Vacuum Module Series ZX

SMC SMC Pitch = 21 20 10 10 10 Manual override (Simply turn the locking type override.) L3 L2 L1 4 10 Vacuum switch ZSE2 8 Pressure setting trimmer 15 (Needle fully open) Filter Body (Air operated type) (ZX1A) 18 Adapter B M5 Pilot port 9.3 (44) M5 External release port 13 22 35 37.4 45.4 Adapter D 58.3 Individual spacer ZX1-R1 Release valve VJ314 Pilot valve for supply (N.C.)

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Flat wi1h rib mm Model ;A ;B .c F:M5 x O .8 F:M6 x l F: }l 1 Y Model ;A ;B c F:M 6x l F :lJllxl251 F: ~ E Y D E . G .D. E G D E 0 D ..1 D Flat Flat wit. h rib ZPTIOg 10 ! 12 I 12 5 21 8 6 21 8 6.2 27 ZPT40g 40 43 18.5 6 8 6.2 32 6.5 3.3 2PTSOl!

CLA

::;Hs 1(0) 1(0) 5(1.5 8 4 0(6.5) 71.5 76.5 84.0 92.5 \02.5 D-A4 A 0(0) 0(0) 0(2.5) 2(6 4(75) [).Q3 B 1(0) 1(0) 5(1.5) 8(4) 10(6. 5) D-K3 ~ H, B3 88 95.5 10. 114 A 0(0) 0(0) 0(3 2.56.5 4.5 8 D-G5, [)'B5 1.5(0 1.5(0) 5.5(2) 8.5 4.5 10.5(7) ~.D-K5 ~ , 38 43.5 SO.5 59 69.5 A 0(0) 0(0) O{4.S 3 8) (9.5) D-I'S B 3(0) 3(0) 7(3.5) 10{6 12(8.5) , , D-JS 40 43.5 49 55.5 83 ~ Ht 31 42 35 so 51.5 _A 0

Air Slide Table Series MXP

12 16 Electrical entry from outside D-A9/A9V D-M9/M9V D-M9W/M9WV 5 5 5 5 5 A A 3 3 3.5 3 3 MXH A B MXU Minimum Auto Switch Mounting Stroke Electrical entry from inside (mm) MXS B C Applicable auto switch model No. of auto switches mounted MXQ D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV MXF 1 pc. 2 pcs. 5 10 5 10 5 5 B D MXW MXJ Parallel electrical entry B A Auto Switch Mounting MXP MXY Caution

RQ

, A80 D-A7H, A80H D-A73C, A80C 12 12 13 12 12 12 11 10 D-A79W D-A9, A9V 16 11.5 15 9 17 11.5 13 13 13 14 14 9.5 9.5 9.5 D-F7, F7V D-J79, J79C, J79W D-F7W, F7WV D-F79F, F7BAL D-F7BAVL 5.5 5 6 6 6 6.5 6.5 7 D-M9, M9V D-M9W, M9WV D-F9BAL 4 4 4 4 4.5 5.5 5.5 5.5 6.5 5.5 6.5 Hysteresis specifications are given as a guide, it is not a guaranteed range.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

D Plug-in Reducer: KPR Applicable tubing D Effective area mm Note 1) D Model L TPH TPS Applicable fitting size d Applicable tubing O.D. mm Weight g M A 3 20.1 39.4 KPR04-06 6 4 10.4 18 4 4 4 41.9 20.2 KPR04-08 8 42.5 20.8 4 KPR06-08 6 12.8 19.5 10 10 Applicable fitting size d 21.2 5 45 KPR06-10 10 5 23.2 47 KPR08-10 8 15.2 21.5 26 18 6 48 23.2 KPR08-12 12 d 10 18.5 24 41 29 50.5 25.7 9 KPR10

