1.1

0 10 20 30 40 Circulating fluid temperature (C) HRG010-A HRG010-W 12 12 60 [Hz] 60 [Hz] 10 Cooling capacity (kW) Cooling capacity (kW) 10 50 [Hz] 50 [Hz] 8 8 6 6 4 4 2 2 0 0 0 10 20 30 40 40 0 10 20 30 Circulating fluid temperature (C) Circulating fluid temperature (C) HRG015-A HRG015-W 18 16 60 [Hz] 16 60 [Hz] 50 [Hz] 14 Cooling capacity (kW) Cooling capacity (kW) 14 50 [Hz] 12 12 10 10

Series AP500

Specifications AP501mmA 100 mm Hg absolute to 10 psig (-88 kPa to 0.07 MPa) AP510 1 to 100 psig (0.007 to 0.7 MPa) AP506 1 to 60 psig (0.007 to 0.4 MPa) Select compatible materials of construction for the gas Vacuum to 150 psig (1.0 MPa) 500 psig (3.4 MPa) 1000 psig (6.9 MPa) 40 to 160F (40 to 71 C) (No freezing)1) 0.06 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra max

CG5-S

(mm) Applicable fitting size 6 8 10 4 8 10 12 10 12 12 16 16 KGE10-02 R 1/4 Model 10 -03 R 3/8 KGR04-06 KGE12-03 R 3/8 12 4 -08 -04 R 1/2 -10 KGE16-03 R 3/8 16 KGR06-04 -04 R 1/2 -08 6 Tube Cap KGC -10 -12 KGR08-10 Applicable tubing O.D.

One-touch Fittings

9 1/2 15 to 30 14 to 15 2) The gasket can be reused up to 6 to 10 times.

Solid State Auto Switches

Weight (g) Auto switch model Applicable bore size (mm) Weight D-G39C-4, K39C-4 40 50 63 80 100 162 D-G39C-5, K39C-5 166 D-G39C-6, K39C-6 184 D-G39C-8, K39C-8 210 D-G39C-10, K39C-10 232 Dimensions (mm) 2 x M5 x 0.8 x 12 Hexagon socket head cap bolt Tightening gland 4 x Z Hexagon socket head cap bolt G (PF) 1/2 (Applicable cable O.D. 6.8 to 9.6) Indicator light Most sensitive position Dimensions

Tie-rod Type Hydraulic Cylinder

(different surfaces/same surface) 100 100 110 120 10 D-A5, A6 D-F5, J59 10 + 55 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 110 + 55 120 + 55 100 + 55 (n = 4, 8, 12, 16 )Note 2) 100 + 55 "n" pcs. (same surface) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 2, 4, 6, 8 )Note 1) 2 pcs.

Auto Switch Guide

(Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 BQ-1 Cylinder series 40 BQ-2 BMU1-025 32 BQ-2 BMU1-025 80 BQ-2 50 BQ-2 BMU1-025 100 BQ-2 25 BQ-1 BMU1-025 140 BQ-2 160 BQ-2 125 BQ-2 BQ-1 20 63 BQ-2 BMU1-025 16 BQ-1 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BQ-1 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 [Mounting screws set made of stainless steel] The set of stainless steel mounting screws (with nuts

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

D-Y69 D-Y7PV D-Y7WV 70 65 75 85 10 60 60 + 30 (n 4)/2 n = 4, 8, 12, 16 75 + 30 (n 4)/2 n = 4, 8, 12, 16 85 + 30 (n 4)/2 n = 4, 8, 12, 16 10 + 30 (n 2)/2 n = 2, 4, 6, 8 65 + 30 (n 4)/2 n = 4, 8, 12, 16 70 + 30 (n 4)/2 n = 4, 8, 12, 16 With n pcs. With 2 pcs.

A_HEC-OM-K001

HF10% or less 10 to 40oC Note 2) HF5% or less Hydrofluoric acid and Nitric acid mixture HNO35% or less Nitric acid HNO35% or less Hydrochloric acid HCl5% or less Copper sulfate solution H2SO496% or less 10 to 50oC note) HED007:10 to 30oC Note 2) Sulfuric acid H2SO496% or less 10 to 50oC note) HED007:10 to 30oC Note 2) Ozone 10 to 60oC Ammonium hydroxide NH35% or less 10 to 60oC Note

ITV

IRV Port size Current type 0 to 20 mA DC (Sink type) 1 VEX 1 2 3 4 1/8 (1000 type) 1/4 (1000, 2000, 3000 type) 3/8 (2000, 3000 type) 1/2 (3000 type) 2 3 Voltage type 0 to 5 VDC Voltage type 0 to 10 VDC Thread type SRH Nil N T F Rc NPT NPTF G SRP SRF Rated pressure VCHR +10% Output pressure (MPa) Alarm detection range: Detects output pressure outside the 10% F.S. range.

