Guide Table Series MGF ø40, ø63, ø100 1

10 10 MGF40 Data MGF40 10 5 4 3 5 4 3 2 2 5 5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 200 mm l = 300 mm Graph (3) Graph (4) v = 150 mm/s or less v = 200 mm/s or less Graph (7) Graph (8) 20 300 300 200 200 MGF100 MGF100 20 100 100 MGF100 MGF100 10 MGF100 MGF100

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40

(N) Backlash Manual release 12 16 20 40 Head end only 8 5, 10, 15, 20, 25, 30 125 211 53 82 329 29 12, 16 25, 50, 75, 100 1 mm Non-lock type only 25, 50, 75, 100, 125, 150, 175, 200 20, 25, 32, 40 Strokes other than the above are produced upon receipt of order. Theoretical Output (N) Stud Bolt Part No.

rep-modular-e

(AR20(K)/25(K)/30(K)/40(K)) AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR20(K)/25(K)/30(K)/40(K) Hook spanner Nominal Tightening torque 2.0 0.2 Nm 2.5 0.2 Nm 3.5 0.3 Nm 4.0 0.4 Nm AR20(K) AR25(K) AR30(K) AR40(K) AR20(K) AR25(K) AR30(K) AR40(K) 34/38 40/42 52/55 52/55 Assembly (Bracket assembly) 1) Mount the bracket to the product.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

(AR20(K)/25(K)/30(K)/40(K)) AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR20(K)/25(K)/30(K)/40(K) Hook spanner Nominal Tightening torque 2.0 0.2 Nm 2.5 0.2 Nm 3.5 0.3 Nm 4.0 0.4 Nm AR20(K) AR25(K) AR30(K) AR40(K) AR20(K) AR25(K) AR30(K) AR40(K) 34/38 40/42 52/55 52/55 Assembly (Bracket assembly) 1) Mount the bracket to the product.

Wireless System

Link, No Activity (10 Mbps) 7 LINK/ACT1 LINK/ACT2 Orange LED flashes. Link, Activity (10 Mbps) Red LED is ON. IP address has been duplicated. 100 Mbps: Green 10 Mbps: Orange OFF EtherNet/IP is not connected. 15 Wireless System EX600-W Series LED Display Wireless slave unit No. LED name Function Color of LED Operation Green LED is ON.

2/3 Port Valve for Various

A 40 44 B 20 22 C 9 10 D 22 24 E 59 66 F 33 34 G 24 25 H 30 40 J 36 46 K 6 9 M 45.5 50.5 N 69 76 VVXA31 VVXA32 17-3-108

Ionizer Nozzle type IZN10 Series IZS

0 10 20 500 30 30 20 10 0 10 20 Distance (Horizontal) [mm] Distance (Horizontal) [mm] 445 IZN10 Series Flow Rate Characteristics (1) Energy saving static neutralization nozzle/IZN10-01 (2) High flow rate nozzle/IZN10-02 (3) Female threads for piping/IZN10-11 With Stainless steel 316 One-touch fitting + Anti-static tubing 0.7 Energy saving static neutralization nozzle/IZN10-01 0.3 0.6 0.25

PFMB.eng

Flow setting (3 step setting mode) Function setting (Function selection mode) Other functions [1000] 1000 L/min (PFMB7202) [F 1] OUT2 over current error The switch output (OUT2) load current has exceeded 80 mA. [ 10] 10 L/min (PFMB7201) [ 25] 25 L/min (PFMB7501) Do not use the product for flammable fluid. Fire or explosion can result.

IP80-OM00019

11-5 (1) DARA(24) (2) (50%)50% (25)50% (3) 0%100% (26 24 25 26 90 27 25 12.

PA300/500/700

Applicable manifold base model VP300-25-1A VV3PA3 Blanking plate assembly (With gasket, mounting screw) VP700-25-1A VV3PA7 VP500-25-1A VV3PA5 5-5-21 10 Series VPA300/500/700 Dimensions Common exhaust: VV3PA3-41Station 1-02 69.4 (Mounting hole) 2-6.5 24 NC NO 13.5 (R port) Rc 1/4 PA 26.7 65.6 58.6 3(R) 27 50 65.6 1(P) 26.7 PA (Pitch) (P port) Rc 1/4 Rc 1/8 (PA port) 27.5 28 70.4 L1 L2 7.5

Hygienic Design Cylinder Series HYG

Grease for food part no.: GR-H-010 (10 g) Standard grease part no.: GR-S-010 (10 g) Piston seal NBR 20 25 32 HYG20-PS HYG25-PS HYG32-PS !5 !6 !7 18 !9 Rod seal NBR (FKM can be selected.) O-ring (Rod end) NBR (FKM can be selected.) Set of left nos. !5, !6, !7, !9. Place the seal material symbol in .

05-hyg-e

Grease for food part no.: GR-H-010 (10 g) Standard grease part no.: GR-S-010 (10 g) Piston seal NBR 20 25 32 HYG20-PS HYG25-PS HYG32-PS !5 !6 !7 18 !9 Rod seal NBR (FKM can be selected.) O-ring (Rod end) NBR (FKM can be selected.) Set of left nos. !5, !6, !7, !9. Place the seal material symbol in .

