High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Description Body class Type LQ-GP J Type 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin Stainless steel

SZ3000

Weight (g) 17.6 19.9 24.4 28.9 33.4 37.9 22.1 26.6 31.1 35.6 10 11 12 13 14 15 16 17 18 19 No. Terminal no.

3 Port Solenoid Valve

Note) For manifold dimensions including elbow fitting, see page 11.

0.

Formula: L5 = 16n + 11 L3 = 16n + 22 n: Stations (Max. 20 stations) Dimensions L n 2 3 110.5 100 70 20.5 59 4 123 112.5 86 18.5 75 5 135.5 125 102 17 91 6 148 137.5 118 15 107 7 173 162.5 134 19.5 123 8 185.5 175 150 18 139 9 198 187.5 166 16 155 10 223 212.5 182 20.5 171 11 235.5 225 198 19 187 12 248 237.5 214 17 203 13 260.5 250 230 15.5 219 14 285.5 275 246 20 235 15 298 287.5 262 18

IDX-OM-W017

IDFA Series 10-3 10 2 IDX-OM-W017 11 R 11 R R (GFCI) GFCI1GFCI11-2 11-1 1. 2. 3. 4. GFCI 5. 6. 7. 11-2 IDFA4E/6E/8E/11E-23-R 5A 30mA IDFA15E1-23-R 10A 30mA 11-3 1) 2) 3) IDFA Series 11-1 11 1 IDX-OM-W017 11 R 9.5mm L N 6.5mm 11-4 () () 11-5 1-1 IDFA Series 11-4 11 2 IDX-OM-W017 12 T 12 T T 12-2, 12-3 12-1 1. 2. 3. GFCI 4. 5. GFCI 6. 7. 8. 9.

HRX-OM-Q033

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

HRX-OM-S010

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Power supply terminal Power supply terminal The circuits above are for the double wiring specification with up to 11 or 12 stations. Connect to SOL.A for a single solenoid.

IDX-OM-W016

Specification for Option R 11 1 Safety instructions . 11 1 11 2 Specifications of GFCI . 11 2 11 3 How to connect the power supply . 11 2 11 4 Electric circuit . 11 2 Chapter 12 Specification for Option T 12 1 Safety instructions . 12 1 12 2 Specifications . 12 1 12 3 Remote operation . 12 2 12 4 How to connect the power supply and signal cable. 12 2 12 5 Electric circuit . 12 3 Chapter

IDX-OM-W013

Specification for Option R 11 1 Safety instructions . 11 1 11 2 Specifications . 11 1 11 3 Power supply connection procedure . 11 2 11 4 Cautions for handling the GFCI . 11 3 11 5 Electric circuit . 11 3 Chapter 12 Specification for Option S 12 1 Safety instructions . 12 1 12 2 Specifications . 12 1 12 3 Electric circuit . 12 1 Chapter 13 Specification for Option T 13 1 Safety instructions

ARM10/11

1 Compact Manifold Regulator Series ARM10/11 F.R.L.

Valve Single Unit

) SY3000-11-24 Mounting Screw Tightening Torques SX5000 SY5000-11-10 M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm SX7000 SY7000-11-9 Warning When mounting a valve or spacer on the manifold base or sub-plate, etc., those mounting directions are determined.

IDX-OM-W011

M 11 M IDF4E/6E/8E/11E/15E1 11-1 ( ) 11-2 ADM200 IDF4E15E1-10-M IDF4E15E1-20-M IDF-S0087 IDF-S0090 1.0MPa 1 1 2 / AC100V(50/60Hz) AC200V(50/60Hz) 4W IDF Series 11-1 11 1 IDX-OM-W011 11 M 11-3 Rc1/2 32 25 1) 2830Nm 30 (5) (17)(30) 2 2 Rc1/2 11-4 1-1 IDF Series 11-3 11 2 IDX-OM-W011 12 R 12 R IDF4E/6E/8E/11E/15E1 12-1 12-2 1 AC100V AC200V INOUT IDF4E

HRX-OM-M091

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge temp. 4 High circulating fluid return temp. 5 High circulating

Compact Manifold Regulator

PBT Material 30 40 0.5 g Weight 30 6.5 (R) 2 4.5 1 16 4 11 745 ARM10F Series Made to Order Specifications: Please contact SMC for detailed dimensions, specifications and lead times.

Rotary Actuator

Size A B C D (g6) DD (h9) F H J K With auto switch Without auto switch U W BA CA CB Valve dimensions Key dimensionsNote) S SB SC SD SE S VH VJ VK VL b l 50 62 48 46 15 25 2.5 36 M8 x 1.25 depth 8 5 156 (189) 1.5 5 14.5 33 144 (177) 98 17 17 9.5 7.5 39.5 4 21 8 5 0 0.030 25 63 76 60 57 17 30 2.5 41 M10 x 1.5 depth 12 5 175 (213.5) 1.5 5 21.5 33 163 (201.5) 117 19.5 20 11 8 39.5 11 21 8 6

High Vacuum Angle Valve

55 41 67 29 XLC-50-2 70 181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33 9 XLC-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.

ARM10/11

1 Compact Manifold Regulator Series ARM10/11 F.R.L.

HRX-OM-R028

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge temp. drop 4 High circulating fluid return temp. 5 High circulating

Regulator

Product (15) Plug assembly -24- 11. Disassembly Drawing 11-1. AR20-D/ AR30-D/ AR40-D/ AR50-D/ AR60-D Cross recessed round head screws (4 pcs.) (10) Valve assembly Bonnet Valve spring (Protrusion on IN side) Washer (only for 50 and 60 sizes) Pressure regulating screw assembly (12) Valve guide assembly Pressure regulating spring Cover (11) Diaphragm assembly Cap OUT Body I N -25- 11-2.