,,: ,.

Consult factory for avaitability. fttnlfibftilmm'solM 1/8', 5t32 311d' 114" 5/16' o o o c o o o 1 5 milbFffiHFmW 22 4 1 9 1 9 20 20 1 8 Plpe Reduclng Thrad Sizo Plp ThFad SEe 20 20 21 18 17 't7 | ."

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

External Grip Internal Grip MHR3-10R/MDHR3-10 MHR3-10R/MDHR3-10 10 10 0.6 MPa Pressure Pressure 0.6 MPa 8 8 Gripping force (N) Gripping force (N) 0.5 MPa External grip 0.5 MPa 6 6 0.4 MPa 0.4 MPa 4 4 0.3 MPa 0.3 MPa 0.2 MPa 0.2 MPa 2 2 0 10 20 30 40 50 0 10 20 30 40 50 Gripping point L (mm) Gripping point L (mm) Internal grip MHR3-15R/MDHR3-15 MHR3-15R/MDHR3-15 20 20 0.6 MPa Pressure Pressure

Rotary Table Series MSU

D-R80, D-S79, S7P 20 Double vane is available with 90 rotation setting only.

Dedicated Controller

LC1-1-T1-0 Supplied from LC1 Power supply Dimensions (mm) 170 x 76 x 20 The special cable is packed with the teaching box. (2 to 5m) Weight (g) 158 Case type Resin case Display unit 46 x 55mm LCD Operating unit Key switches, LED indicators Cable length 2m, 3m, 4m, 5m Basic performance Performance/Specifications LC1 (all models) Compatible controller 5 to 50C Operating temperature range Programming

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

AS-FM AS-D AS-T ASP ASN AQ Dimensions ASV Universal type AK Applicable tubing O.D. d VCHC Applicable tubing O.D. d Weight (g) T H1 H2 D1 D2 D3 L1 L2 L3 L4 L5 (1) A (2) M1 Max. Min. Max. Min.

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 0 L0.1 4 x MM Thread depth J 2 x P (Piping port) A G E H G B NN Effective thread length T (R) D X Mounting nut Width across flats C F N ZZ + Stroke S + Stroke W K N F I NA TT 6 T Model MM L K J I H G F E D C B A S NN NA 34 N R 12-REA25 12-REA32 12-REA40 8 46 32 26.4 2 13 7.5 20.5 8 10 70 15 M5 x 0.8 18.5 30 M26 x 1.5 111 10 8 60 32 33.6 2 16

ZSE5/ISE5

1 sheath} Argon 0 SUS630 Pressure sensor Nitrogen gas 0 Firtil1Qs SU$304 Chlorine gas X 2 Digital pressure switch for general purpose fluid Series Z5E5/15E5 Dimensions (mm) Scale: 75% 30 39 LCD With back light g '" .; ~ '" '" DOWN button UP bulton ~ .{ LED (red) I SET button T2 NPTF'4 M5X O 8 deplh 5 I 12.3 20 4 .0' 2.7 17 depth 6.5 i 28 View A With bracket 50 (44) 4.%4S 40 30 39 II i

10-cns-e

Seal kit includes a grease pack (40 g). Order with the following part number when only the grease pack is needed. Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) Piston seal NBR 47, 50 to 52, 55 and 56 are non-replaceable parts, so they are not included in the seal kit.

10-my1b-z-e

Seal kit includes a grease pack (10 g). When !4 and !5 are shipped independently, a grease pack is included. (10 g/1000 mm stroke) Order with the following part number when only the grease pack is needed. Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) Note) For the replacement procedure of replacement parts/seals, refer to the Operation Manual. 94

08-cds1-e

CDS1L140A-PS CDS1L160A-PS Seal kit includes a grease pack (125 to 160: 40 g, 180 and 200: 50 g). Order with the following part number when only the grease pack is needed. Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) note) Foot style, Rod side flange style: 125, 140: 1001 to 1400 stroke, 160: 1201 to 1400 stroke.

Manifold Regulator Modular Type ARM2500/3000 Series

Number of stations 02 2 stations Port size (OUT side) Symbol Port size 02 03 1/4 3/8 Applicable model ARM2500 ARM3000 10 10 stations Thread type Nil Rc F N G NPT Piping ARM3000 Symbol A B Type Common IN Individual IN IN From end plate From OUT port or G port Standard Specifications Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Regulating pressure range 0.05 to 0.85 MPa ARM2500

10-my2c-e

Seal kit includes a grease pack (10 g). When !4 and !5 are shipped as single units, a grease pack (10 g per 1000 strokes) is included. Order with the following part number when only the grease pack is needed. Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) 103

,

EVS1-01) and Size 02 (EVS1-02) Interface conforms to ISO 15407-1 Flow rate Cylinder driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000L/min (ANR) 400L/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Light weight Size 01 (3-position): 0.26kg Size 02 (3-position): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G

Quick Exhaust Valve Series AQ 1

1 Quick Exhaust Valve Series AQ Model Excellent exhaust characteristics Large flow capacity Compact and lightweight A wide selection of models Port size Effective area (mm2) Weight (g) Model IN OUT OUT EXH M5 x 0.8 AQ1500-M5 AQ1510-01 AQ2000-01 AQ2000-02 AQ3000-02 AQ3000-03 AQ5000-04 AQ5000-06 2 4 25 35 40 60 105 135 2.8 5.8 25 40 42 70 115 180 25 45 110 105 215 205 690 650 1 8 1 8 1 4

AMPSeries

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

AMP

10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 13 16 19 20 22 25 108 155 221 1/4, 3/8 3/8, 1/2 1/2, 3/4 3 Series AMP Model Selection Selection Caution Caution 1.

Exhaust Cleaner for Clean Rooms AMP Series

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

-01) and Size 02 (EVS1-02) Interface conforms to ISO 15407-1 Flow rate Cylinder driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000L/min (ANR) 400L/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Light weight Size 01 (3-position): 0.26kg Size 02 (3-position): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G

IDX-OM-W029

A B (G) (D) E (F) C (10, (10 1m) 1m) J K L2 N1 M P 13 4x H (911)[] 911)[] mm A B C D E F G H J K L M N P IDU22E R1 325 775 1153 93 445 1235 279 353 600 379 46 85 IDU37E R11/2 360 1258 64 550 1350 290 388 680 414 50 13 IDU55E 855 1345 1440 R2 470 53 530 360 36 500 75 700 526 IDU75E 1480 1575 70 IDU Series 6-2 GWP 6 2 IDX-OM-W029 6 6-4 IDU22E-23 IDU37E-23 GFCI For Option R GFCI

IDX-OM-W020

: inch (mm) 10mm N 3/8 B Q E D A G C F 1 J 31.5 [820] P L K M N H (L=2800) IDFB4E/6E/8E/11E-11 1. : inch (mm) 10mm N 3/8 A B E D Q G C F 1 J 31.5[800] H N M 4-0.5 (L=2800) [4-13] 6-3 6 3 IDFB Series IDX-OM-W020 6 IDFB15E-11 1. : inch (mm) 10mm N 3/8 E D B A Q G C F (820) K L P N M H J 4-13 (L=2800) (inch [mm]) A B C D E F G H J K L M N P Q IDFB3E 3/8 8.9 16.1 18.6