SMC room Outside of clean room Vacuum pump Duct piping Front matter 10 System Circuit in Clean Room Clean blow system Example of equipment to suit each clean blow grade 100 Line A Particle diameter: 0.1 m or more Valve operating frequency: 0.5Hz Particle generation Particles/min 80 Line A: For oil-free air blow Line B: For clean blow Line C: For clean blow (With clean gas filter) Line D: For N2
15L For 1 station (for single unit) 2 L-type brackets, 2 mounting screws M3 x 25L For 2 stations PF2W 2 L-type brackets, 2 mounting screws M3 x 35L For 3 stations 2 L-type brackets, 2 mounting screws M3 x 45L For 4 stations PF2D 2 L-type brackets, 2 mounting screws M3 x 55L For 5 stations IF 951 Series PFMV5 Specifications PFMV505 PFMV510 PFMV530 PFMV505F PFMV510F PFMV530F Model Dry air, N2
Conduit terminal With surge voltage suppressor Special voltage VXP VXR 1L 220 VAC 1M 240 VAC 1W 24 VAC 1P 48 VAC Conduit With surge voltage suppressor VXH VXF 1Q 220 VAC 1R 240 VAC 1Y 24 VAC VX3 VXA 2A 24 VDC 2B 100 VAC 2C 110 VAC 2D 200 VAC 2E 230 VAC 2F 48 VAC 2G 220 VAC 2H 240 VAC 2V 24 VAC 2L 100 VAC DIN terminal With surge voltage suppressor With light 2M 110 VAC 2N 200 VAC 2P 230 VAC 2Q
Flat ribbon cable connector Socket: 10 pin MIL type with strain relief Conforming to MIL-C-83503 Applicable connector Internal wiring +COM, COM Location Valve 4(A), 2(B) port Porting specifications Direction Lateral, Upward, Downward Metric 1(P), 3/5(R) port: 8 4(A), 2(B) port: M5, 4, 6 Port size Inch 1(P), 3/5(R) port: 5/16" 4(A), 2(B) port: 5/32", 1/4" Weight W (g) Note 2) n1: Stations n2
(When reversed output is selected, the sub display (left) shows [n1/n2].)
. -34No.PF-OMO0008-C Specification Specifications Model PF2A710 PF2A750 PF2A711 PF2A721 PF2A751 Applicable fluid Air and N2 Fluid temperature 0 to 50 C (No freezing or condensation) Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 L/min L/min L/min L/min L/min Instantaneous Setting/display flow range 1 2 0.5 to 10.5 2.5 to 52.5 5 to 105 10 to 210 25 to 525 L/min L/min L/min
. -36No.PF-OMG0010-H Specifications Specifications Model PF2A703H PF2A706H PF2A712H Applicable fluid Dry air and N2 Fluid temperature 0 to 50 C (no freezing or condensation) Rated flow range 150 to 3000 L/min 300 to 6000 L/min 600 to 12000 L/min Instantaneous Setting/display flow range 1 2 125 to 3025 L/min 250 to 6050 L/min 550 to 12050 L/min flow Min. setting/display unit 5 L/min 10 L/min
Note C4: A, B port with One-touch fitting for 4 C6: A, B port with One-touch fitting for 6 SUP/EXH block assembly Description Manifold block assembly D side C4 C6 VZ3000-50A-2q P/R port with One-touch fitting for 8 For D side For U side VZ3000-51A-2 VZ3000-52A-2D w e End block assembly End block assembly DIN rail VZ3000-52A-2U r How to Increase Manifold Base Station expansion is possible
48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 12 VDC 24 VDC 100 VAC 110 VAC 200 VAC 230 VAC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 24 VDC 100 VAC 110 VAC 200 VAC 230 VAC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 24 VDC 100 VAC 110 VAC 200 VAC 230 VAC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC Voltage 1A 1B 1C 1U 1D 1E 1F 1G 1H 1V 1J 1K 1L 1M 1W 1N 1P 1Q 1R 1Y 1S 1T 2A 2B 2C 2D 2E 2F 2G 2H 2V 2J 2K 2L 2M 2N 2P 2Q
Only air and N2 are applicable. Do not use the product in a place where static electricity is a problem. Otherwise it can cause failure or malfunction of the system. If using the product in an interlocking circuit: Provide a double interlocking system, for example a mechanical system Check the product regularly for proper operation Otherwise malfunction can result, causing an accident.
