CS1

to 1400 Lube Non-lube Air-hydro 128 M30 X 1.5 1/2 161 75 40 160 212 112 255 M14 X 1.5 110 232 133 255 50 36 59 16 15 35 20 47 90 43 14 19 31 24 98 to 1400 0.2 X Stroke 144 M36 X 1.5 3/4 182 18.5 106 75 40 180 236 118 275 M16 X 1.5 120 252 141 273 20 19 56 53 40 90 59 43 14 17 36 26 39 to 1400 162 3/4 M40 X 1.5 204 85 45 18.5 111 200 115 265 132 320 M18 X 1.5 135 277 153 295 24 25 17 31 63

5 Port Air Operated Valve

) 94 2 x 5.3 (2 x 6.5) (For mounting) 2 x 5.3 (2 x 6.5) (For mounting) 119 VZA 110 1/8 (Pilot port: Upward) 1/8 (Pilot port: Upward) VTA VGA 74 (78) 74 (78) 28.5 (32.5) 28.5 (32.5) VPA 1/4, 3/8, 1/2 [1 (P), 5 (EA), 3 (EB) port] 30 (31) 30 (31) 30 (31) 30 (31) VPA3 14 (15.5) 14 (15.5) 1/4, 3/8, 1/2 [1 (P), 5 (EA), 3 (EB) port] 50 (54.5) 50 (54.5) 4.5 (0.5) 92 (100) 3 position closed center

Cylinder with Lock

Grease pack part number: GR-S-010 (10 g), GR-S-020 (20 g) 25 26 27 28 29 30 31 32 Special friction material Carbon steel Carbon steel Copper alloy Aluminum alloy Steel wire Steel for spring Special resin Chromated Zinc chromated Anodized Electroless nickel plated 33 Nickel plated Carbon steel 7 Series CNA2 Cylinder with Lock Double Acting, Single Rod Dimensions Basic (B): CNA2B BP (Rc, NPT

Modular Type Air Filters Series AF

Applicable Body Size All All 31, 41 31, 41 Symbol Nil B* C D Port Size 1/4 3/8 1/2 *Note: Bracket is not assembled and is supplied loose at time of shipment.

Air Cylinder

21 21 8 M8 x 1.25 M8 x 1.25 6 7 7 14 18 18 22 26 11 11 14 17 17 Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 11 11 13 16 M10 x 1.25 M12 x 1.75 M12 x 1.75 102 116 10 10 100 Stroke range Bore size Without rod boot With rod boot N MM P S WA (mm) (mm) H ZZ d e f h L ZZ 40 50 63 80 Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31

Cylinder with Lock Series CLS

Locked condition (when air is evacuated) Unlocked condition (when air is supplied) 3 Cylinder with Lock Double Acting: Single Rod Series CLS Construction Description Material Note Parts list Description Material Note Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 No. 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55

Serial Transmission System Series EX250 Series EX500

D3 Input block stations AS-i, 8 in/8 out, 31 slave modes, 2 power supply systems Nil 1 None 1 station For 20 stations D20 AS-i, 4 in/4 out, 31 slave modes, 2 power supply systems AS-i, 8 in/8 out, 31 slave modes, 1 power supply system Note) In case of D0, only DIN rail fittings are attached.

Cylinder with Lock Series CNS

27 M12 x 1.75 M30 x 1.5 35 1/2 85.5 25 303 87.5 20 23 110 440 15 31 27 M12 x 1.75 M30 x 1.5 35 1/2 93.5 25 343 95 20 28 110 480 17 36 30.5 M12 x 1.75 M36 x 1.5 39 3/4 104 25 396 109 25 35 120 546.5 With Rod Boot (mm) Bore size (mm) Stroke range (mm) l ZZ1 h 125 140 160 463 0.2 stroke 133 30 to 1000 503 0.2 stroke 133 30 to 1000 567.5 0.2 stroke 141 30 to 1200 764 Series CNS Cylinder with

CNA

266 MY1 11.5 50 250 3.2 59 93 M18 X 1.5 31 3/8 50 to 51.5 58 182 52.5 12 0 34 16 24 290 13.5 65 306 4.5 76 116 M22 X 1.5 37 1/2 59.5 to 62.5 71 218 59.5 15 0 44 16 27 349 13.5 75 332 6.0 92 133 M26 X 1.5 40 1/2 66.5 to 69.5 72 246 69.5 15 0 43 17 29 378 With rod boot (mm) With auto switch Bore (mm) Stroke range (mm) e f h ZZ l CNALN Bore size SCNA Bore size , #2 (#1+#2+#11) 40 50 63 80

Electric Actuator

Option Page 36 Regeneration option Part no.: LEC-MR-RB-; Option Motor cable Page 36 I/O connector Part no.: LE-CSNS Page 36 Standard cable Robotic cable LE-CSM-S;; LE-CSM-R;; Control circuit power supply connector (Accessory) Page 31 Lock cable Page 36 CN1A Standard cable Robotic cable LE-CSB-S;; LE-CSB-R;; CN1B CN1A Electric actuator Motor connector (Accessory) Page 31 Option SSCNET III

Modular Type Regulators Series AR

Body Size 21 31, 41 Description Metal Bowl Metal Bowl With Sight Glass Residual Pressure Relief Valve Symbol Nil V NPT Threads Applicable Model Combo All All Description Without Valve With Downstream Valve Port Size Symbol 02 03 04 Applicable Body Size 21 31 41 Port Size 1/4 3/8 1/2 Accessories Symbol Nil C D Applicable Body Size All 31, 41 31, 41 Description None Float Auto Drain (N.C.)

