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11.76 9.80 7.44 6.86 I\IGOL 9.31 5.88 31.36 24.50 too tntcOM 22.54 19.60 16.66 14.70 )t, ' 21.56 13.72 63.70 49.OO 1N m+10.2kqr,c Non-rotation I 10.10' + 0 a r0.04' 10.06i0.05 Compact Guide Cylinder : Series MGQ (mml 0.266 0.078 0.266 0.078 0.250 0.084 0.063 0.058 Thrs is theoretrca mat. dala !

Air Cylinder RSQ Series Stopper Cylinder

Example) Boll M5 x 65L frzr,r 4 bolts Diagram 1 D agram 2 Lever (with shock absober) Roller/round bar/non-rotaling Mounling bolt 50 40 30 25 20 15 ' 2 0 E 6 6 B r n 10 5 1 0 2 0 Load speed v (m/m n) Lateral load and operating pressure at Flush piping thoroughly beiore connection in orderlo preventdustorchipsf rom entedng the cylinder. Do not mark or damage lhe piston rod.

Residual Pressure Release Valve

Residual pressure release push button (Red) VCHC D With One-touch fitting without a push button guard Release button (Blue) Release button (Blue) ASR ASQ D L1 Q B A D 8 4.2 Applicable tubing W (mm) M M L2 L2 Applicable tubing Weight (g) Model Applicable tubing O.D. 6 8 10 12 D L1 L2 Q W M KEB06 KEB08 KEB10 KEB12 12.8 15.2 18.5 20.9 25 27 27.7 29 21 23 26.5 28.5 5.3 6 6.8 7.5 13 15.4 18.7

Intrinsically Safe Valve

Refer to back cover for Safety Precautions and Handling Precautions for SMC Products (M-E03-3) for 3/4/5 Port Solenoid Valves Precautions. One-touch Fittings Other Tubing Brands Warning Caution 1. Please take anti-static precautions appropriate to the use of resin tubing. 1.

Unit Manifold Valve

Safety Instructions Be sure to read Precautions for Handling Pneumatic Devices (M-03-E3A) before using.

CXT

20 100 B A90 S Platform cylinder Number of auto switches Bearing 2 M Slide bearing S 1 L Ball bushing bearing n n Auto switch Bore size/Stroke (mm) Without auto switch (Built-in magnet) Refer to p.3.8-10 for common specification and wire specification.

ITV0000

Equivalent to IP65 Linearity within 1% (full span) Hysteresis 0.5% (full span) Repeatability 0.5% (full span) ITV (Electro-pneumatic regulator) Mist separator (0.01 m or less) (0.3 m or more) High-speed response time 0.1sec (without load) Air filter (5 m or less) IR (Precision regulator) W Features 1 Compact Electro-pneumatic Regulator Series ITV0 How to Order Single unit and single unit

ZSE30/ISE30

For positive pressure ZSE30 01 25 M For vacuum/Low pressure Option 2 Piping specification R 1/8 (with M5 female thread) NPT 1/8 (with M5 female thread) 01 T1 None Bracket Nil A Output specification NPN output PNP output 1 to 5V output 4 to 20mA output 25 65 26 28 Panel mount B Unit specification Nil M With unit switching function Fixed SI unitI (International System of Units) Note) Note)

Series DXT474

M type connector w/ plug and 300 mm lead wire MO M type connector w/o plug and lead wire MN M type connector w/ plug and pins Air Operated Valve DXT474-A Valve Manifold Assembly DXT475 A * * * * * * 02 * Valve Actuation Type Sup.

asilltr

C Rubber Bumper M Male Rod CM Rubber Bumper & Male Rod Feed Switch B Basic Model A Threaded Mounting Holes.

