Pressure Range: ISE76G (0 to 5 MPa), Piping: N02 (NPT 1/4), Orifice: None, Unit Specification: M (SI Unit Only)

Pressure Range: ISE70G (0 to 1 MPa), Piping: N02 (NPT 1/4), Orifice: None, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: L (Lead Wire with M12 Connector; Right-angled, 5 m), Bracket: B (Bracket B), Operation Manual/Calibration Certificate: Y (None)

.: 03 (5/32"), Port Size/Applicable Tube: N02 (1/4" Thread)

Pressure Range: ISE75G (0 to 2 MPa), Piping: N02 (NPT 1/4), Orifice: T (Orifice shipped with the Product), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: S (Lead Wire with M12 Connector; Straight, 5 m), Bracket: A (Bracket A, Interchangeable with ISE75[H])

.: 11 (3/8"), Port Size/Applicable Tube: N02 (1/4" Thread)

.: 03 (5/32"), Port Size/Applicable Tube: N02 (1/4" Thread)

.: 03 (5/32"), Port Size/Applicable Tube: N02 (1/4" Thread)

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Detecting rod assembly . 0.025 (8S-2) 18(Exclusive plug) 88-1 0.74+ 0.10 X 1 00/ 25 +0.28+0.4 + 0.025 = 1,845kgf Conc :litIOOS OUTside, supply pressure 5kgf/ cm ~, No-load (!)

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

VO325-00(-Q) Specifications Type of actuation Direct operated type 2 position single solenoid VT325-D Air Fluid Operating pressure range 0 to 1.0 MPa 5 to 50C Ambient and fluid temperature Max. operating frequency 5 Hz Response time (1) 30 ms or less (at the pressure of 0.5 MPa) Not required (Use turbine oil Class 1 ISO VG32, if lubricated.)

One-touch Fittings

Gasket for M5 thread: M-5G2 E Bulkhead union v v Bulkhead connector v v A KQ2 H 06 00 1 4, 6 (Oval type release button) Oval type release button KQ2 H 08 00 A 8 to 16 (Round type release button) Port size/Applicable tubing O.D.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Part no. 1 2 3 4 10 SV 00 X90 Entry is the same as standard products. Clean series Note) Because in series -X90 fluororubber is used for only main valve, the rubber parts of the application/usage in conditions requiring heat resistance should be avoided.

HRX-OM-X084

INP1 ALARM READY START REF PRSLO / / / / TEMP READY Time when it goes away Contact input signal 1Delay timer of reading / 40 Offset mode OFF Setting of low flow rate alarm 4 5 0 LOFL OFSET MODE READY OVER INP2 INP1 DELAY Upper limit of circulating fluid temperature monitoring function 400 / / / / Contact input signal 1 OFF Detection timer Detection time of low flow rate alarm 4 5 00

HRX-OM-W002

INP1 ALARM READY START REF PRSLO / / / / TEMP READY Time when it goes away Contact input signal 1Delay timer of reading / 40 Offset mode OFF Setting of low flow rate alarm 4 5 0 LOFL OFSET MODE READY OVER INP2 INP1 DELAY Upper limit of circulating fluid temperature monitoring function 400 / / / / Contact input signal 1 OFF Detection timer Detection time of low flow rate alarm 4 5 00

HRX-OM-X071

INP1 ALARM READY START REF PRSLO / / / / TEMP READY Time when it goes away Contact input signal 1Delay timer of reading / 40 Offset mode OFF Setting of low flow rate alarm 3 5 0 LOFL OFSET MODE READY OVER INP2 INP1 DELAY Upper limit of circulating fluid temperature monitoring function 400 / / / / Contact input signal 1 OFF Detection timer Detection time of low flow rate alarm 3 5 00

CEx-OMG0106

ML2B / W1 ML2B / M1 0 0 0 0 Momentum Nm 0 0 Load N 0 Piston Speed m/s Piston Speed m/s ML2B / W2 ML2B / M2 Momentum Nm Load N Piston Speed m/s Piston Speed m/s ML2B / W3 ML2B / M3 20 10 Momentum Nm 5 Load N 3 2 1 Piston Speed m/s Piston Speed m/s ML2B / W4 Allowable Kinetic Energy 00 H or izontal M ounting 100 5 00 Ver tical M ounting 50 Load N 0 0 1 00 Load N 0 50 5 Piston Speed

LEY-OM007

/ / INC()/ / b c 2mm d e f / P.41 7.2 / P.43 7.2 g INP ON INP INP ON / P.41 7.2 h / P.41 7.2 / P.42 7.2 i 100 % 150 % LEY16A 200 % LEY25A / P.42 7.2 j 12AREA ON 12 INC ABS() No.1 148 250 AREA k INP No.0 50+20 = 70 -24- 1 -IN INPAREA a b c d e f g h i j k No. 1 2 mm/s mm mm/s^2 mm/s^2 % % mm/s % mm mm mm 0 ABS 100 100.00 3000 3000 0 0 0 100 80.00 90.00 0.50 No.00

Flow Control Equipment

AQ240F-04-l 1.7 2.5 AS AQ240F-06-l 2.4 2.7 AQ340F-06-l 4 4 ASN How to Order Circuit AQ 2 4 0 F 06 06 AQ With silencer ASV AK Quick exhaust valve Exhaust port ASS 00 04 06 Built-in silencer Applicable tube O.D. 4 Body size Applicable tube O.D. 6 2 3 M5 1/8 IN, OUT port applicable tube O.D. 04 06 4 6 With exhaust port fittings In-line style Built-in One-touch fittings Note) Brass parts are

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6. 4-16-1 2 Series VS3115/3110 How to Order VS311 D L 5 01 5 Thread type Accessory (Option) Nil Rc Mounting With indicator light L P With manual override N NPT T NPTF E Nil Without bracket Port size Piping Electrical entry B With bracket G 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Without sub-plate Rc 01 02 02 03 00 Body ported

VT325

VO325-00 VQZ VT325-T Specifications VZ Type of actuation Direct operated type 2 position single solenoid VS Air Fluid Operating pressure range 0 to 1.0 MPa 10 to 50C (No freezing. Refer to page 4-18-4.)

Modular F.R.L. Unit

Contact P/A when mounting a pressure switch, T-interface, or filter regulator on the OUT side of the 3-port valve for residual pressure release. 0.6 0.6 0.5 0.5 Outlet pressure MPa Outlet pressure MPa 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 00 25 50 75 100 125 150 00 1000 2000 3000 4000 5000 Flow rate L/min (ANR) Flow rate L/min (ANR) AC20 Rc 1/4 AC50 Rc 1 0.6 0.6 0.5 0.5 Outlet pressure MPa Outlet