High-Precision Digital Pressure Switch

0 0.4 31 0 0.4 31 0 0.4 4 x R2 or less Multiple (2 pcs. or more) secure mounting Panel mount example 31 x n pcs. + 3.5 x (n pcs. 1) 4 x R2 or less 24 or more Panel mount example 31 0 0.4 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) 4 x R2 or less Multiple (2 pcs. or more) secure mounting Panel fitting dimensions (Bottom ported) Individual

Cylinder with Lock Series CNS

27 M12 x 1.75 M30 x 1.5 35 1/2 85.5 25 303 87.5 20 23 110 440 15 31 27 M12 x 1.75 M30 x 1.5 35 1/2 93.5 25 343 95 20 28 110 480 17 36 30.5 M12 x 1.75 M36 x 1.5 39 3/4 104 25 396 109 25 35 120 546.5 With rod boot (mm) Stroke range (mm) Bore size (mm) l ZZ1 h 125 140 160 463 0.2 stroke 133 to 1000 503 0.2 stroke 133 to 1000 567.5 0.2 stroke 141 to 1200 5 Cylinder with Lock Double Acting:

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

cover (2000) 32 ZSE20C(F)/ISE20C(H) Series Dimensions Panel fitting dimensions (Rear ported) Individual mounting 31 0 0.4 31 0 0.4 31 0 0.4 4 x R2 or less Multiple (2 pcs. or more) secure mounting Panel mount example 31 x n pcs. + 3.5 x (n pcs. 1) 4 x R2 or less 24 or more Panel mount example 31 0 0.4 24 or more 31 x n pcs. + 3.5 x (n pcs.

CNA

266 M18 x 1.5 11.5 50 250 3.2 59 93 31 3/8 50 to 51.5 58 182 52.5 12 0 34 16 24 290 M18 x 1.5 13.5 65 306 4.5 76 116 37 1/2 59.5 to 62.5 71 218 59.5 15 0 44 16 27 349 M22 x 1.5 13.5 75 332 6.0 92 133 40 1/2 66.5 to 69.5 72 246 69.5 15 0 43 17 29 378 M26 x 1.5 With Rod Boot Bore size (mm) 40 50 63 80 100 Stroke range (mm) e l ZZ f h 20 to 500 43 11.2 59 1/4 stroke 252 20 to 600 52 11.2 66

RHC

Applicable bore (mm) C D d H Applicable bore (mm) C D d H 5 26 30 12.5 8 M8 x 1.25 15 M22 x 1.5 26 13 20 20 SOR-20 NT-02 6 32 36.9 16.5 8 M10 x 1.25 19.6 M24 x 1.5 32 17 25, 32 25 SOR-25 NT-03 8 38 43.9 21.0 9 M14 x 1.5 M30 x 1.5 25.4 38 22 40 32 SOR-32 NT-04 11 41 47.3 26 11 M18 x 1.5 31 M33 x 2.0 41 27 50, 63 40 SOR-40 NT-05 13 31 M22 x 1.5 37 32 80 NT-08 16 39 M26 x 1.5 47.3 41 100 NT-

CNA

266 M18 x 1.5 11.5 50 250 3.2 59 93 31 3/8 50 to 51.5 58 182 52.5 12 0 34 16 24 290 M18 x 1.5 13.5 65 306 4.5 76 116 37 1/2 59.5 to 62.5 71 218 59.5 15 0 44 16 27 349 M22 x 1.5 13.5 75 332 6.0 92 133 40 1/2 66.5 to 69.5 72 246 69.5 15 0 43 17 29 378 M26 x 1.5 With Rod Boot Bore size (mm) 40 50 63 80 100 Stroke range (mm) e l ZZ f h 20 to 500 43 11.2 59 1/4 stroke 252 20 to 600 52 11.2 66

VHK

30.5 20.8 16.1 22 12 10 12 46 62 63 31.5 30.5 21.5 4 21.8 20.8 14 17 3.2 31 32 VHK-B2A 49 17 1 30 25 21.5 31 1(P): Male Thread, 2 (A): One-touch Fitting Effective area (mm2) Bracket assembly no.

Electric Rotary Table

: EtherNet/IP (35) 31 (87.9) 82 (35) 31 1 (85) 82 1 For body mounting 4.5 4.5 For body mounting 152.2 152.2 170 161 170 161 18.2 18.2 4.5 For body mounting 4.5 For body mounting Trademark DeviceNet is a trademark of ODVA.

PSxx-OMV0003CN

ON/OFF (31 ) ON/OFF 31 81 81 ON OFF Hysteresis / () () 25[]ON-OFF -11No.PS-OMV0003CN-G NPN () () ON ON 0 31 ON-OFF ON () (P1L~P1H)ON (31 ) () digit () () SI ON/OFF ON-OFF / ON/OFF 90 ON -12No.PS-OMV0003CN-G ON () (n1L~n1H)ON (31 ) 31 (0FF)(ON)(OFF)(ON) () 5%R.D.(5%) (0~1MPa 0.001MPa 1/1000 ()" () F () ripple -13No.PS-OMV0003CN-G ( M46L(2)) 0.760.1 Nm A