.88 20D M30.5 0.88 MHSJ3-25D MHSH3-25D M30.5 0.88 25D M30.5 0.88 MHSJ3-32D MHSH(J)3-32D M40.7 2.1 32D M40.7 2.1 40D M50.8 4.3 MHSJ3

MXS Series Air Slide Table

Absorbing Energy ft lb (J) Absorbing Stroke mm Max. Impact Speed mm/sec Max. Frequency cycles/min Max.

TABLE OF CONTENTS

H 364 H 364 H 364 J 116 H 364 V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Table B FLOW CONFIGURATION VALVE NO.

MXS

J J mm Nm Nm Nm Nm Nm mm/s Load equivalent to collision Max. allowable static load Load rate Allowable static load coeficient Allowable moment coeficient Damper coeficient Work mounting coeficient 3.11-11 Series MXS Dimensions MXS 6 2-M2.5 X 0.45 thread 3 deep Operating port 2-M3 X 0.5 6 3 2 J I 5 Max. 10.5 (With stroke adjuster at retraction end) Basic style 5.5 3 5.5 5.5 3 6.5 2-M2.5 X

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Applicable shaft types: J, K, T Shaft through-hole and female thread machining Applicable shaft types: J, X, Z Equal dimensions are indicated by the same marker. Applicable shaft types: K, T Equal dimensions are indicated by the same marker.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M3: L1 = 6 mm Applicable shaft types: J, K, T The maximum dimension L2 is, as a rule, twice the thread size. (Example) For M3: L2 = 6 mm Applicable shaft types: J, K, T 2. Q1 = M L2 = L2 + (3 x P) 3. L1 + (3 x P) L2 + (3 x P) 4.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

W K CY1RG50/63 HB HC N X MX H MTS CB HA 2-P (Piping port) 4-J x E (Depth) 4-Counterbore dia.

MXQ

of the load. ) Correction factor (Reference values) V = 1.4 x 300 = 420 Find the allowable kinetic energy Ea (J).

RB/RBL/RBQ

J J N m/s2 1.

MY1

depth K M5 x 0.8 (Hexagon socket head plug) XX XX M5 x 0.8 (Port) VV VV 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) MY1CG MY1CG (mm) LH A B C G GA GB H K J LD L LL LW M MM N NC Model A B C G GA GB H K J LD L LL LW M MM N NC LH 6 16.2 6 M4 x 0.7 MY1C16 22.5 80 3.5 13.5 8.5 40 10 M5 x 0.8 3.6 80 40 54 20 14 7.5 20 7.5 MY1C20 23 100 4.5 12.5 12.5 46 12 M6 x 1

Table of Contents

03 04 q Description No.

RSQ

QA Tubing O.D. 6 J QB Q F Built-in One-touch Fittings Stroke 13 20 Stroke 8 Applicable tubing O.D.

ML2B

A G G 2-PA (Hexagon socket head taper plug) I F B + Stroke 2-PA (Port for operating cylinder) J J J J D D 2-PB 2-PB 2-MB, Depth LB II II (Hexagon socket head taper plug) (Hexagon socket head taper plug) J J 28 32 36 G 30 37 45 J 40 46.5 55 DD 11 15 16.5 A 110 140 170 H 73 88 106 EE 14.5 16 22 K 46 58 68 FF 63.5 77.5 95 L 45.5 54 64 GG 22 27 35 M 30.9 32.4 41.4 HH 24 32 37 N 16 15 19 O 69

Floating Joint

J J Centering is unnecessary. A high level of machining accuracy is unnecessary. Spherical rotation The installation time is dramatically reduced. It is compact and is suitable for high tensile stresses.

ML2B

A G G 2-PA (Hexagon socket head taper plug) I F B + Stroke 2-PA (Port for operating cylinder) J J J J D D 2-PB 2-PB 2-MB, Depth LB II II (Hexagon socket head taper plug) (Hexagon socket head taper plug) J J 28 32 36 G 30 37 45 J 40 46.5 55 DD 11 15 16.5 A 110 140 170 H 73 88 106 EE 14.5 16 22 K 46 58 68 FF 63.5 77.5 95 L 45.5 54 64 GG 22 27 35 M 30.9 32.4 41.4 HH 24 32 37 N 16 15 19 O 69

CJ5-S

RZQ R V Basic style (B): CG5BAS : With air cushion MI W S WA WB GA GB 2-P W 10 H1 Width across flats B1 CEP1 M BM CE1 Max.WH (E1) D CE2 B2 BZ MM AL A Plug bolt (4 pcs. included) ML2B K KA 8-J (F1) C 0.1 H S + Stroke ZZ + Stroke C J G5-S NA CV Stroke range A Bore size (mm) AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM NA P S MVGQ 20 Up to 350 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12