NCRAI seies

E* A73L D-A73L Parls M 3 X 0 . 5 X 3 M 3 X 0 . 5 X 5 M 3 X 0 . 5 X 5 M 3 X 0 . 5 X 5 tvl3x0.5x5 @ Rotary Actuator Series:NCRAl l n ck and pinion rype ||m 30(17Ie) 50121,63(2 %),80(3 %),1 0o{4) Fluid Air Air o o o o 90' 180' 100" 190" Rotatio 1 ) o r)o Basic o o Shaft Singleend Doubleend o o o Body option With ctshion a Wlthalctqruitph -oand to 200. lrom 180" model.

With Factory Installed

_Ie SMC CORPORATION 1-16-4 Shimbashi, Minato-ku, Tokyo 105 JAPAN Tel:03-3502-2740 Fax:03-350S-24S0 15t printing June 1995.D-036,P-62(M) Specifications are subject to change without prior notice November 1997. 39(RP) Printed in Singapore and any obligation on the part of the manufacturer.

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Solenoid Valve (with M Connector) Conforming to ISO 15407-1 , , ISO 15407-1 Interface Large capacity Size 01 (EVS1-01) and Size 02 (EVS1-02) Interface conforms to ISO 15407-1 Flow rate Cylinder driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000L/min (ANR) 400L/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Light weight Size 01 (3-position): 0.26kg Size 02 (3-position

CU

Lead wire length (m) Load voltage Auto switch part no.

AMPSeries

Exhaust flow speed Conditions: At max. flow capacity 9 8 Min. required distance Exhaust flow speed m/s 7 (maintenance space) 6 5 AMP420 4 AMP320 3 AMP220 2 1 0 0.4 0.8 1.2 1.6 2.0 Distance from exhaust port m Flow characteristic graph Conditions: Initial element condition 0.05 Distance from exhaust port Max, flow rate capacity line Upstream pressure MPa 0.04 0.5 AMP420 Flow

AMP

Exhaust flow speed Conditions: At max. flow capacity 9 8 Min. required distance Exhaust flow speed m/s 7 (maintenance space) 6 5 AMP420 4 AMP320 3 AMP220 2 1 0 0.4 0.8 1.2 1.6 2.0 Distance from exhaust port m Flow characteristic graph Conditions: Initial element condition 0.05 Distance from exhaust port Max, flow rate capacity line Upstream pressure MPa 0.04 0.5 AMP420 Flow

PSE200

Internal Circuits and Connections Error Code & Solution PSE200-(M) NPN open collector 5 outputs + Auto shift 1 input specification LED display Contents Solution Excess current is flowing into the switch output of OUT1. Shut off the power supply. After eliminating the output factor that caused the excess current, turn the power supply back on.

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P-EX01-2A Solenoid Valve (with M Connector) Conforming to ISO 15407-1 , , ISO 15407-1 Interface Large capacity Size 01 (EVS1-01) and Size 02 (EVS1-02) Interface conforms to ISO 15407-1 Flow rate Cylinder driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000L/min (ANR) 400L/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Light weight Size 01 (3-position): 0.26kg Size 02

,,: ,.

L M a l e E l b o w . . . . . . L__ Plug-in Elbow .. ... L Union Elbow . . . . . . LF Female Elbow . K 45" Male Elbow . . . KF 45' Female Elbow Y M a l e R u n T e e . . . . . T Male Branch Tee . , T Union Tee , . . . . . . , TF Female Branch Tee E Bulkhead Connector E Bulkhead Union . . , U Male Branch 'Y" . . . U Union "Y" . . . . . . . .

Exhaust Cleaner for Clean Rooms AMP Series

Exhaust flow speed Conditions: At max. flow capacity 9 8 Min. required distance Exhaust flow speed m/s 7 (maintenance space) 6 5 AMP420 4 AMP320 3 AMP220 2 1 0 0.4 0.8 1.2 1.6 2.0 Distance from exhaust port m Flow characteristic graph Conditions: Initial element condition 0.05 Distance from exhaust port Max, flow rate capacity line Upstream pressure MPa 0.04 0.5 AMP420 Flow