Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

Maximum stations are 18. 16 4 17 5 18 6 19 7 20 8 21 1.

VQ7-6/7-8

AXT632-45-14 AXT632-45-16 AXT632-45-17 AXT632-45-18 AXT632-45-19 No.

VQ7-6/7-8

Number of options AXT632-45-14 AXT632-45-16 AXT632-45-17 AXT632-4518 AXT632-4519 Part No.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

FU) (mm) AA AB A AV AW AX AY BA BB BC BD BE CB D DD DE DF DG FA FB FC FD H J JA JB Size 70 100 200 90 92 84 42 25.5 27 8 17 75 44.5 110 57 36 88h9 90h9 46H9 16 22H9 12.5 5 3.5 9 22 10.4 17.5 10.5 101 102 100h9 95 50 29.5 27 8 17 85 50.5 130 66 42 98h9 56H9 19 24H9 14.5 6 3.5 12 27 10.4 17.5 10.5 119 120 116h9 118h9 113 60 36.5 36 10 24 103 65.5 150 80 57 64H9 24 32H9 16.5 9 5.5 15 32 14.2

Vacuum

E55: 3 wire (note 3) E16/17, E18/19:4 wire Types E16/17 3% F.S. or less (fixed). Lighting under ON condition (outpui 1: rd, output 2: green). Type E16/17 only. E14, E15, E55 types with plug connector do not utilize while wire.

17

Weight reduction is achieved through the configuration changes of the head cover and cylinder tubing. 17% Reduced Weight 17% lighter 17% lighter Weight comparison (kg) MY1B MY1B 9.9 8.2 MY1H 13% lighter 13% lighter Current model MY1B 5.8 6.7 MY1B 13% lighter 13% lighter MY1M 3.4 3.9 MY1C MY1H 25 32 40 Back MY1 HT Compared with L unit at 1000 strokes.

Vacuum

E55: 3 wire (note 3) E16/17, E18/19:4 wire Types E16/17 3% F.S. or less (fixed). Lighting under ON condition (outpui 1: rd, output 2: green). Type E16/17 only. E14, E15, E55 types with plug connector do not utilize while wire.

15

Allowable load mass on guides and moment Allowable moment [Nm] M1 1.3 2.6 8.6 17 30 67 96 Bore size (mm) Allowable load mass on guides m [kg] 6 10 15 20 25 32 40 M2 1.4 2.9 8.9 18 35 82 124 M3 1.3 2.6 8.6 17 30 67 96 9 15 35 60 104 195 244 The table above indicates the maximum performance of the guide, but does not show the actual allowable work load mass.

VFR

0.36 4.7 18 0.40 5.0 20 0.28 5.2 23 0.32 6.2 23 0.27 5.8 25 0.21 6.2 16 0.37 4.6 18 0.41 5.1 20 0.27 5.2 23 0.32 6.1 23 0.26 5.8 25 0.20 6.1 15 0.38 4.1 16 0.31 4.3 17 18 0.31 0.28 4.6 4.7 20 21 0.33 0.30 5.4 5.4 14 0.38 3.6 17 [16] 0.39 [0.35] 4.8 [4.3] 17 0.29 4.6 18 0.29 4.6 21 [18] 23 [20] 0.31 [0.34] 5.6 [5.0] 0.27 [0.33] 5.9 [5.2] 16 [9.4] 0.39 [0.40] 4.2 [2.6] 17 0.36 4.5 20 0.31

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

17 stations For bottom ported: Rc 1/8 only Note 1) Max. 17 stations.

XL

XSA3-32 XSA3-43 2 3 0.8 VCR 0.3 3 6 Direct solenoid operation (N.C.) 10-11 1.0 1/4 10 -6 10 -9 10 -11 P.32 to P.34 2 0.3 SWJ 4.5 11 10 -10 0.8 0.3 6 3/8 19 Differential Pressure: Indicates the maximum operable pressure difference between port P and port A.

o

L Type Plug Connector (L) 10-32 Nom (M5) 10-32 Nom (M5) 4 porls g .g 3 1 1 . 8 1 I (300)r I 2.0i (St ) -9 :ions (n 7 6 10 11 12 13 14 'i6 17 18 20 L1 1.40 11.41 (35.s) (46) 2.22 2.& (56.5) (67) 3.O5 3.46 (Be) 3.84 1 4.2S (e8.5) oos) 4.70 (119.5) 512 15.53 (130) (140.5) 5.94 (1511 (161.5) \172) 7.19 7.60 (182.s) (1S3)a.ol (203.5) 8.43 \7t4) 8.84 Q24.5) L2 1.12 {a.r) 1.54 (30) 1.95 (4e.5)2.36

