Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

side D side 3 m D-sub connector cable AXT100-DS25-030 Cylinder port fitting C8: 8 One-touch fittings Manifold base (8 stations) 10-SS5Q23-08FD2-D F kit (D-sub connector kit) 10-SS5Q23-08FD2-D 1 set (F kit 8-station manifold base) 10-SQ2131-51-C8 3 sets (2 position single) 10-SQ2231D-51-C8 3 sets (2 position double) 10-SQ2331-51-C8 1 set (3 position closed center) SSQ2000-10A-3 1

LEC-OM034xx

0 to 30 10% 30 Pushing speed 1 0 to 255 mm/s 31 Positioning thrust 1 0 to 30 10% 32 H 33 L In pos 2 0 to 65500 0.01mm ID2 34 to 53 Same as ID1 ID3 54 to 73 Same as ID1 ID4 74 to 93 Same as ID1 ID5 94 to 113 Same as ID1 Note) "0" is "no send" at mode of data writing. "1" and "2" contain "send" at mode of data writing. 42 - 12. 2 Controller IF status flagIN Data Controller IF flag is sent back

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

D-DN

Micro Mist Separator Series AFD20/30/40

Note 2) Bowl assembly for AFD30 to AFD40-06 includes a bowl guard (steel band material). 14-2-44 Micro Mist Separator Series AFD20/30/40 Dimensions AFD20 Bracket (Option) L D G F K M J E B H OUT IN C OUT F.R.L.

Mist Separator Series AFM20/30/40

Mist Separator Series AFM20/30/40 How to Order F 30 AFM Option 03 BD 2R Description Applicable model Symbol Mist separator 2 Accessory Metal bowl AFM20 to 40 Body size 6 Applicable model Description Symbol Nylon bowl AFM20 to 40 Port size 20 30 40 8 Nil Metal bowl with level gauge AFM30/40 (3) C Body size With bracket B AFM20 to 40 With bowl guard Port size AFM20 Thread type Symbol 20 30

Pressure Relief 3 Port Valve with Locking Holes

Pressure relief Spacer Spacer with bracket Applicable 3 port valve P/N P/N F.R.L. combination VHS20-D Y200-D Y200T-D AC20-D VHS30-D Y300-D Y300T-D AC30-D VHS40-D Y400-D Y400T-D AC40-D VHS40-06-D Y500-D Y500T-D AC40-06-D VHS50-D Y600-D Y600T-D AC50-D AC60-DNote) Note) VHS50 can be connected to AC60. * New VHS series is compatible with previous model spacer Y200(T)-A to Y600(T)-A.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

A L D VT KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 D VP Color: White VG VP L DIN rail 12.5 (Pitch) 5.25 7.5 AXT100-DR-l VQ Enter suffix the number from DIN rail dimensions table below.

ZPT/ZPX

H A 30 ZPNA-M22 34.6 Bolts Dimensions (mm) A 11 d M3 x 0.5 12 7 M4 x 0.7 B 5.5 L 8 8 10 15 8.5 M5 x 0.8 13-11-82

ASR

29.7 25 R3/8 65.5 67.6 60.1 27.7 61.2 53.7 20.6 221 239 22 34.4 20.9 64.6 12 239 21 257 62.8 32.6 18.5 10 86.3 30 29.7 25 R1/2 65.5 71.1 63.6 27.7 62.9 55.4 24.1 239 259 22 34.4 64.6 12 20.9 Note 1) d indicates the applicable tubing O.D.

Air-hydro Unit

VNA VNA 2 1 2 1 2 1 VNA VNA D-X Technical Data 1177

3

H C37 3/4 20 J Stainless steel D 200 VAC E 230 VAC 6 25A N.C.

