Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not

Large Flow Air Filter AF800/900 Series

D-R Note 3) Options for 2, 6, and 8 can not be specified at the same time. (Ex.) 68 Note 4) Symbols 9, D, J can not be specified at the same time. (Ex.) 9-D-J Note 5) For products with auto drain, either symbol D or J cannot be specified at the same time. 1 Indicate the required filtration rate after the symbol 1. Ex.)

C76

5 Cylinder: Standard/Non-rotating Type Double Acting, Single/Double Rod Series C76 32, 40 How to Order CJ1 C Double acting Single rod K R2 76 J D E C A 32 100 CJP CJ2 C Double acting Double rod W 76 D E 32 100 C JJ B CM2 Auto switch mounting type CG1 Rail mounting Band mounting A B Built-in magnet MB None Built-in magnet Nil D Applicable auto switches and bands are shown on pages 6-10-45

Rotary Actuator Vane Type CRB2 Series Size: 10, 15, 20, 30, 40

D-LC05: Lead wire 0.5 m D-LC30: Lead wire 3 m D-LC50: Lead wire 5 m Symbol Shaft type Shaft-end shape Long shaft Short shaft S Single shaft Single at* W Double shaft Single at* Single at J** Double shaft Round shaft Single at K** Double shaft Round shaft Round shaft T** Single shaft Round shaft Y** Double shaft Single at* Long shaft with single at* w Mounting Symbol Mounting B Basic type

EX510 Gateway-type Serial Transmission System Plug-in Unit Series SQ1000

Stations Option 01 None DIN rail length specified Back pressure check valve Nil 02 to 16 (1) Double Wiring 08 8 stations B (2)(3) Note) Max. 16 stations (Special wiring specifications) K (4) Special wiring specifications (Except double wiring) With name plate (Side ported only) External pilot specifications Built-in silencer, direct exhaust N R S Note 1) Specify DIN rail length with D at

High Pressure Coolant Valve: 3.5 MPa, 7.0 MPa VNH Series

Rc G NPT NPTF Nil F N T None With bracket Nil B Valve type 1 3 N.C./3.5 MPa N.C./7.0 MPa Electrical entry/With light/surge voltage suppressor D DIN terminal Seal material DZ DIN terminal with light/surge voltage suppressor A B NBR seals FKM seals Rated voltage Valve size Port size 3 2 1 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 10A 15A 20A 25A 1 2 3 4 3 8 1 2 3 4

Microspeed Cylinder: Double Acting/Single Rod Series CJ2X ø 10, ø 16 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Note 16 CJ-L016B CJ-F016B CJ-T016B 10 16 Foot bracket Flange bracket T-bracket Common for models D-C7, D-C8, and D-H7 BJ2-010 BJ2-016 Caution 1. For Series CJ2X, up to 0.1Nl/min (ANR) of internal leakage is anticipated due to cylinder structure. T-bracket is applicable to double clevis type (D). 2

HRX-OM-M091

Refer to 4.3.2 Setting and checking,5.3.2 Setting and checking. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

HRX-OM-Q033

Refer to 4.3.2 Setting and checking,5.3.2 Setting and checking. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

HRX-OM-S010

Refer to 4.3.2 Setting and checking,5.3.2 Setting and checking. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

High Vacuum L Type Valve

5-2.Dimensions C E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

High-precision Digital Pressure Switch ( compatible)

Normal output Reversed output P_1(P_2)=A-(A-B)/4 n_1(n_2)=B+(A-B)/4 A = Maximum pressure H_1(H_2)= (A-B)/2 H_1(H_2)= (A-B)/2 B = Minimum pressure If setting is not necessary press the UP and DOWN buttons simultaneously for 1 second or longer. -36No.PS-OMV0004-H [F 6] Fine adjustment of display value This function is to manually perform a fine adjustment of the displayed pressure value.

