Basic Type/Direct Mount Type

45 51 HR 17 24 30 36 41 51 62 80 90 HS 6 5 8.5 7.5 6.5 7 8 9 9.5 K 7 9 14 11 15 13 15 25 24 G 3 4 5 6 6 7 7 8.5 8.5 HA 17 24 30 36 41 52 62 80 92 HT 10.5 14 17 24 23.5 29 36 45 51 J x E M4 x 0.7 x 6 M4 x 0.7 x 6 M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 M10 x 1.5 x 15 M10 x 1.5 x 15 GP 20 27 33 39 44 55 65 83 95 HB 10.5 14 17 21 23.5 29 36 45 51 B 6.5 8 9.5 9.5 11

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

AS22l1F-U02-04A 4 8.2 AS22l1F-U02-06A 6 10.4 23.4 32.7 AS22l1F-U02-08A 8 13.2 23.9 33.2 14.2 18 AS22l1F-U02-10A 10 15.9 26.9 36.2 15.6 19 AS32l1F-U02-06A 6 1/4 17 13 13.3 39 AS32l1F-U02-08A 8 13.2 22.7 33 14.2 AS32l1F-U02-10A 10 15.9 26.7 37 35.7 15.6 40 AS32l1F-U02-12A 12 18.5 29.7 40 34.5 17 42 AS32l1F-U03-06A 6 10.4 21.8 32.1 36.4 50 48.4 43.6 42 1/4 19 16.6 13.3 39 AS32l1F-U03-08A 8

7

17 20 20 15 15 2 x M6 thread depth 11 (for YA type) 2 x M6 thread depth 11 (for IA type) 35 15 18 2 x M6 thread depth 11 (for IA type) 2 x M6 thread depth 11 (for YA type) 20 20 20 20 57 40 17 17 A 19.5 0.2 0.5 25 15 45 45 60 60 Material: Cast iron Unit: mm Material: Cast iron Part no.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

Auto Switch Mounting Height (mm) Auto switch model D-M9 D-M9W D-A9 Hs Bore size 10 16 17 20.5 Specific Product Precautions Be sure to read before handling. Caution on mounting Caution 2. Apply proper screw tightening torque within the following range. 10: 10.8 to 11.8 Nm 16: 20.0 to 21.0 Nm 1.

Possible to transfer a workpiece at low-speed.

Applicable shaft types: J, K, T Long shaft side X = X = X = Long shaft side Long shaft side Long shaft side Short shaft side Y = Short shaft side Size 20, 30, 40 Size 10, 15 Short shaft side Short shaft side Y = Size 20, 30, 40 Size 20, 30, 40 (mm) X 3 to 18 3 to 20 3.5 to 30 4 to 32 4 to 36 Size 10 15 20 30 40 (mm) Y 17 to 30 18 to 32 18.5 to 36 (mm) Y 17 to 30 18 to 32 18.5 to 36 X 17 to

IDG

Tubing size (O.D. x I.D.) mm: 12 x 9 IDG30 IDG50 0 m 20 1 m 19 3 m 17 5 m 16 Note) In cases other than above model numbers, if the tube length is 5 m or less, an increase of the outlet air at the atmospheric pressure dew point will be 1C or less. Refer to pages 14-19-28 to 29. Construction Refer to pages 14-19-30 to 31.

CC

E101. 10-17-16

JA/JAH/JB/JS

17 17 19 19 19 22 24 24 27 12 12 13 14 14 14 16 16 16 18 18 20 21 23 25 29 2.4 3.2 4 5 5 5 6 6 6 7 7 7 8 10 10 11 6.4 8.1 9.2 11.5 15 15 19.6 19.6 19.6 21.9 21.9 21.9 25.4 27.7 27.7 31.2 5.3 6.8 7.8 9.8 12.5 12.5 16.5 16.5 16.5 18 18 18 21 23 23 26 CE2 ML2B C J G5-S CV MVGQ CC RB Floating Joint Replacement Parts Dust cover Order with the following part no. if dust cover is damaged.

RHC

23 15.5 26.5 19 21.5 14 13.5 27.5 21 CX 50 50 43 43.5 40.5 88 78 18 28.5 15 23.5 13.5 27 17 22 12 11.5 28 21.5 63 63 50.5 50.5 47.5 95 85 18 28.5 15 23.5 13.5 27 17 22 12 11.5 28 21.5 CY 13 80 80 59 103.5 93.5 30.5 16.5 29 15 27.5 13.5 27 15 100 100 69.5 114 104 32.5 18.5 31 17 29.5 15.5 29 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

HRX-OM-X037

(Recommended tightening torque178 to 185Nm) Gasket (1) CH1 particle filter Fig. 3-17 CH1 side Installation of particle filter HRL Series 3.3 Installation 3-33 HRX-OM-X037 Chapter 3 Transport and Setting Up 3. Attach the CH1 filter bracket.

