Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

79 93 LD 4.3 5.6 5.6 7 7 WP 16 19 21.5 27 32 Z 94 107 117 130 148 M 5 5 6 7 8 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 N 6 7 6.5 8.5 11 PW 32 38 43 54 64 Q 84 95 105 116 134 QW 18 17 20 26 34 T 19 20.5 21.5 24 26 TC 17 20 22.5 28 33 P (Piping port) Model Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 CY3R15 CY3R20 CY3R25 CY3R32

2 Phase Stepper Motor/Without Motor Brake Series LXP

Positioning driver Model Operating Conditions Plate non-rotating accuracy () Allowable plate rotation torque (T) Allowable lateral load (F) Non-rotating accuracy () Stroke 50 75 100 125 150 175 200 Load (N) Stroke 50 75 100 125 150 175 200 Torque (Nm) 42 2.87 0.09 42 2.47 40 2.17 + 42 2.38 32 2.16 24 1.98 17 1.82 F T F Refer to page 304 for deflection data. 218 2 Phase Stepper Motor/Without

mlu

22 27 32 CH 11 13 13 17 CF 4 7 10 12 CE 3.5 3.5 3.5 5.5 CB 23 27 31 37 CA 53 67 85 103 DJ 7 10 10 14 DI 17 22 27 32 DH 11 13 13 17 DF 4 7 10 12 DE 3.5 3.5 3.5 5.5 DB 23 27 31 37 DA 53 67 85 103 Size 25 32 40 50 Size 25 32 40 50 Part no.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

SVRE 17 SVRE Output ESTOP Note 2) ESTOP Note 2) Load Load Output 18 18 Output ALARM Note 2) ALARM Note 2) Load Load Output 19 19 Output Load Load Output 20 AREA AREA 20 Output FG Round terminal 0.5-5 FG Round terminal 0.5-5 Note 1) For pulse signal wiring method, refer to Pulse Signal Wiring Details.

CV/MVGQ

6 8 32 M10 x 1.25 55 78.8 40 3.2 28 6.8 4 45 47 5.5 13 19.5 34.5 37.5 12 22 15 17 6 8 CV 41 75 84.8 55 3.2 30 7 4 50 54 7 16 21 42.5 46.5 14 24 21.5 22 8 10 M14 x 1.5 Dimensions by Stroke MVGQ Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Bore size (mm) Z Y X NN Bore (mm) Symbol CC S LS ZZ S LS ZZ ZZ LS S ZZ LS S ZZ LS S 20 25 32 40 20 25 32 40 21 8 20 M20 x 1.5 206 177

CNS

17 17 D-A59W Ht D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV 12 13 7 6 6 7 D-Y7BAL D-F59F/F5/J5 D-F5W/J59W D-F5BAL/F5NTL B 5 5 5.5 Proper Auto Switch Mounting Position/ Auto Switch Mounting Height D-G39/K39 11 11 10 Since this is a guideline including hysteresis, not meant to be guaranteed.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Please consult with SMC when replacing seals and bearings (wear rings). 8-17-13

PFxx-OMJ0005CN

13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 36.3 C6 6 10.3 8.3 C8 8(5/16) 12 37 C8 8(5/16) 12 10 N7 1/4 10.3 36.3 N7 1/4 10.3 8.3 PFM7-01/02--X694 PFM7S-01/02--X694 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 13 11 17 13 39 17 NPT1/81/4 G1/8 G1/8 G1/4 17 15

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

Indication of A B C D E F G T VCKH1209-02F VCKH1008-02F VCKH1075-02F VCKH0806-02F VCKH0604-02F 12/9 13 38.5 10 19 17 18.5 9 to 12 Nm 10/8 11 38 9 17 17 18.5 6 to 9 Nm 1075 11 38 9 17 17 18.5 6 to 9 Nm 8/6 9 36.5 8 14 14 16 4 to 9 Nm 6/4 7 36.5 8 12 14 15 3 to 8 Nm VCKK 40 swivel elbow 40 B A 10 Approx. F D Width across flats 14 Tightening torque: Tighten within 10 1 Nm. Approx.

HRX-OM-Q026

Fig. 3-17 Connection to the drain port Without holding the ball valve of the drain port with a wrench, the ball valve may rotate and it may cause a fluid leakage and/or malfunction of the product. Be sure to hold the ball valve of the drain port.