Clamp Cylinder with Magnetic Field Resistant Auto Switch (Rod Mounting Type) ø 40, ø 50, ø 63 CKG1/CKP1 Series

Type Applicable cylinder series Auto switch model Applicable magnetic field Electrical entry Wiring (Pin no. in use) Lead wire length Indicator light Load voltage Applicable load D-P3DWASC D-P3DWASE D-P3DWA D-P3DWAL D-P3DWAZ D-P4DWSC D-P4DWSE D-P4DWL D-P4DWZ D-P79WSE D-P74L D-P74Z 2-wire (34) Pre-wired connector 0.3 m 2-wire (14) 0.5 m AC magnetic field (Single-phase AC welding magnetic field

VH Series, 4 Way Hand Valve

44 2A +0.3 0 1 (P) 3 (R) C +0.5 0 B0.1 4-1/4,3/8NPT 4 (B) Max. panel thickness D (mm) A 3.2 3.2 3.2 B 40 51 64 C 35 41 51 D 3.5 6 8 VH200 type VH300 type VH400 type 8 Panel Mount/Dimensions Series VH (mm) / Panel mount type Dimensions VH41 -N02/N03/N04 VH41 -N06 Scale: 35% 2 (A) 4 (B) 4 (B) 2 (A) 25 25 3 (R) 1 (P) 3 (R) 1 (P) 88 102 89 107.5 19 102 46.6 46.6 88 81 94 148 144 97 97 67 1.5

High-precision Digital Pressure Switch

Normal output Reversed output P_1(P_2)=A-(A-B)/4 n_1(n_2)=B+(A-B)/4 A = Maximum pressure H_1(H_2)= (A-B)/2 H_1(H_2)= (A-B)/2 B = Minimum pressure If setting is not necessary press the UP and DOWN buttons simultaneously for 1 second or longer. -39No.PS-OMV0009-E [F 6] Fine adjustment of display value This function is to manually perform a fine adjustment of the displayed pressure value.

FGX-OM-N027

B Mounting of V band (Incorrect, not horizontal) Mount V band. -1 Mount V band to the brim of the cover and the case.(Fig. A, B) 12 / 13 FGX-OM-N027-B -2 Set the tightening bolt to the hole and tighten it properly. (Fig. C) -3 Tighten bolt. (Fig D) Hole Contact closely Tightening bolt Tightening bolt Fig. C Position for V band bolt for tightening Fig.

CG1x-OM0006N

M4x0.7x22L 20 NBA-088S 25 NBA-106S (mm) 32 BGS1-032S 40 BAF-04S 50 BAF-05S 63 BAF-06S 80 BAF-08S 100 BAF-10S D-G5BA mm 20 25 32 40 50 63 80 100 D-G5BA 5 5 5.5 6 7 7.5 7.5 8 30% 1 2 2 mm mm D-G5BA A B Hs 20 25 31.5 31.5 24 26 24 25 28 36 36 46 80 28.5 32 40 50 63 32.5 33 37 36.5 45.5 45.5 42 48.5 57.5 56 100 57 46 68 (mm) 10 20 75 15 3. 3-1. 1 2 3 4 5 6 7 8 9 10 1 2 3 416

“Going to

Going to Great Lengths with Polyurethane Tubing L G O B A S L N O P I R T O U D L O U S C T L S A B O G L Polyurethane Tubing Series TIUB & TU SMC Offers a Rainbow of Tubing Types, Colors, Sizes and Lengths Polyurethane has 8 Quick Ship colors, equalling 336 part numbers, stocked on the shelf and ready to ship in all available sizes and lengths.

VHS20/30/40/50

E C Padlock mounting position C D D Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SUP SUP . A OUT IN A OUT IN 1 2 B 3 B EXH. EXH.

Compact Cylinder: Guide Rod Type ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Series CQM

Compact Cylinder: Guide Rod Type 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 Series CQM How to Order B 20 10 CQM M9BW B 20 10 CDQM With auto switch Number of auto switches With auto switch (Built-in magnet) Nil S n 2 pcs. 1 pc. n pcs.