Cylinder with Lock

1 95 110 115 D-M9V D-M9WV D-M9AVL (n 2) 2 10 80 80 + 30 (n 4) 2 (n = 4, 8, 12, 16) 95 + 30 (n 4) 2 (n = 4, 8, 12, 16) 110 + 30 (n 4) 2 115 + 30 (n 4) 2 (n = 4, 8, 12, 16) 10 + 30 n (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) 2 (Different surfaces, Same surface), 1 D-A5/A6 D-F5/J5 D-F5W/J59W D-F5BAL/F59F 100 110 120 90 15 (n 2) 2 90 + 55 (n 4) 2 (n = 4, 8, 12, 16) 100 + 55 (n 4) 2 (n = 4,

2/3 Port Valve

DC (1) (2) AC 20 10 Min. 10 5 VX22 Option Material DC No. Description Note 1) Dew point: 10C or less. Note 2) 50cSt or less Note 3) "D", "N", "V", etc. in the parenthesis are option symbols.

Series VQ Base Mounted Metal Seal/Rubber Seal

298 20 254.5 272.5 300 310.5 21 265 283 312.5 323 22 275.5 293.5 325 335.5 23 286 304 325 335.5 24 296.5 314.5 337.5 348 L1 L2 (L3) (L4) Vacuum ejector unit style: Equation Manifold F kit (Top entry connector)SV5Q11M, #1 F kit (Side entry connector)SV5Q11M, #2 Valve 2 position singleSV5Q11V, #9 2 position doubleSV5Q11V, #10 3 positionSV5Q11V, #10 L1=10.5n+28.7+(number of ejector units X

HRX-OM-M090

Specification Power supply output 12(DC 24V) DC 24V 10% 0.5A MAX1 11(24V COM) 10(Contact input signal 1) Contact input signal 1 9(Common of contact output signal 1) NPN open collector output PNP open collector output 8(Contact input signal 2) 7(Common of contact output signal 2) Contact input signal 2 1To use the power of the device, the total load current must be 500mA or less.

One-touch Fittings Series KQ2

13.5 2.7 2.7 6 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 2 1 4 3 8 1 2 3 8 1 2 11.8 13.8 10.0 9.9 10.7 17.2 17 4 10.0 5 14 8 18.5 16.2 6 23.3 17 10.0 17.2 5 17 10 27.5 21 26.6 39.0 8 22 28 33.5 29 28 39 35 46.0 8 19 12 44.5 22 60.0 10 22 10 12 81 113 (81) (96) 25 24 25.7 16 Reference dimensions after R(PT) thread installation.

Vacuum Module Series ZX

RESET button 3.6(Mounting hole) SET button 18.7 19 10 1 22.6 ZMA 2 x R1.8 3.6 2 x R1.8 (Mounting hole) (Mounting hole) (Mounting hole) 17.8 1 10 ZQ 19 Pilot valve for supply Release valve ZH Adsorption confirmation switch ZU Release flow rate 2 x 3.3 (Mounting hole) Interface plate adjusting needle A Vacuum port (V) ZL A Vacuum port (V) M5 (or M6) ZY Pitch = 10 M2.5 x 63 Philips screw Air

Step Motor Controller

(Terminal no.) (16.6) (23.7) Cable length (L)[m] 1 3 5 8 A B C Connector A (12.7) (5.6) (7.0) 1 3 2 4 1.5 3 5 8 3 2 1 (13.5) 1 4 A 1 2 10 B (18) (6.7) 15 (14.7) 15 16 (30.7) (11) L Connector B 20 (10) Connector D Produced upon receipt of order Connector A terminal no. 1 2 3 Connector C terminal no. 1 2 3 Circuit Cable color U V W Red White Black Connector B terminal no.

High Vacuum Angle Valve, XL Series

P.12 to P.15 3 ( Size ) 16, 25, 40 XLFV (With solenoid valve) High speed operation O-ring Seal 2 x 105 to 10-5 10-10 10-10 High volume operation 2 ( Size ) 50, 63, 80 XLG Double acting P.16 to P.19 XLGV (With solenoid valve) XLD Standard Reduces particulates Single acting (N.C.)

VQZ1000/2000/3000

Ported 10 10 Series VQZ1000/2000/3000 Dimensions: VQZ1000 2 position double Grommet (G): VQZ1220 1-G-C3/C4/C6/M5 300 95 (Lead wire length) 47.5 5.5 (M5: 6) 5.5 (M5: 6) 22.2 mounting hole 0.8 4 8.6 10 SMC SMC 2 R2 Cover diameter 1.6 25.8 2-C3, C4, C6, M5 Cross section 0.34 mm2 60.3 C3: One-touch fitting for 3.2 Manual override C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5

CRQ2

Applicable shaft type: W d1 = d1 = E3 = E1 = L2 = Y = L4 = L3 = Size 10, 15 Size 20, 30, 40 L1 = X = (mm) d1 Size 10 15 20 30 40 E4 = E2 = 2 to 3 2 to 4 2.5 to 3.5 3 to 5.5 4 to 7 (mm) (mm) Y 3 to 9 3 to10 L2 6 (9 Y) to Y 7 (10 Y) to Y L4 max Y Y Size 10 15 X 8 to 18 10 to 20 L1 {10 (18 X)} to (X 2) {10 (20 X)} to (X 2) L3 max X 2 X 2 Size 10 15 Symbol :: A14 Symbol :: A15 Symbol