SMC Corporation of America
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AW-OMS0038-C PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2. APPLICATION 7 3.

VQC4000 VVQC4000-2A-1 Thread type Nil F T Rc G NPT/NPTF 22 Manifold Specification Sheet Series VQC1000: Base-Mounted Type/Plug-in Unit q How to order manifolds VV5QC 1 1 08 FD1 B C6 F P T Kit / / 1 2 3 8 VV5QC 1 1 08 SDQ B C6 S Kit Fill out for I/O serial kit only.

This specification is not available for the rotary actuator with auto switch unit. 2 d Body (B) (mm) (mm) M N Size d Size Q 10 9.5 8.5 3.4 10 M3 15 10 11 3.4 15 M3 Body (A) 20 13 14 4.5 20 M5 DQ N 30 A port B port (Standard) (Altered) A port 14 15.5 B port 5.5 30 M5 40 20 21 5.5 40 M5 M 113 Series CRBU2 Symbol: C4 Applicable to single vane style only Symbol: C3 Change the position of the

Auto switch model D-Y59m D-Y69m D-Y7P D-Y7PV D-Y7H D-Y7mW D-Y7mWV D-Y7BA D-Z7m D-Z80 D-M9m D-M9mV D-M9mW D-M9mWV D-M9mA D-M9mAV D-A9m D-A9mV D-F5m D-J59 D-F59F D-F5NTL D-A5m D-A6m D-A59W D-G39 D-K39 D-A3m D-A44 D-P3DWA D-P4DW A B A B A B A B A B A B A B A B A B A B 32 13.5 10.5 9.5 6.5 10 7 15 12 3.5 0.5 7.5 4.5 3.5 0.5 7 4 9 6 6.5 3.5 40 10.5 14 6.5 10 7 10.5 12 15.5 0.5 4 4.5 8 0.5 4 4

Normal output Reversed output P_1(P_2)=A-(A-B)/4 n_1(n_2)=B+(A-B)/4 A = Maximum pressure H_1(H_2)= (A-B)/2 H_1(H_2)= (A-B)/2 B = Minimum pressure If setting is not necessary press the UP and DOWN buttons simultaneously for 1 second or longer. -41No.PS-OMW0014-B [F 5] FUNC terminal setting When the product with analog output/auto shift input function is used, the FUNC terminal setting can

Take special care. -10No.PF-OMW0004-B Model Indication and How to Order Integrated type: Basic type -11No.PF-OMW0004-B Integrated type: Straight type -12No.PF-OMW0004-B Remote type: Supply type -13No.PF-OMW0004-B Remote type: Return type -14No.PF-OMW0004-B Table 1. Return unit flow switch output specification OUT1 OUT2 Temp.

Type A B C Accessory fittings Clamp fitting L AERSBAN-DSET 100 86 30 clamp A: 2pcs. A 70 AERSBAN-ESET 70 56 clamp B: 1pc. B 45 11 27 11.

Auto switch capable How to Order NC D A1 B 150 0400 + 0200 H XC11 R Mounting Bore size Auto switch Stroke B-A Dual operationSingle rod Stroke A Cushion Both ends N W/o cushions H Head end R Rod end Dimensions PA + Stroke B PB + Stroke A 4-EE (NPTF) 4-DD D across flats Stroke A Stroke B 4-NT Depth ND SN + Stroke A + Stroke B LF + Stroke A + Stroke B ZB + Stroke A + Stroke B Bore size (in)

150 0400 N 0200 R XC10 CA2 Auto switch Stroke B Dual operation Double rod Mounting Bore size CS1 Stroke A C76 Cushion Both ends N W/o cushions H Head end R Rod end Dimensions C85 C95 CP95 P + stroke A 4-EE (NPTF) P + stroke B 4-DD NCM D across flats D across flats NCA D-X Stroke A Stroke B SN + Stroke (A + B) 4-NT Depth ND 20LD + Stroke (A + B) Data ZZ + Stroke (A + B) Bore size (in) MM

Power Supply Cable with M12 Connector (B-coded) SPEEDCON Straight connector type Angle connector type Socket connector pin arrangement B-coded (Reverse key) -114No.EX-OMU0028-D 8.

