5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Double Double Double Double Double Double Double Single Single Single Single Single Single Single Single Single Single Single SI unit SI unit A B A B A B A B A B A B A B A B A B A B A A A A B A A B A A 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 10 11 0 1 2 3 7 8 4 5 9 11 12 6 Mixed wiring is available as an option. Use the manifold specification sheet to specify this.

0.4

(L4) (L3) (5.25) L2 Top entry port Not machined 27 L1 P = 10.5 55 29 13 63.5 <67.5> 13 (12) Indicator light Manual override 4.5 66 (35) (5.5) A A A B A B A B A B A 93.5 <100.4> 40 4 x M5 mounting hole 67 66 2 Stations 8 7 6 5 4 3 2 1 D side U side n DIN rail clamp screw C8 [3(R) EXH port] C8: 8 one-touch fitting R R G 1/2 61.5 18.7 7.7 40.7 25 9.3 B B B B B B B B X X P P A A A A A A A A

Smooth Cylinder/Low Speed Cylinder

A B A B A B B A B A B A B B A B A B A 10 16 2 2 6 6 2.5 2.5 1.5 1.5 0.5 0.5 4.5 4.5 3 3 3.5 3.5 8.5 8.5 0.5 0.5 2.5 2.5 6.5 6.5 3 3 2 2 1 1 5 5 3.5 3.5 4 4 9 9 1 1 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

smcmaintenancepartslist

The element retainer shall be assembled in such a way that the symbol A-A in (a) of Fig. 6 is overlapped with symbol B-B of element retainer shown in (b) of Fig. 6 in parallel. B A B A C View of c Actuators Modular F.R.L.

VQ4000

pilot port) 44 62 9 9 91 44 62 Station number 50.5 59 2-Rc 1/8 (External pilot port) R4.5 R4.5 50.5 9 9 U side entry (LU) U side D side D side U side n 15 X X n X 12 12 12 12 8 B 2 A 4 B 2 A 4 8 Manual override 7 B 2 A 4 SMC SMC SMC SMC SMC SMC SMC B 2 A 4 7 A B A B A B A B A B A A A B A B A B A B A B A A SMC SMC SMC SMC SMC SMC SMC B B B A A A A A A A B A B 2 A 4 6 B 2 A 4 6 B B A A A A

Compact Hydraulic Cylinder

27.5 B 17 19 18 23.5 A 13.5 11.5 18.5 23 B 12.5 14.5 13.5 19 B 9 11 10 15.5 B 7 9 8 13.5 B 13 15 14 19.5 A 14.5 12.5 19.5 24 B 13.5 15.5 14.5 20 B 7.5 9.5 8.5 14 B 10.5 12.5 11.5 17 B 7 9 8 13.5 A 8 6 13 17.5 A 14 12 19 23.5 A 8.5 6.5 13.5 18 A 11.5 9.5 16 21 A 8 6 13 17.5 20 25 32 40 Note) When setting an auto switch, be sure to check its operation before adjusting.

5

Low Speed Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) MQ BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) RHC D-M9A(V) Note 2) BMA3-020S (A set of b, c, d, e) BMA3-025S (A set of b, c, d, e) BMA3-032S (A set of b,

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A U Proper Auto Switch Mounting Position D-A7H/A80H D-A73C/A80C/F79F D-F7/J79/J79W D-F7V/J79C D-F7W/F7WV D-F7BAL/F7BAVL D-M9 D-M9V D-F9W D-F9WV D-A9 D-A9V D-F9BAL D-P5DWL Bore size (mm) D-A7/A80 D-A79W A B A B A B A B A B A B A B 15 10 15.5 10.5 12.5 7.5 14 9 18 13 17 12 32 18.5 13 19 13.5 16 10.5 17.5 12 21.5 16 20.5 15 14.5 9 40 16 16.5 16.5 17 13.5 14 15 15.5 19 19.5 18 18.5 12 12.5

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Shield Brown Black Red Black Orange Black 12 13 7 6 9 8 3 Vcc GND A A B B B-4 A-4 B-5 A-5 B-6 A-6 LE-CP-3-B 360 LE-CP-5-B 590 LE-CP-8-B 1060 LE-CP-A-B 1320 LE-CP-B-B 1920 LE-CP-C-B 2620 Robotic cable Connector B terminal no.

LX

(B contact) LXF LXS LXP LXS N.O. (A contact) N.C. (B contact) N.C. (B contact) N.C. (B contact) N.C. (B contact) N.O. (A contact) N.O. (A contact) N.O. (A contact) N.O. (A contact) N.C. (B contact) Refer to page 318 for detailed specifications of proximity switches. N.O.

