CXS

22 Series CXSJ Dual Rod Cylinder: Compact Type Dimensions: 6 Standard Piping 4-M3 x 0.5 thread depth 3.5 10 9 + Stroke 2.7 8 6.7 MX 2-M3 x 0.5 thread depth 3.5 (Piping port) 20 MTS 20.5 5.5 MY Stroke 42 + Stroke CY 5.5 4.5 13.4 32 + Stroke MG 5 + Stroke 12 2.75 11 1.2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

D C0.2 B0.2 A0.2 Hexagon socket head mounting screws A (mm) B (mm) C (mm) D (mm) MGPM MGPL 63 80 100 Bore size (mm) 142 180 210 58 54 62 124 156 188 27 33 39 22 28 33 M10 x 1.5 M12 x 1.75 M14 x 2.0 8-24-9

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

(mm) Model OO PP SS VV QQ RR TT UU Applicable gasket ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C14 17 23.5 53 40 12.5 34 26 10 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

22 Mechanically Jointed Rodless Cylinder Series MY3A/3B Note) The operating ranges are provided as guidelines including the hysteresis and are not guaranteed values (with approx. 30% variations).

MXF

800) 258-9200-www.stevenengineering.com 35 24.5 20 CX 3H9 depth 3 +0.025 0 68 D20 10 4-6.5 4-3.2 -X 202-M3 x 0.5 thread depth 6 5.5 6.5 25 H Data 9.8 4-M4 x 0.7 A Section AA M 10 Operating port 2-M5 x 0.8 (Table length) 0.3 17 N 2 ( 1): The number of pitches 18.5 5.5 J I Z 3 ZZ Max. 10.5 H 25 3H9 depth 3 +0.025 0 23 4 3H9 depth 3 +0.025 0 (mm) Z M J I H N ZZ Model MXF12-20 65 65 36 11 22

A special lithium grease has been applied to 22-MXP's linear guide and piston to inhibit dust generation. For 22-MXP, additionally, copper is not used as a product material as well as substances including halogen (fluorine, chlorine, bromine and iodine) or compounded with silicon are not used.

A special lithium grease has been applied to 22-MXPJ6's linear guide and piston to inhibit dust generation. For 22-MXPJ6, additionally, copper is not used as a product material as well as substances including halogen (fluorine, chlorine, bromine and iodine) or compounded with silicon are not used.

Delivery Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: 15 μin. (0.4 μm), Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge Port, Inlet

Delivery Pressure: 15 [5 to 150 psig (0.034 to 1.0 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: 15 μin. (0.4 μm), Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge Port, Inlet

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: 15 μin. (0.4 μm), Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male), Gauge Port, Inlet:

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: 15 μin. (0.4 μm), Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge Port, Inlet

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: 15 μin. (0.4 μm), Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male), Gauge Port, Inlet:

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: M [10 μin. (0.25 μm)], Ports: 4PW [4 Ports (1-In; 2-Out; 3-Gauge Port In; 4-Gauge Port Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: MV4 (1/4 Inch Face

Delivery Pressure: 01 [1 to 10 psig (0.007 to 0.07 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: M [10 μin. (0.25 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male), Gauge Port, Inlet: No

Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: M [10 μin. (0.25 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: TW4 (1/4 Inch Tube Weld), Connections, Outlet: TW4 (1/4 Inch Tube Weld), Gauge Port, Inlet: No Gauge Port, Gauge

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: M [10 μin. (0.25 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge Port, Inlet:

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: M [10 μin. (0.25 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male), Gauge Port, Inlet: No

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: M [10 μin. (0.25 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge Port, Inlet: No

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: X [5 μin. (0.13 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male), Gauge Port, Inlet: No

Delivery Pressure: 10 [2 to 100 psig (0.014 to 0.7 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Poppet: Hastelloy® C-22; Diaphragm: Hastelloy® C-22; Nozzle: Hastelloy® C-22), Surface Finish: X [5 μin. (0.13 μm)], Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male), Gauge Port, Inlet: No Gauge