Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

Rack & Pinion Type Rotary Actuator Series 11-CRA1-Z Size: 30, 50 RoHS How to Order 11 Vacuum suction type Clean series Nil Auto switch No D Built-in magnet B Mounting Basic L Foot Shaft type S Single shaft W Double shaft 30 Size 50 11 C D R A 1 B S 50 90 Z M9B Rotating angle Number of auto switches 90 180 100 90 180 100 190 Nil S 2 pcs. 1 pc. 190 Type of auto switch (For model with auto switch

V

E R (N)ZM V A C U U M E J E C T O R (N)ZM D I M E N S I O N S W I T H VA C U U M S W I T C H D I M E N S I O N S B A S I C T Y P E N O Z Z L E D I A M E T E R 05 0.5mm 07 0.7mm 10 1.0mm 13 1.3mm T Y P E 2 Body Ported 4 Manifold Type-Common SUP 6 Manifold Type-Individual SUP S U P P LY P R E S S U R E H 5 Bar M 3.5 Bar P O R T T H R E A D Nil PT* Remove (N) when ordering T NPTF S W I T C H

Multistage Ejector Series ZL112.212

X, Y, Z directions, for 2 hours each 2% F.S.

MGQ

Specifications D By-pass port dia.

CG1-OM0227

D-H7BALD-H7NF D-G59WD-G5PWD-K59W D-G59FD-G5NT D-C73CD-C80C D-B54D-B64D-B59W 3. 4. () () (M4 1~1.2Nm (M3 0.6~1Nm 11 <> D-M9NM9PM9BM9NM9PVM9BV D-M9NWM9PWM9BWM9NWM9PWVM9BWV D-M9NAM9PAM9BAM9NAM9PAVM9BAV D-A90A93A96A90VA93VA96V 5. <> 6080 D-M9A(V) M3M3 0.60.7Nm (M2.5) (M2.5)0.050.1Nm 56mm 1)(M2.5) 2)M3 BMA3 A 12 4 1) (BMA2-A)(BJ5-1/) () 2) (BMA2-AS/)(BJ4-1/) D-M9A(V) () BBA3:D-B5,

Pressure Relief 3 Port Valve with Locking Holes

VH*-OMX0068-A PRODUCT NAME Pressure Relief 3 Port Valve with Locking Holes MODEL / Series / Product Number VHS20-(F,N)01~(F,N)02(-R,Z)-D VHS30-(F,N)02~(F,N)03(-R,Z)-D VHS40-(F,N)02~(F,N)04(-R,Z)-D Contents Page 1. Safety Instructions 1~5 2. Application 6 3. Specifications 6 4. How to Order 7~8 5. Construction / Parts List 9 6.

The cost effective and clean looking AC series allows you to pick a combination of modular style air preparation equipment that best suits your needs. The series, available in 8 size options to ensure optimum performance, offers energy savings, with higher flow rates. Simple assembly and maintenance reduces downtime. Filter regulator and lubricator unit , Clean looking, modular design

The cost effective and clean looking AC series allows you to pick a combination of modular style air preparation equipment that best suits your needs. The series, available in 8 size options to ensure optimum performance, offers energy savings, with higher flow rates. Simple assembly and maintenance reduces downtime. Filter regulator and lubricator unit , Clean looking, modular design

3

D-DN

Pressure Switch/Reed Switch Type

D-KS

Compact Electric Actuator Series LG1

phase output Z phase output Z phase output CW pulse input CW pulse input CCW pulse input CCW pulse input Frame ground Command divider switching input CW drive suppression input CCW drive suppression input Servo alarm output Positioning completion signal output Speed monitor signal Equipment connection example With open collector Vp-1.5 : Approx. 10mA + CN I/F R Vp R+220 GND 1 4 AM26LS31

ø 40, ø 50, ø 63, ø 80, ø 100 CE2 Series Stroke Reading Cylinder with Brake Note) CE-compliant: When connecting to a multi-counter (CEU5  -D, power supply voltage 24 VDC). Refer to the counter operation manual for details. Note)

Consult with SMC regarding water resistant types with the above model numbers. * Solid state auto switches marked with are produced upon receipt of order. ** Since D-A9and D-A9V cannot be mounted on 50, use of D-Z7 or D-Z80 is recommended. * Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ D* Since there are other applicable

ITV0000

D side 1 2 3 ...

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

MDHR3-15 MDHR3-10 H L H When auto switch D-M9V is used When auto switch D-M9 is used When auto switch D-M9V is used Max. Protrusion of Auto Switch from Edge of Body: L, H Max. Protrusion of Auto Switch from Edge of Body: H (mm) (mm) D-M9V D-M9V D-M9N Auto switch model Auto switch model L H 1.3 The auto switch will not protrude in the case of D-F9. H 2.3 12-5-26

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

(V), D-A93(V), D-A96(V) (mm) Lead wire entries outside A A Model Mounting Switch operating range A B A B A B 54 MXY6 34 59 5 MXY8 MX 39 67 MXY12 MTS 47 MY Solid State Switch D-M9B(V), D-M9N(V), D-M9P(V) Lead wire entries inside (mm) B B CY Model Mounting Switch operating range A B A B A B 50 MXY6 2 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

Rotary Table

Recommended tightening torque Auto switch model Recommended tightening torque [Nm] D-M9 0.05 to 0.15 D-M9A (Water resistant) 0.05 to 0.10 D-A9 0.10 to 0.20 Fig. 12 Set screw Auto switch -38- Auto switch proper mounting position at rotation end Table 16. Auto Switch Operation range / Hysteresis / most sensitive position B Adjustment bolt Adjustment bolt A B Table 15.

VK3000

Grommet type (G) Rated voltage DIN terminal (D) Part no. symbol W/o indicator light With indicator light W/o indicator light With indicator light W/o indicator light With indicator light No.1 Coil Coil S Varistor Varistor No.2 AC No.1 Varistor Neon light None Coil Z How to Calculate the Flow Rate No.2 No.1(+) Caution Red(+) For obtaining the flow rate, refer to front matter.

ZP

A B C E D G E ZPT40 U C ZPT50 U C ZPT10 U C ZPT13 U C ZPT16 U C 19.5 6.2 8 6 3.3 32 6.5 40 43 18.5 10 12 1.7 12 3 27 21 21 33 7.5 3.8 50 53 6.2 12 5 8 8 6 13 15 1.8 12.5 3.5 27.5 21.5 21.5 16 18 1.2 Deep Deep 1 8 B C D D E Y F: M6 x 1 F: M8 x 1.25 D F: Rc Model A 1 8 D G F: Rc Y B C E D G E D G F: M5 x 0.8 F: M6 x 1 E Model A ZPT40D 40 43 29 6 8 6.2 17 42.5 ZPT10D ZPT16D 10 16 12 18 15 16

ZP

C A B D C A B D Dimensions Dimensions Dimensions Model A B C D E F Model A B C D E F Model A B C D E F ZPX40HB-B8 ZPX40HB-B10 ZPX50HB-B8 ZPX50HB-B10 ZPX63HB-B10 ZPX63HB-B12 ZPX80HB-B10 ZPX80HB-B12 ZPX100HB-B10 ZPX100HB-B12 ZPX125HB-B10 ZPX125HB-B12 01 01 01 40 41 28 43 20.5 32 63 65 46 68 31.5 43 100 103 69 107 47.5 60.5 01 01 01 01 01 01 50 52 36 54 24 35.5 80 83 58 85 37 48.5 125 129 89