Fieldbus System

, 3/5(E) port] Applicable tube O.D.: 10, 3/8" 8 DIN rail 5.5 PE B A B A B A B A B A A 4 3/5 A 4 A 4 A 4 A 4 35 (114.8) 97.5 113.4 116.7 39.5 26.5 E X 101 1 81.2 61.7 Cm: 14.5 01: 16.2 P 47.3 5.5 B 2 B 2 B 2 B 2 B 2 4 x M5 mounting hole 1.4 10.9 2.7 4.7 1/8 [4(A), 2(B) port] SI unit L2 34.2 1.5 One-touch fitting [4(A), 2(B) port] L4 (DIN rail mounting hole pitch: 12.5) 5.3 Applicable tube

VFR

wire electrical entry) P EB EA 31 50 67 81 37 37 43 6-Rc 3/4 61 103 (P , EA, EB port) 72 [ ] = A, B port Rc 3/4 Formula for manifold weight M = 0.911n + 1.621 (kg) n: Station 144 (72) 60 11 60 Non plug-in type: VV5FR5-10Station 1Bore size U side 2.3 (Electrical entry) Manual override (Non-locking) 21 R5.5 B B B B A A A A B B B n A A A B B B B A A A A 3 L2 L1 P = 51 11 11 71.5 (Pitch) P =

V

-16ASUP B L O C K P L AT E P R PR VVQ1000-N5-Station (1-Max. stations) N A M E P L AT E [-N] Direct exhaust [-S] B U I LT I N S I L E N C E R VVQ1000-F-L(VQ1000) E L B O W F I T T I N G S A S S E M B LY I N D I V I D U A L EXH S PA C E R EXH B L O C K B A S E A S S E M B LY VVQ1000-19A(VQ1000) F P L KQPP L A N K I N G P L U G 23 04 06 08 10 01 03 07 2 S TAT I O N S M AT C H I N G F I T T

Metal Seal/Rubber Seal Series VQ Body Ported

SOL. location A B A B A B A B () A B () () 0 1 2 3 4 5 6 Double Double Single SI unit A side B side 3 position A B A B B A B A B A VQC Double Double Single SI unit A side B side 3 position Stations 1 2 3 4 5 SQ The places of asterisk are not used. 3 position uses two stations for wiring.

Table of Contents

D-K59W D-G5NTL D-G5BAL D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-H7C D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-C7/C8 D-H7 D-H7W D-H7NF D-H7BAL D-H7 D-H7C D-H7NF D-H7W D-H7BAL D-C7/C8 D-C73C D-C80C D-C73C D-C80C D-B5/B6 D-G59F D-B59W Applicable bore (mm) A Hs Hs Hs Hs A A A A A B B B B B 16 (24) B 21.5 (29.5) 20.5 (28.5) 15.5 (22.5) 17.5 (25.5) 19.5 (27.5) 20 27.5 27.5 27 24.5 29 25.5 27 31 24

Hydraulic

U B A Approx. U A B D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-F7NTL D-F7BAL SMC SMC Approx. U Approx. U Approx. U SMC SMC Approx. U A B B A Approx. U D-A73C D-A80C D-J79C B A A B Approx.

Table of Contents

Cooling water (l/min) 180C Inlet air temperature Correction factor Air flow (l/min (ANR)) Model 50C 70C 100C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 40 44 46 39.5 43 44.5 41 43 45.5 A B C A B C A B C A B C A B C A B C A B C 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36 34.5 36 37 34.5 35.5 36 34.5 35.5 36 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 38 40 42.5 38

VQ5000

B) B 2 A 4 Indicator light 6 B 2 A 4 A B 5 SMC SMC SMC SMC SMC A A A A A B B B B B Manual override A 4 B 2 A B A B A A B 4 L2 L1 B 2 A 4 3 B 2 A 4 2 34.5 48 68.5 P=41 58.5 P=41 B 2 A 4 1 X 12 Stations R4.5 D side 107.8 179 (single, double, 3 position, rubber type) 184.5 (3 position, metal type) 15.5 17 22 51 69 117 2-Rc1/8 (external pilot port) With connector on D side (FD) 12 Base Mounted

7.5

) 8 19.3 (16.3) 10 (7) 5.5 20.8 56.2 35 17.2 PE X DIN rail B A B A B A B A B A B A 9.9 Manual override (Locking type: Press, then rotate.)

Vacuum Pad

A a A a A C C C b 20 30 B 31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model Model Model ZP2-3507W ZP2-4010W ZP2-5010W ZP2-6010W ZP2-4020W ZP2-5020W ZP2-6020W ZP2-8020W ZP2-4030W ZP2-5030W ZP2-6030W ZP2-8030W 2 x 1.5 0.5 0.5 0.5 10 2 x 2.5 11 2.5 0.8 0.8 Adapter Mounting Dimensions If