•

g~ 57 WS I Bore F (mm) ' H IA IB ' L W N S WC ZZ GA GB 40 44 52 52 47 97 58 97 72 97 52 55 -49 58 49 58 37.5 43.5 49.5 37.5 43.5 I 5 7 30 10 30 10 30 12 194 194 194 52 60 52 74 50 55 63 69 49.5 5.5 * Pos$lble to fab(fcate the dImenSIOns of H and L othef than the standafd. N type (Semi-standard) 1 S mba. H L ZZ ~prE! .

VXR21/22/23

Return voltage is 20% or more of the rated value at AC power and 5% or more at the DC power. Allowable voltage fluctuation is 10% of the rated voltage.

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

HEAVY DUTY STOPPER CYLINDER

Model selection P.5 3. Installation P.8 3-1. Operating air 3-2. Piping 3-3. Operating conditions 3-4. Cautions for mounting 3-5. How to change the relationship between transfer direction and piping position 3-6. How to change piping port position 3-7. Shock absorber resistance adjustment method 4. Operation P.12 5. Pneumatic circuit P.12 6. Maintenance P.13 6-1. Check items 6-2.

ML1C

15 5 10 1 pc. 2 pcs.

Manifold Specifications

Flow Characteristics at the Number of Manifold Stations (Operated single/double type individually) Passage/Stations Station 1 Station 5 Station 10 Station 15 Station 20 2.7 0.15 0.62 2.8 0.10 0.65 C [dm3/(sbar)] b Cv 2.7 0.16 0.61 2.8 0.12 0.66 2.7 0.16 0.61 2.9 0.12 0.66 2.7 0.15 0.61 2.9 0.12 0.66 2.6 0.20 0.63 2.9 0.12 0.66 1 4/2 (P A/B) C [dm3/(sbar)] b Cv 4/2 5/3 (A/B R1/R2) Manifold

0.01

0 w q t e u Cover 2 Aluminum alloy Fitting body 3 Stainless steel alloy Bracket 4 Stainless steel alloy O-ring A 5 H-NBR O-ring B 6 H-NBR Rod cover 7 Stainless steel alloy Tie-rod 8 Stainless steel alloy Cap nut 9 Stainless steel alloy Plain washer 10 Stainless steel alloy Replacement Parts r y o No.

SI unit (CC-Link compatible)

Dimensions for installation n: number of valve stations n L 1 2 3 4 5 6 7 8 L1 120.7 136.7 152.7 168.7 184.7 200.7 216.7 L2 80 96 112 128 144 160 176 n L 9 10 11 12 13 14 15 16 L1 232.7 248.7 264.7 280.7 296.7 312.7 328.7 344.7 L2 192 208 224 240 256 272 288 304 (mm) The above table shows dimensions as an example for the SY5000 series valve manifold.

Hand Valve Series VH 1

VHS 5-8-15

AMF

190 13 13 16 16 19 55 66 72 92 98 63 76 76 90 90 7.5 4 4 5 5 63 76 76 90 90 10 10 10 10 10 AMF150 AMF250 1/2 3/8, 1/2 AMF350 3/4 AMF150SAME, #1 AMF250SAME, #2 AMF350SAME, #3 4.6-31 Odor Removal Filter Series AMF Dimensions: AMF450 to AMF850 HAl AT IDl AMG AFF AMl M Dimensions with mounting bracket Model Port size (Nominal size B) A H B C D E F G I 221 J 25 K 10 L 14 N 90 O 55 P 110 Q 50

SI unit for PROFINET

length (L) 4 1500 [mm] 5 3000 [mm] 6 5000 [mm] Item Specifications Pin No.

ALF400 to 900, ALT-5/-9

F L A N 5 1 . 3 ) 0 8 ( 9 3 . 9 ) 5 . 8 3 2 ( 3 7 . 1 ) 4 4 ( 2 / 1 8 / 3 4 / 1 6 0 N 0 0 4 F L A N 5 3 . 3 ) 5 8 ( 0 7 . 9 ) 5 . 6 4 2 ( 1 8 . 1 ) 6 4 ( 4 / 3 0 0 5 F L A N 4 5 . 3 ) 0 9 ( 3 6 . 1 1 ) 5 . 5 9 2 ( 9 8 . 1 ) 8 4 ( 1 4 / 3 0 0 6 F L A N 4 9 . 3 ) 0 0 1 ( 8 5 . 2 1 ) 5 . 9 1 3 ( 1 0 . 2 ) 1 5 ( 1 0 0 8 F L A N 4 9 . 3 ) 0 0 1 ( 3 3 . 3 1 ) 5 . 8 3 3 ( 2 3 . 2 ) 9 5 ( 2 /

SYJ Series

Connector mounting position SYJ300 M1.7 0.12N.m SY3000-37-81A-2-N Single1 to 4stations SYJ500 M2.5 0.45N.m SY3000-37-81A-2-5 Double/3 position : 1 to 4 stations SS5YJ3-21,32SA SY3000-37-81A-1-N Single5 to 8 stations SYJ700 M3 0.8N.m SY3000-37-81A-1-4 Double/3 position : 5 to 8 stations SS5YJ5-20,40,42,43SA SY3000-37-81A-2-N Single1 to 8stations SY3000-37-81A-2-5 Double/3 position : 1 to 8

H/DL/L/LL

Weight (g) 5 7 8 13 14 Applicable tubing O.D. Applicable tubing O.D. Weight (g) 0.7 1.1 1.4 1.7 2.0 Applicable tubing O.D. Part no. Part no. Part no. Part no. N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

VM

P . 5-6-48 P . 5-6-54 P . 5-6-32 P . 5-6-26 7 3 Balanced poppet 10.8 5 Rubber spool 18 5 Metal spool 9.9 5 Metal spool 18 5 Rubber spool 6 3 Balanced poppet Dual pressure is available only on external pilot. 5-6-3 Mechanical Valves Series VM Precautions Be sure to read before handling.

ZSE30/ISE30

Due to the individual product difference, the setting range varies 10% F.S. Blue DC() -26 Analog output type 1 to 5 V (2.5% F .S.) Output impedance: 1 k Bring the pressure back to atmospheric pressure and try using the zero out function.

Compact Cylinder: Standard Type Double Acting, Single Rod Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 2

20, 25 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Rod end thread Female thread 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Rod end thread tolerance JIS class 2 50 to 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 +1.0 0 Stroke length tolerance When stroke exceeds the standard range, refer to page 7-6-121.

3 Port Air Operated Valve

6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 stations Station n L1 L2 1573

Mist Separator

How to Order 9 5. Structural Drawing, Option and Replacement Parts 10 6. Bowl Assembly Specifications 11-18 7. Assembly of Optional Parts 19 8. Operation and Adjustment 20-21 9. Trouble Shooting 22 10. How to Replace the Components 23-26 10-1. Bowl Assembly Replacement 23-24 10-2. Element Replacement 25-26 11. Disassembly Drawing 27 12.

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

N.C. auto drain not available for AM650 Options J: With drain guide T: With element service indicator HAl AT IDl Element service indicator AMG Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 55 6 6 7 7 9 9 9 11 N 35