o

L Type Plug Connector (L) 10-32 Nom (M5) 10-32 Nom (M5) 4 porls g .g 3 1 1 . 8 1 I (300)r I 2.0i (St ) -9 :ions (n 7 6 10 11 12 13 14 'i6 17 18 20 L1 1.40 11.41 (35.s) (46) 2.22 2.& (56.5) (67) 3.O5 3.46 (Be) 3.84 1 4.2S (e8.5) oos) 4.70 (119.5) 512 15.53 (130) (140.5) 5.94 (1511 (161.5) \172) 7.19 7.60 (182.s) (1S3)a.ol (203.5) 8.43 \7t4) 8.84 Q24.5) L2 1.12 {a.r) 1.54 (30) 1.95 (4e.5)2.36

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

L Type Plug Connector (L) 10-32 Nom (M5) 10-32 Nom (M5) 4 porls g .g 3 1 1 . 8 1 I (300)r I 2.0i (St ) -9 :ions (n 7 6 10 11 12 13 14 'i6 17 18 20 L1 1.40 11.41 (35.s) (46) 2.22 2.& (56.5) (67) 3.O5 3.46 (Be) 3.84 1 4.2S (e8.5) oos) 4.70 (119.5) 512 15.53 (130) (140.5) 5.94 (1511 (161.5) \172) 7.19 7.60 (182.s) (1S3)a.ol (203.5) 8.43 \7t4) 8.84 Q24.5) L2 1.12 {a.r) 1.54 (30) 1.95 (4e.5)2.36

High Vacuum Angle Valve, XL Series

XSA3-32 XSA3-43 2 3 0.8 VCR 0.3 3 6 Direct solenoid operation (N.C.) 10-11 1.0 1/4 10 -6 10 -9 10 -11 P.32 to P.34 2 0.3 SWJ 4.5 11 10 -10 0.8 0.3 6 3/8 19 Differential Pressure: Indicates the maximum operable pressure difference between port P and port A.

Process Valve Series VNA

For DZ, the length is longer by 17 mm.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

CDH10 U L CX CZ ZZ + Stroke Z + Stroke RR (mm) Stroke range Bore size (mm) U RR +0.3 +0.1 L CDH10 CX CZ Z ZZ 20 25 32 40 50 63 80 Up to 250 Up to 350 Up to 600 Up to 600 Up to 700 Up to 900 Up to 900 14 14 17 17 26 26 30 10 10 14 14 22 22 25 14 14 20 20 30 30 32 28 28 40 40 60 60 64 8.5 11 12 15 18 23 28 23 23 30 30 42 42 50 129 151 185 208 237 263 298 137.5 162 197 223 255 286 326 8-25-24

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

Z 66 76 94 107 117 130 148 176 188 M 3.5 4 5 5 6 7 8 10 10 MM M3 x 0.5 M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 N PW 19 26 32 38 43 54 64 82 94 Q 60 68 84 95 105 116 134 159 171 QW 10 14 18 17 20 26 34 48 60 T 14.5 17.5 19 20.5 21.5 24 26 30 32 TC 10.5 14 17 20 22.5 28 33 42 48 Model 12-CY3R6 12-CY3R10 12-CY3R15 12-CY3R20 12-CY3R25 12-CY3R32 12-CY3R40 12-CY3R50

MHF2

4 1.3 12 26 15 4 Accessory option: Hexagon socket head screw (special screws) 7 2-2H9 +0.025 0 depth 2 3 3 7 11 11 Groove for auto switch mounting 2-M3 x 0.5 thread depth 4 Mounting thread 11 34 10 Series MHF2 Dimensions MHF2-8D2 Scale: 80% 2.5H9 +0.025 0 depth 2.5 17 17 17 2.5H9 +0.025 0 depth 2.5 3 3.4 64.3 4-M3 x 0.5 thread depth 7 Mounting thread 32 72 2-M3 x 0.5 thread depth 4 Mounting

Speed Controller with

AS1002F-01A 1/8" 8.4 6.7 9.5 3.3 5.5 9.4 10 36.6 5.1 11.8 24.1 23 11 15.4 8.8 10.1 13.5 3.7 AS1002F-03A 5/32" 9.3 7.7 10 37.6 4 AS1002F-07A 1/4" 12 10.9 40.1 6.2 12.9 25.2 24.1 12.8 5.2 AS2002F-03A 5/32" 9.3 7.7 10 3.3 5.5 12 12 41.3 6.3 13.4 31.4 30 12.6 17 10.5 12.3 13.5 6.1 AS2002F-07A 1/4" 12 10.9 43.2 6.5 13.6 31.6 30.2 12.8 7.1 AS2052F-07A 1/4" 13.2 12 4.3 7.8 13 16 52.2 7.6 17.2