Compact and Lightweight

ZA A B t 2 x D ZX C ZM ZL ZH ZH ZH ZH -X267 ZH13 to 20DA 2 x D B ZHP A F E C ZU VQD-V Long clamping screw set for 1 station required for assembly needs to be ordered separately.

I/O Configurator (NFC version)

D A protocol that automatically allocates information, necessary to be registered to use the network, such as an IP address, to individual devices connected to the TCP/IP network. DHCP A Dummy Remote can be used to reserve a dummy area within the I/O map.

Ejector Valve Unit Series ZYY/ZYX

ZX B B A B A B ZR P1 A A ZM 10 9 4 5 ZMA ZQ 3 ZH ZU ZL ZY ZF 11 ZP Section A-A' (Ejector) 12 SP 2 7 ZCUK AMJ 8 AMV AEP HEP Related Equipment 6 1 Section B-B' (Solenoid valve) Component Parts Replacement Parts Description Material Note Description Part no. No. No.

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

, 2(B) port] 24 13.3 13.3 24 16.2 16.2 34 17 36.7 34 B 2 PE B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 R 3 R 3 P 1 1 P A 4 X A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 A 2-One-touch fitting [1(P), 3(R) port] Applicable tube O.D.: 8 2-One-touch fitting (X, PE port) Applicable tube O.D.: 6 2n2-One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 4, 6 U side D side (L4) Applicable connector: 26 pin MIL

2/3 Port Valve for Various

8 Dimension of view from A Pilot port Port size P Rc , With bracket E Port size View from A Model A B C D VXA22 52 60 02 03 VXA226 -04 2 0 1 4 3 8 22 28 11 14.5 67 73 77 83 27 30 1 2 Fixing with thread is also possible. 17-3-96 The VX series will be revised shortly.

XMD/XYD Series

Closing the valve for initial pumping and main pumping When the air pressure is released from the pilot port S and M, S and M valve will return and start sealing. 9 XL-OMP0003-A 6. Dimensions C D L1 L2 Fd Fc C Fn (Fc) (KF Flange) (K Flange) (CF Flange) K B J H A G A Unit: mm Model A B C D Fn Fd Fc G H J KK P.C.D.

Modular Type Regulator Series AR

A y OUT 2 I N 1 SMC A t e IN OUT r q w Parts list Material Note Description No.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

5 15-9-59 4 Series AS-FM Dimensions: Elbow Type M5 type U10/32 type Applicable tubing O.D. d Applicable tubing O.D. d H H (Hexagon width across flats) (Hexagon width across flats) A L4 A D1 L4 D1 L3 L3 M1 M1 T D2 L1 D2 L1 T L2 L2 Metric Size A L4 Weight (g) d T Model M1 D2 L2 L3 D1 L1 H Min. Min. Max. Max.

Electro-Pneumatic Positioner

D. 7 to 9:P368010-26 Applicable cable O.

PFxx-OMP0001CN

PFMB7501/7102/7202 2x A B D E F H K L N PFMB7501/7102 70 30 43.7 37.2 15 14 26 18 13.6 PFMB7202 90 35 49.2 42.7 17.5 24 31 28 16.8 S T U V W PFMB7501/7102 24 22 32 40 50 PFMB7202 30 30 42 48 58 -67No.PF-OMP0001CN-F (ZS-33-D) (ZS-33-F) -68No.PF-OMP0001CN-F Revision history A B C D E F [September 2016] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81

Solid State Auto Switch

D-M7BA# Sheath Outside diameter (mm) 2.6 Wires 2-wire (Brown, Blue) Insulator Outside diameter (mm) 0.88 Cross section (mm2) 0.15 Conductor Wire diameter (mm) 0.05 Min. bending radius (mm) (Reference value) 17 -15No.D-S-OMZ0004 Dimensions D-M7BA# Pre-wired connector A B D-M7### PC D-M7###DPC -16No.D-S-OMZ0004 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3

9.8

D-DN

Large Capacity Compressed Air Filters Series AFW

A 3.0 D Specification Element Model A B SCFM Nm3/h C D In/Out Side Bottom Lbs Dimensions (in) Connections (NPT female) Flow Rate Weight Model Number 5.5 1/4 1/8 male 1 1.25 6 14 4.5 AFW150-N10DG-[a] 255 EL-AFW150-[a] 150 12 1/2 1/4 1-1/2 1.5 6.5 19 5.75 AFW225-N14DG-[a] 382 EL-AFW150-[a] 225 12 1/2 1/4 1-1/2 1.5 6.5 19 5.75 AFW300-N14DG-[a] 510 EL-AFW150-[a] 300 B 12 1/2 1/4 2 1.5 6.5 19

Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

, D-F9WV D-F9P B, D-F9W D-A9V D-F9N D-F9V Number of auto switches 2 pcs. 15 Note) 20 Note) 10 10 5 10 Note) 15 Note) 20 Note) 5 5 1 pc.

NVEPA|VEFseies

A Flow Rate Type (NVEfl which controls air flow by varying current through the solenoid. fi#fr $.E#E ,q Ff i l F l E K f:-J r r l tr-t NVEF2l2c) vEF2isO a t{YEF2l4O Flow Rate (NVEF:I) B -P{ Reasure ryp (l{vEP3t d | | vEP3r20 F'---r-. .l t EBrrO Index 2. 3 Port Electro-Pneumatic Proportional Valve NVEF, NVEP Specifications P O H o w t o O r d e r . . . . . . . .

OML0002-C

Always use a UL listed/recognized power supply that is a class-2 power supply with DC 24 V and under 2.1 A. 3. To keep specified performance of the product, provide class D grounding to the metal (shaded) part around the external face of the product.

Pressure Switch/Reed Switch Type

D-KS

Air Gripper for Collaborative Robots

If a workpiece is still being held, there is a danger of it being dropped. 44 - Revision history D. YASKAWA Plug & Play Kit add. E.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

This product cannot be used to hold a stop position for an extended period of time. Pilot check valves and actuators are not guaranteed for zero air leakage. Therefore, it is sometimes not possible to hold a stop position for an extended period of time. In the event that holding for an extended time is necessary, a mechanical means for holding should be devised. 3.

High Pressure Coolant Valve

Accessory Function plate for VO307 (D sealing, with thread): DXT152-14-5A 628 A VNH Series High Pressure Coolant Valve 3.5 MPa, 7.0 MPa Specifications 3 port valve 2 port valve A B Model A B VNH211 -15A A B VNH311 -20A A B VNH411 -25A A B VNH113 -10A A B VNH213 -15A A B VNH313 -20A A B VNH413 -25A A B VNH133 -10A A B VNH233 -15A A B VNH333 -20A A B VNH433 -25A VNH111 -10A Operating fluid