Display Pressure: 7 (0.7MPa), Connection Thread: 02 (R 1/4), Grade: SRA (Precision Cleaning, Clean Room M5.5), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Display Pressure: 2 (0.2MPa), Connection Thread: 01M (R 1/8, M5 Female), Grade: SRA (Precision Cleaning, Clean Room M5.5), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Display Pressure: 2 (0.2MPa), Connection Thread: 02 (R 1/4), Grade: SRA (Precision Cleaning, Clean Room M5.5), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

Display Pressure: 4 (0.4MPa), Connection Thread: 02 (R 1/4), Grade: SRA (Precision Cleaning, Clean Room M5.5), Attachment: C2 (Clear Cover Removable, Wrench Tighten)

JXCx-OMT0028CN

LEC-CGD 4.LEC-CGR c) M12 4pin c) M12 4pin 1. LEC-CG1b) M12 4pin b) M12 4pin a) RJ45 8P 1. LEC-CG11.

LECP6_C

, 1 (3m) CN4 CN1 EMG C24V M24V 24V 0V 0V 20 - 2 DC24V EMG () DC24V 0V Ry Ry U (1 ) BK RLS EMG Ry C 24V 24V 0V 0V M 24V (2 ) BK RLS Ry EMG C 24V 24V 0V M 24V 0V (3 ) BK RLS Ry EMG C 24V 24V 0V M 24V 0V OFF 21 - 3() DC24V M24V EMG () DC24V 0V Ry Ry U (1 ) BK RLS EMG C 24V Ry 24V 0V M 24V 0V (2 ) BK RLS EMG C 24V Ry 24V 0V M 24V 0V (3 ) BK RLS EMG C 24V Ry 24V

Mechanical Valves Series NVM, NVFM, NVZNI

P T 0 .138 in. (3 5mm) r \ T 0 079 in (2mm) T T . 0 217 in. (5 5mm) F O F 6 61 lbs (3kg) P T 0 138 in (3 5 mm) O T 0 079 in (2 mm) T T 0 217 (5 5 mm) A B c D E F G 4 . 1 1 104.5' 2.O3 t51.51 1.32 i33.51 0.91 (23l o.47 fi21 0.81 (20,s'l 0.39 (10) A B c D E F G 4.29 (10e) 2.20 (56) 1.32 :33.5) 0.91 t23\ o.24 (6) 0.81 r20.5) 0.39 (10) in Parentheses Millimeters in NVM430-N01-07 Panel Mounting

IIIIIII

P T 0 .138 in. (3 5mm) r \ T 0 079 in (2mm) T T . 0 217 in. (5 5mm) F O F 6 61 lbs (3kg) P T 0 138 in (3 5 mm) O T 0 079 in (2 mm) T T 0 217 (5 5 mm) A B c D E F G 4 . 1 1 104.5' 2.O3 t51.51 1.32 i33.51 0.91 (23l o.47 fi21 0.81 (20,s'l 0.39 (10) A B c D E F G 4.29 (10e) 2.20 (56) 1.32 :33.5) 0.91 t23\ o.24 (6) 0.81 r20.5) 0.39 (10) in Parentheses Millimeters in NVM430-N01-07 Panel Mounting

Air cylinder (Series compatible with secondary batteries)

(Page 9) 6 Bushing (bearing) 1000 fR[N] 100 Lateral load applied to rod end 100 80 63 10 50 40 1 0 500 1000 1500 Cylinder stroke [mm] Fig. 1 Allowable lateral load applied to rod end C a u t i o n Be certain to align the rod axis with the load and direction of movement when connecting.

Parallel Type Air Gripper

Specifications 1-1 Specifications Specifications Model MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 MHZ2-32 MHZ2-40 Cylinder inside diameter (mm) 10 16 20 25 32 40 Fluid Air Double acting: D 0.2 to 0.7 0.1 to 0.7 Operating pressure (Mpa) Normally open: S 0.35 to 0.7 0.25 to 0.7 Normally Single acting closed: C Ambient and fluid temperature (oC) 10 to 60 Repeatability (mm) +/-0.01 +/-0.02 Maximum operating

CXWM/CXWL

10 15 15 20 MS4-10 MS5-10 MS6-15 MS6-15 MS8-20 Left Right Left Right Operating direction of the housing Operating direction of the housing Manufactured by Misumi Trading Ltd.

DOC1003626

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Abnormal low tank fluid level 1 Low tank fluid level 2 None 3 None 4 None 5 Fan failure Alarm flag 1 6 None 7 None 8 Abnormal rise of circulating fluid temperature 9 Circulating fluid temperature rise 10 Circulating fluid temperature drop 11 TEMP READY

Process Pump

Symbol C[dm3/(sbar)] b Cv N.C.

PSxx-OML0002CN

2 ) C ZS-38-A3 (M35 L 2 ) ZS-27-C (M38 L 2 ) + ZS-27-D (M38 L 2 ) ZS-38-3L 3 1 2m ZS-38-4L 4 2 2m ZS-38-3G 3 1 2m ZS-38-4G 4 2 2m ZS-38-5L 3 1m ZS-38-U (10 ) ZS-27-01 4mm ZS-38-C4H O 6mm ZS-38-C6H O 1/4 inch ZS-38-N7H O 4mm ZS-38-C4L O 6mm ZS-38-C6L O 1/4 inch ZS-38-N7L O -9No.PS-OML0002CN-G LCD ((OUT1),(OUT2)) LCD 4 ON/OFF ON/OFF (kPaMPa) -10No.PS-OML0002CN-G 2

3 Port Solenoid Valve Series SYJ300/500/700

Specifications Fluid Air Operating pressure range MPa 0.15 to 0.7 Internal pilot Ambient and fluid temperature (C) Response time ms (at 0.5 MPa) Note 1) 10 to 50 (No freezing.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

15 0 5 10 15 20 25 0 5 10 15 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 600 600 600 Z 400 400 400 200 200 200 Mep m 0 0 0 0 5 10 15 0 5 10 15 20 25 0 5 10 15 20 L8 Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.

IDX-OM-V020

IDFA60/70/80/90 Series 9.1 Specifications 9-1 IDX-OM-V020 Chapter 9 Option C 9.2 Precautions for installation and handling IDFA60/70/80/90 Series 9-2 IDX-OM-V020 Chapter 10 Option L Chapter 10 Option L Option L: Dryer with heavy duty auto drain.

AC Servo Motor Driver (Pulse input type)

L A B C Series Equivalent Lead (Including pulley 5(2.86) 20 10 5 20 10 5 (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

How to Order Applicable Valves VQ 1 0 5 0 Y 1 B Series VQ1000 A B C D Type of actuation Function Manual override C D A Nil Non-locking push type (tool required) Slotted locking type (tool required) Knob locking type (manual type) B C Specifications 1 2 3 4 5 Symbol 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center DC Nil Standard

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Nil S n 2 pcs. 1 pc. n pcs. 10 11 Relief type Vacuum suction type D 12 5 D M9B 10 C Q S B 21 C Q S B D 12 5 D M9B Auto switch (With auto switch) Nil With auto switch No D With auto switch (Built-in magnet) Without auto switch (Built-in magnet cylinder) Nil For auto switch part numbers, refer to the next page.