Only air and N2 are applicable. Do not use the product in a place where static electricity is a problem. Otherwise it can cause failure or malfunction of the system. If using the product in an interlocking circuit: Provide a double interlocking system, for example a mechanical system Check the product regularly for proper operation Otherwise malfunction can result, causing an accident.
resistant construction conforming to IP65 Series PF2A Series PF2A For Air Flow rate measurement range (l /min) For Air For Water For High Temperature Fluid (Water 90C) 0.5 to 4 2 to 16 5 to 40 0.5 to 4 2 to 16 5 to 40 10 to 100 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 150 to 3000 300 to 6000 600 to 12000 Integrated Type Series PF2W Series PF2W For Water Application examples Flow control of N2
When the diaphragm is made of PTFE Please note that when the product is shipped from the factory, gases such as N2 and air may leak from the valve at a rate of 1cm3/min (when pressurized). Operating Environment Operating Environment Warning 1. Do not use in a location having an explosive atmosphere. 2. Do not operate in locations where vibration or impact occurs. 3.
5.00 (120) 058) 069) (234) (n2) (310) (348) (36) (424) (462) (500) (538) (s76) {614) {652} 2 3 4.72 6.22 6.65 9_?1 10.71 12.20 13.70 15.19 16.69 1a.la 19,69 21.18 22.68 24,17 25.67 5 6 I 9 1 0 ExMol.: NVS 4llan509o (Siinglo $lnoid/$rlng rbm vals mounr< oi a meilord block) 1 2 't4 I . r I : l 1 6 TERMINAICLIP. A Bst: Axt 3!
If a pump is operated by dried air and N2 gas, etc., the deterioration of the inner gaskets will be accelerated and may result in substantially shortening of the product life. 15 Series PB Specific Product Precautions 2 Be sure to read this before handling. Refer to back cover for Safety Instructions.
When the diaphragm is made of PTFE Please note that when the product is shipped from the factory, gases such as N2 and air may leak from the valve at a rate of 1 cm3/min (when pressurized). 2. When operated at a very low flow rate, the series LV with flow rate adjustment may vibrate, etc. depending on the operating conditions.
Nil Without option B With lock N Without (Roller specification) Driver type Cable type Size Compatible Power supply Nil Without cable drivers voltage [V] 25 32 40 S Standard cable Nil Without driver R Robotic cable A1 LECSA1-S 100 to 120 (Flexible cable) A2 LECSA2-S 200 to 230 Cable length[m] B2 LECSB2-T 200 to 240 Nil Without cable C2 LECSC2-T 200 to 230 2 2 S2 LECSS2-T 200 to 240 5 5 N2
C2 LECSC2T S2 LECSS2T N2 LECSN2T 92 LECSN2T-9 E2 LECSN2T-E P2 LECSN2T-P -4- 1.1.2 Specification LESYH*(D,R,L)*S2/S3 Motor type S2/S3 Model LESYH16*S2 LESYH25R/LS3 LESYH25DS3 Parallel In-line Stroke[mm] 50,100 50,100,150 50,100,150 Horizontal 8 12 12 Max. work load [kg] Vertical 6 12 10 20 10 20 Force [N] (Set value: 15 to 30%) *1 65 to 131 127 to 255 79 to 157 154 to 308 98 to 197 192 to
2q @1 CXSL20 to 32 @0 !5!6@3@4r!8w!7o i!0u@2t !4 ye !1 !2 q @1 Component Parts Component Parts: Standard Piping No. !8 !9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 Description Material Synthetic resin Polyurethane Chromium steel NBR NBR NBR Aluminum alloy Aluminum alloy Aluminum alloy Special steel Special steel Note Note Hard anodized Hard chrome plated Hard chrome plated No. q w e r t y u i o !
Nil B Push type Locking type (Tool required) CE compliant Internal/External pilot Nil Q CE compliant Nil R Internal pilot External pilot 27 Series VS 8-2/VS 8-4 S R S R Conforms to ISO 15407-2 Standard 5 Port Solenoid Valve/Plug-in Type Dimensions (F kit) VV801--FD-W1-M 2 x 1/2" 3(R) port L1 = 19 x n1 + 27 x n2 + 85 L2 = L1 + 17 2 x 1/8" Pilot port n1: Piece of Size 18 mm n2: Piece of Size