HRX-OM-Y120

5.12.13 Control board program number . 5-17 5.12.14 Control board program version . 5-17 HRL Series HRX-OM-Y120 Contents 5.12.15 Display program number .5-17 5.12.16 Display program version .5-17 HRL Series HRX-OM-Y120 Contents HRL Series HRX-OM-Y120 Chapter 1 Read before using Chapter 1 Read before using The communication of this device consists of contact input/output communication and

7ND9071en

16 1 Special screw 17 1 Hexagon nut 18 2 Washer 19 2 Hexagon screw 54 2 Plug 7 ND90 71 en 53 12.9 Connection diagrams See Section 9.1.3 for additional limit switch data.

JXCx-OMT0005CN

Byte 14 *1 *2 0.01mm 15 16 17 Byte18,19 Byte 18 *1 *2 1% 19 *1 *2 21(P.85 Output 36Byte Byte12,13 Byte 12 1 *1 *2 1mm/s 2 13 Byte14,15 Byte 14 1 *1 *2 1mm/s 2 15 Byte16,17 Byte 16 *1 *2 1% 17 *1 *2 21(P.85 40 - Byte18,19 Byte 18 *1 *2 1% 19 Byte20,21 Byte 20 *1 *2 1mm/s 21 Byte22,23 Byte 22 *1 *2 1% 23 Byte24-271 Byte 24 1 -+ *2 0.01mm 25 26 27 Byte28-312 Byte 28 2 -+ *2

LEYx-OMZ0015

Product Outline . 17 4.1 System construction . 17 5.

Magnetically Coupled Rodless Cylinder

79 93 LD 4.3 5.6 5.6 7 7 WP 16 19 21.5 27 32 Z 94 107 117 130 148 M 5 5 6 7 8 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 N 6 7 6.5 8.5 11 PW 32 38 43 54 64 Q 84 95 105 116 134 QW 18 17 20 26 34 T 19 20.5 21.5 24 26 TC 17 20 22.5 28 33 P (Piping port) Model Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 CY3R15 CY3R20 CY3R25 CY3R32

TABLE OF CONTENTS

15-17039-14 15-17039-15 15-17039-16 15-17039-17 *15-17034-14 *15-17034-15 *15-17034-16 *15-17034-17 100 240 277 141 260 91.0 220 255 127 240 68.0 165 180 102 175 15-17040-18 15-17040-19 15-17040-20 15-17040-E17 15-17040-E21 15-17039-18 15-17039-19 15-17039-20 15-17039-E17 15-17039-E21 *15-17034-18 *15-17034-19 *15-17034-20 *15-17034-E17 *15-17034-E21 26 131 24 120 17.0 86.0 15-17040-E10

Clean Room Rodless Cylinder Series CYP ø15, ø32

Please consult with SMC when replacing seals and bearings (wear rings). 8-17-13

C92

17 58 64,5 77 80,5 M6 M6 M8 M8 10 14 18 18 5 7 8 8 23 27 30 31 11 11 14 14 74 84 90 98 17 19 24 24 10 10 10 10 32 40 50 63 C95 C92 CA1 C92KB-Stroke W CS1 Bore size (mm) AM D EE G H KK J K KW M N S SW VD WH ZZ B 22 24 32 32 30 32 40 40 12 16 20 20 G1/8 G1/4 G1/4 G3/8 13.5 15.5 17 17 58 64.5 77 80.5 M10 X 1.25 M12 X 1.25 M16 X 1.5 M16 X 1.5 M6 M6 M8 M8 6 6 7 7 10 14 18 18 5 7 8 8 23 27 30

Compact Cylinder

Applicable bore size (mm) UA C d1 d2 H K L UT Weight (g) 25 40 YU-03 YU-05 17 17 11 13 15.8 19.8 14 18 M8 x 1.25 M10 x 1.5 8 10 7 7 6 6 32, 40 50, 60 Weight (g) Bore size (mm) T2 V W RS T1 Part no.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

17 stations For bottom ported: Rc 1/8 only Note 1) Max. 17 stations.