Rotary Table: High Precision Type

D-R732C R73C Relay 24 VDC 5 to 40 mA PLC Relay 24 V AC/DC or less 50mA D-R801 D-R802 R80 PLC 48V AC/DC 40mA D-R8 IC circuit 100V AC/DC 20mA D-R801C D-R802C R80C Relay 24V AC/DC 50mA PLC D-S7 D-S791 D-S792 S79 28 VDC or less 40mA or less Relay D-S7P1 D-S7P2 S7P 80mA or less PLC D-S9 D-S991 D-S992 S99V S99 28 VDC or less 40mA or less IC circuit D-S9P1 D-S9P2 S9PV S9P 80mA or less D-T7 D-T791

Stainless Steel 316

22.5 18 20.9 23.3 D 6 Applicable tubing 30.1 3/8 23.8 35 17 35.5 1/4 29.5 28 10 8 23 39 M 31 3/8 24.7 29 L 19 3/8 26.5 30 12 32.8 24.8 10 60 22 1/2 24.6 54 Connection thread (with sealant) Reference dimensions after installation of R thread Note 1) D is maximum diameter.

IZx-OMP0064

IZS40 IZS41 IZS42 0 1 Remote Remote controller *1 controller *1 1 3 1 0.1 2 5 3 0.5 3 8 5 1 4 10 10 3 5 15 15 5 6 20 20 10 7 30 30 15 8 DC + DC + 20 9 DC DC 30 *1: Set when remote controller is used. 5-3-2.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Unit: g Model D-M9N D-M9B D-M9P 0.5 8 7 8 Lead wire length m 3 41 38 41 Auto Switch Dimensions Auto Switch Internal Circuit D-M9 M2.5 x 4l mounting hole Slotted set screw Indicator light D-M9B, N, P D-M9N DC(+) Brown 2.6 Main circuit of switch Main circuit of switch Main circuit of switch OUT Black 2.7 2.8 4 22 DC(-) Blue 3.2 D-M9N, P (3-wire) D-M9P Most sensitive position 6 DC(+) Brown 22

High Vacuum L Type Valve

Bonnet assembly/Part indication number (1) Temperature Valve size specifications 16 25 40 50 General use XLC16-30-1-2 XLC25-30-1-2 XLC40-30-1-2 XLC50-30-1-2 High temperature XLC16-30-1H-2 XLC25-30-1H-2 XLC40-30-1H-2 XLC50-30-1H-2 Temperature Valve size specifications 63 80 General use XLC63-30-1-2 XLC80-30-1-2 High temperature XLC63-30-1H-2 XLC80-30-1H-2 Note 1) Add the seal material symbol

Rotary Actuator

seal Pinion gear BR2-Plus Rack 30 - Troubleshooting Refere nce Problem Possible cause Solution page 17 Supply pressure isnt applied correctly.

Electric Actuators

to 30 5 phase 242 to 30 294 2 phase 228 to 80 5 phase 244 to 80 2 phase 284 230 to 100 LXSH5SB LXSH2SB LXSH5SA LXSH2SA LXSH5BC LXSH2BC LXSH5BD LXSH2BD LXSH5SB-B LXSH2SB-B LXSH5SA-B LXSH2SA-B LXSH5BC-B LXSH2BC-B LXSH5BD-B LXSH2BD-B 5 phase 272 to 200 2 phase 256 to 200 286 5 phase 270 to 100 2 phase 254 to 100 266 5 phase to 30 250 2 phase to 30 294 268 5 phase to 80 252 2 phase

High Vacuum L Type Valve

Bonnet assembly/Part indication number (1) Temperature Valve size specifications 16 25 40 50 General use XLG16-30-1-2 XLG25-30-1-2 XLG40-30-1-2 XLG50-30-1-2 High temperature XLG16-30-1H-2 XLG25-30-1H-2 XLG40-30-1H-2 XLG50-30-1H-2 Temperature Valve size specifications 63 80 General use XLG63-30-1-2 XLG80-30-1-2 High temperature XLG63-30-1H-2 XLG80-30-1H-2 Note 1) Add the seal material symbol

60

20 30 40 50 for the appearance.