Air Slide Table Series MXQ

, D-A93, D-A96, D-A90V, D-A93V, D-A96V Stroke B Stroke E Model A 10 20 30 40 50 75 100 125 150 10 20 30 125 40 50 150 75 100 11.5 (9) 14 (11.5) 19.5 (17) 18.5 (16) 31.5 (29) 30.5 (28) 11.5 (9) 29 (26.5) 19.5 (17) 24.5 (22) 29.5 (27) 44.5 (42) 3.5 (1) 6 (3.5) 12.5 (10) 18.5 (16) 31.5 (29) 40.5 (38) 3.5 (1) 10 (7.5) 12.5 (10) 18.5 (16) 21.5 (19) 30.5 (28) 3.5 (1) 6 (3.5) 22.5 (20) 28.5 (26)

Low Friction Cylinders Series MQ

0.2 D W E M K B + Stroke L 0.2 A + Stroke M E (mm) Bore size (mm) P Stroke range (mm) RB Note) H OA A B C D E F W I Y J K L M N OB Q RA TN TF 10 39.5 M3 x 0.5 M4 x 0.7 10 to 40 31.5 6 6 ( 5.8) 29 5.5 38 4 5 5 8 20 3.5 6.5 14.5 7 16 44 M4 x 0.7 M6 x 1.0 10 to 60 34 8 8 ( 7.8) 36 5.5 47 7 5 7 10 25.5 5.4 9 18 10 20 47.5 M5 x 0.8 M6 x 1.0 10 to 60 37.5 10 10 ( 9.8) 40 5.5 52 7 6 8 10

NCA1

Auto switch capable Bore size Standard Stroke 1.50 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20 2, 2.50 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 3.25, 4 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28 How To Order NC D A1 B 150 0400 A XC9 Adjustable Stroke Retract Auto Switch Mounting Bore Stroke Adjustment Range A: 0~1 B: 0~2 Dimensions d (in) Bore (in) MM KK A AA B C D DD E

ISO Standard Hydraulic Cylinder

Built-in Symbol D Nominal pressure CHS CHS 1 pc. 10 MPa "n" pcs.

e

Auto Switch Proper Mounting Position at Stroke End Detection LJ1 LJ1 LG1 LG1 LTF LTF LC1 LC1 LC7 LC7 LC8 LC8 LXF LXF LXP LXP A LXS LXS LC6m LC6m (mm) D-M9, D-M9mV D-M9mW, D-M9mWV (mm) D-A9, D-A9mV LZm LZm Operating range Operating range Nominal size Nominal size A A Model Model E-MY2C E-MY2H E-MY2HT E-MY2C E-MY2H E-MY2HT 4 8 LC3F2 LC3F2 6 16 16 6 10 30 34 Xm Xm 8.5 E-MY2C E-MY2H E-MY2HT E-MY2C

LEC-OM02904

d 2. 10% 3. 4.

Round Type Hydraulic Cylinder

Operating Range (mm) (mm) Auto switch model Bore size 20 25 32 40 Auto switch model Bore size 20 9 7 25 8.5 6 32 10 8 40 10.5 8 D-M9(V) D-M9W(V) D-M9A(V) D-H7/H7C D-H7W D-H7NF/H7BA D-G5/K59/G59F D-G5W/K59W D-G5BA/G5NT D-G39/K39 D-A9(V) D-C7/C80 D-C73C/C80C D-B5/B64 D-B59W D-A3/A44 4.5 6.5 4.5 6.5 8 10 9 10 4.5 5.5 5 5.5 8 13 9 10 13 10 9 14 10 10 14 11 5 5 5 5.5 Since this is a guideline