Note 1) Same as standard product except for cover assembly Note 2) 03, 04, and 06 indicate the relevant port sizes (Rc3/8, 1/2, 3/4). 108 108 AIR VENT M6 x P1 G1/2 AIR VENT M6 x P1 2 x RcD 2 x RcD C B A B OUT IN OUT IN C A DRAIN G1/4 DRAIN G1/4 (mm) (mm) A B D C A B D C Model Element length Model Element length A (L250) A (L250) 314 70 374 314 70 407 FGDC FGDE FGDC FGDE B (L500) B (L500)

(mm) Model Clean series M B Black 8 10 5 6.5 12 8 2.5 6 4 4 Tubing I.D.

1 ) 0 . 1 ( 1 2 . 2 ) 5 1 . 1 ( 4 5 . 2 ) 5 8 . 1 ( 8 0 . 4 ) 9 . 1 ( 9 1 . 4 ) d r a d n a t s ( d r a u g l w o B t e k c a r B P 4 4 B P 1 4 4 B P 1 5 4 B P 2 5 4 B P 6 4 B F 8 6 e r u t a r e p m e T , 2 3 G V 1 # l i o e n i b r u t e s u , n i m / s p o r d 5 e t a r p i r d l i o g i s p 3 7 f o e r u s s e r p y l p p u s h t i W * s e i r e S T L A N k n a T d e e F o t u A l

Hs B A B A 13 Series CM3 Auto Switch Proper Mounting Position (Detection at stroke end) and Its Mounting Height Auto Switch Proper Mounting Position (mm) Auto switch model D-A3lA D-A44A D-G39A Note 2) D-K39A Note 2) D-M9l D-M9lW D-A9l D-B59W D-H7C D-H7BAL D-H7NF D-G5NTL D-B54 D-B64 D-C73C D-C80C A A B A B B B A B A B A B A B Bore size A 20 25 32 40 10 9 6 5 0.5 0 5.5 3.5 2.5 0 0 5.5 4.5

Hs B 30 MLGP Auto Switch Proper Mounting Position (mm) ML1C Auto switch model D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV D-M9AL D-M9AVL D-Z7/Z80 D-Y5/Y6 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL D-A5 D-A6 D-A3 D-A44 D-G39 D-K39 D-F5W D-J59W D-F5BAL D-F5 D-J5 D-F59F D-A59W D-F5NTL Bore size (mm) A A A B A B A B A B B A B B 125 140 160 180 200 4 4 8 8 1.5 1.5 0 0 2 2 4.5 4.5 9.5 9.5 4 4 8 8 1.5 1.5 0 0 2 2 4.5

Change of fluid passage Flow Characteristics Flow characteristics 1 2 (P A) C [dm 3/(sbar)] 27 38 Port size 2 3 (A R) C [dm 3/(sbar)] 27 40 2 1 (A P) C [dm 3/(sbar)] 25 40 3 2 (R A) C [dm 3/(sbar)] 26 38 b 0.38 0.30 b 0.37 0.32 b 0.36 0.22 b 0.37 0.20 Cv 7.0 9.8 Cv 7.4 9.8 Cv 7.3 9.8 Cv 6.8 9.6 1/2 3/4 N.C. N.O.

lines in clean room environments TPH 06 04 B 20 Tube O.D.

-B 25 No.VQC1000V-OMM0001-B 26 No.VQC1000V-OMM0001-B 27 No.VQC1000V-OMM0001-B 28 No.VQC1000V-OMM0001-B 29 No.VQC1000V-OMM0001-B 30 No.VQC1000V-OMM0001-B When the valve is failing, use this flow chart to clarify the cause of the failure and take countermeasures appropriate for the cause.