WRF100

Switch mounting bracket Note 2) 0.2 25 25 13 Fulcrum 12 12 20 10 10 2 x M10 x 1.5 through 45 F 30 90 110 107 Note 3) 2 x 4 x M10 x 1.5 depth 12 70 0 2 x 2 x 8H7( ) depth 12 0.015 1 193 25 52 380 (58.7) 95 133 70 0.05 (70) 85 75 270 0.3 (173) Rc1/ 4 (10) 100 100 Unclamp side port (30.2) (30.2) 306 139 360 Limit switch Note 1) Rc1/ 4 Clamp side port 0 4 x 8H7( ) through 0.015 82 0.05 143 115

Compact Electric Actuator Series LG1

thread depth 10 20 0.02 8H10 depth 10 Encoder signal line Motor power line 8H10 depth 8 85 130 A (Table movement range) 77.3 (77) 107 10 95 Work mounting reference plane 55 Body mounting reference plane 52.5 D 1 125 8(4)-M6 x 1 thread depth 10 3(2)-8H10 depth 10 30 95 C 100 95 8(4)-6.2 (160) () () 110 95 20 95 B (140) () () Dimensions A Stroke Model B C D Note) LG1H202100-F LG1H202200-

Suction Guard (Produced upon receipt of order) FHG Series

25 25 28 28 28 28 28 Port size Weight (kg) E 47 47 52 58 58 63 G 9 9 9 9 9 9 9 9 Z 2.8 2.8 2.8 5.3 5.3 5.4 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 1/2 3/4 1 1 1/4 1 1/2 2 22.2 27.7 34.5 43.9 49.1 61.1 77.1 90.0 2.7 2.7 2.7 5.1 5.1 5.0 10.3 10.3 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B

Compact Cylinder with Lock Double Acting, Single Rod Series CLQ ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 How to Order CLQ B F D 30 40 30 40 M9BW CDLQ D F B With auto switch With auto switch (Built-in magnet) Made to Order Mounting style Refer to page 817

MLU Standard Stroke MLGP Bore size (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Standard stroke (mm) ML1C 20, 25 32, 40, 50, 63, 80, 100 Manufacture of Intermediate Stroke Description Part no. Spacer is installed in the standard stroke body. Refer to How to Order for the standard model no. on page 816.

Dual Speed Controller with One-touch Fitting Series ASD 1

Weight (g) d T H D1 D2 D3 L1 L2 L3 Model AK 1/8" ASD230F-U10/32-01 8.4 12 10-32 UNF 12.9 8 25.5 22.2 28.6 25.8 29.4 11.7 28.3 10 17.5 7.8 9.6 25 5/32" ASD230F-U10/32-03 9.3 13 ASS 20.7 7.8 16.5 15 3/16" ASD230F-U10/32-05 10-32 UNF 8 9.6 10 11.7 28.3 25.5 28.6 25.8 25 22.2 35.2 23.3 11.4 13.5 13 1/4" ASD230F-U10/32-07 32.6 12 ASR 30 16.5 14 3/16" ASD330F-N01-05S 39.5 39.6 23.9 11.6 34.6 17

LFE-OMY0008

X1.2 9 ( ) 24V10% 63 No.LFE*-OMY0008 LFE1 LFE2 LFE3 1 1 1 5S/cm () 10 0.520 L/min 2.5100 L/min 5200 L/min 0.424.0 L/min 2.0120.0 L/min 4240 L/min 0.424.0 L/min 2.0120.0 L/min 4240 L/min 2 0.4 L/min 2.0 L/min 4 L/min 0.1 L/min 0.5 L/min 1 L/min (50 ms) 0.1 L/pulse 0.5 L/pulse 1 L/pulse 3 085 () L/minL 2F.S. 21.5F.S. 5F.S.(25) 5F.S.(25) 3 01 MPa 3 2 MPa 4 9.9 L 9 L 0.1L 1L

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

AS1200-M3 AS1400-M3 AS120-M5 AS220-01AS220-02 AS320-03 AS420-04 10-32UNF Port size M3 x 0.5 2.5, 4, 6 1.05 MPa 0.7 MPa 0.1 MPa M5 x 0.8 1/8 1/4 20, 25, 32, 40 3/8 1/2 6, 10, 15, 20, 25 80, 100 32, 40, 50, 63 Applicable cylinder bore size (mm) 1.5 MPa 1 MPa 0.1 MPa Proof pressure Max. operating pressure Body swivels 360 Swivel type allows free setting of piping.

ø 32, ø 40, ø 50, ø 63 Compact Cylinder With Solenoid Valve Series CVQ

S, Z type 24 VDC: 7% to +10% 12 VDC: 4% to +10% Operating pressure (MPa) Bore size (mm) 0.3 Operating direction 0.5 0.7 181 IN 302 422 32 241 OUT 402 563 Standard Stroke 317 IN 528 739 40 (mm) Bore size (mm) Standard stroke 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 377 OUT 628 880 IN 495 825 1150 32 1 50 OUT 589 982 1370 40 50 2 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15,