Air Cylinder NCA1 Series

24VDC 5~20MA YES D-F59 28VDC OR LESS 150MA 3 WIRE (NPN) 600 (6 Bore) 24VDC 5~20MA D-F5P 100MA 3 WIRE (PNP) BT-18A 800 (8 Bore) D-A54 100VAC 5~25MA YES D-J59 24VDC 5~150MA 2 WIRE BT-20 1000 (10 Bore) 200VAC 5~12.5MA (10~28VDC) 1200 (12 Bore) D-A56 4~8VDC 20MA YES D-F59W 28VDC 80MA 3 WIRE (NPN) D-A59W 24VDC 5~40MA YES D-F59PW 80MA 3 WIRE (PNP) 24VAC/DC 50MA D-J59W 24VDC 5~40MA 2 WIRE D-A64

NCA1

24VDC 5~20MA YES D-F59 28VDC OR LESS 150MA 3 WIRE (NPN) 600 (6 Bore) 24VDC 5~20MA D-F5P 100MA 3 WIRE (PNP) BT-18A 800 (8 Bore) D-A54 100VAC 5~25MA YES D-J59 24VDC 5~150MA 2 WIRE BT-20 1000 (10 Bore) 200VAC 5~12.5MA (10~28VDC) 1200 (12 Bore) D-A56 4~8VDC 20MA YES D-F59W 28VDC 80MA 3 WIRE (NPN) D-A59W 24VDC 5~40MA YES D-F59PW 80MA 3 WIRE (PNP) 24VAC/DC 50MA D-J59W 24VDC 5~40MA 2 WIRE D-A64

VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

SMC Wireless System EtherNet/IP ® compatible

/ED5 -97No.EX-OMU0028-D EX600-ED4/ED5-2 -98No.EX-OMU0028-D EX600-ED4/ED5-3 -99No.EX-OMU0028-D EX600-EU1 EX600-EU1-2 -100No.EX-OMU0028-D EX600-EU1-3 -101No.EX-OMU0028-D Accessories -102No.EX-OMU0028-D 1.

Air Slide Table Series MXS

Solid State Auto Switch: D-M9B, D-M9N, D-M9P, D-M9BW, D-M9NW, D-M9PW Stroke B Stroke E Model A 40 50 150 10 20 30 40 75 100 125 150 10 20 30 125 75 100 50 B MXS6 -0.4 -0.4 -0.4 11.6 17.5 9.6 9.6 9.6 21.6 27.6 10 MXS8 4.9 -0.1 0.9 8.9 16.9 41.9 14.9 9.9 10.9 18.9 51.9 26.9 11.6 MXS12 32.4 22.4 12.4 14.4 45.4 74.4 24.4 22.4 12.4 2.4 4.4 14.4 35.4 64.4 15.6 MXS16 32.7 22.7 12.7 12.7 42.7

REC

Eh8 D MM AL CX -0.1 -0.2 K A U CZ N N F S+Stroke H L lNA Z+Stroke RR ZZ+Stroke (mm) A AL B1 CD CX CZ D E F G H H1 I K L MM N Bore size Stroke range 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 M8 X 1.25 18 15.5 13 9 10 8 20 13 10 41 5 33.5 5 30 20 19 150 to 700 M10 X 1.25 25 22 19.5 17 9 10 10 26 13 10 45 6 37.5 5.5 30 20 19 150 to 700 M10 X 1.25 32 22 19.5 17 9 10 12 26 13 11 45 6 46.5 5.5 30

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

55) 26 56 (63) 0 0 (17) D-A9, D-A9V 0 (15) 0 40 40 (55) 32 32 (47) 0 0 (15) 25 D-M9,D-M9V D-M9W, D-M9WV 40 (42) 0 40 50 (57) 47 72 (74) 15 10 (17) D-A9, D-A9V 0 (15) 0 50 50 (61) 38 38 (53) 0 0 (11) 32 D-M9, D-M9V D-M9W, D-M9WV 10 (17) 0 50 55 (63) 38 48 (55) 0 5 (13) D-A9, D-A9V 0 (15) 0 54 54 (64) 48 48 (63) 0 0 (10) 40 D-M9, D-M9V D-M9W, D-M9WV 15 (22) 0 54 59 (66) 48 63 (70) 0 5 (12)