HRX-OM-W060

Alarms that allow continuous pump operation are shown in Table 5.4-17 Alarms that allow continuous pump operation (1/2) and Table 5.4-18 Alarms that allow continuous pump operation (2/2).

JXCx-OMT0061CN

LED (P.28) (LEC)LEDL RUNLEDL ERR/PLC PLC 17. CC-Link (P.77) 4.2 (P.18)4.3 PLC (P.18)PLC 10 - 8() ()() () 9 10. (P.32) PLC 14.

Cylinder with Lock Series CNS

(mm) Bore size Auto switch model Bore size (mm) Auto switch model 125 140 160 125 140 160 D-A9/A9V D-A9/A9V D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL 12 12.5 11.5 D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL BS5-125 BS5-125 BS5-160 7 6.5 6.5 D-A5/A6/A59W D-F5/J5/F5NTL D-F5W/J59W D-F5BAL/F59F D-Z7/Z80 CLJ2 14 14.5 13 BT-12 BT-12 BT-16 D-A3/A44 D-A5/A6 10 10 10 CLM2 D-A3/A44 D-G39/K39 D-A59W 17 17 17 BS1-125 BS1

VXA21/22

42.5 47.5 71 80 81 90 21 27 , , 1 4 3 8 17-3-104

2/3 Port Valve

Hz 50 20 11 60 17 7 50 40 18 60 35 12 50 50 21 60 45 17 Type Power Temp. High temp. water (D, E, N, P) (3) (3) (3) Inrush Holding Power Oil (Std.) Air (Std.) Water Vacuum (V, M) (Std.) AC VX21 80 60 99 120 183 60 60 60 AC DC Max. DC 60 40 40 40 40 Option Material (1) (2) Min. AC DC No.

80

dimensions (XD) Electrical entry Model Port size P G U W X Y Grommet Q R VDW1 M5 4 28 11 34 17 15.5 30.15 VDW2 M5, 1/8 4 33 14 39 20 17 36.2 M 2 x J thread depth K 465 VDW Series Glossary of Terms Pressure Terminology Others 1.

Electric Rotary Table

Refer to the dimensions on page 17 for the mounting dimensions. (35) (25) 5.5 1.25 L Dimension [mm] No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L 110.5 135.5 160.5 185.5 210.5 235.5 260.5 23 35.5 48 60.5 73 85.5 98 123 148 173 198 223 248 No. 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 L 285.5 310.5 335.5 360.5 385.5 410.5 435.5 460.5 485.5 510.5 273 298 323 348

High Power Cylinder Series RHC

13.5 27 31 27.5 21.5 26.5 23 24.5 21 17.5 21.5 18 12 17 13.5 15 11.5 27.5 31.5 28 22 27 23.5 25 21.5 17.5 21.5 18 12 17 13.5 15 11.5 27.5 31.5 28 22 27 23.5 25 21.5 13.5 15 16.5 13 27.5 29 30.5 27 15.5 17 18.5 15 29.5 31 32.5 29 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

High Power Cylinder Series RHC

25 17.5 23 15.5 26.5 19 21.5 14 27.5 43 43.5 40.5 50 50 18 28.5 15 25.5 15.5 23.5 13.5 27 17 22 12 28 50.5 50.5 47.5 63 63 18 28.5 15 25.5 15.5 23.5 13.5 27 17 22 12 28 59 80 80 30.5 16.5 29 15 27.5 13.5 69.5 100 100 32.5 18.5 31 17 29.5 15.5 14 Series RHC High Power Cylinder System Selection ... 2 3 1.Solenoid valve (A to G group) 2.

Air Cylinder Series MB

B TA TL TU TC TX TE TO TT TR TS TH TF TDH10 MB-S03 32 40 50 63 80 100 125 32 40 50 63 80 100 125 +0.070 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 +0.084 0 46 52 65 75 95 114 136 45 60 60 70 70 90 105 8.5 10 10 15 15 15 18.5 62 80 92 110 130 158 186 50 63 75 90 110 132 160 74 97 109 130 150 184 212 12 17 17 20 20 26 26 13 17 17 22 22 24 24 10 12 12 14 14 17 25 35 45 45 60 60 75 85 89