10%3025Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3025Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3025Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

, perfluoroalkoxy ethylene copolymer resin), Minimum Bending Radius(mm): 100, Operating Environment: Standard / Heat resistant / Chemical Resistance, Maximum operating pressure(MPa): 0.7 (at 20°C), Operating Temperature(°C): Maximum operating temperature: 260°C, Length(m): 100

ethylene copolymer resin), Minimum Bending Radius(mm): 100, Operating Environment: Standard / Heat resistant / Chemical Resistance, Maximum operating pressure(MPa): 0.7 (at 20°C), Operating Temperature(°C): Maximum operating temperature: 260°C, Length(m): 100

ethylene copolymer resin), Minimum Bending Radius(mm): 100, Operating Environment: Standard / Heat resistant / Chemical Resistance, Maximum operating pressure(MPa): 1 (at 20°C), Operating Temperature(°C): Maximum operating temperature: 260°C, Length(m): 100

/

Perform periodic inspections to check the following problems and replace the tube, if necessary. a) Cracks, gouges, wearing, corrosion b) Air leakage c) Twists or crushing of tube d) Hardening, deterioration, softening of tube 2. Do not repair or patch the replaced tube or fittings for reuse.

CYP

Standard stroke -X Bore size (mm) Standard stroke (mm) Piping port location 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h 20Nil Note 1) Please consult

Centering Unit

This is not a clean room series product. 4 MACM Series Dimensions W (Workpiece loadable range) 4 x D At maximum offset (A + 2 x S) S F DB DA C X114 X115, X116 U B W A H T H Q PB E PA PD P (Unlocking port) PE P (Locking port) P (Relief port) (Option V only) MACM4, MACM6 MACM2, MACM10 PC PC PC PC PE P (Relief port) (Option V only) PD [mm] Dimensions Model A B C D DA DB E F H P PA PB PC PD

90

NPN 1 output ISE30A-01-N-ML Digital pressure PNP 1 output ISE30A-01-P-ML NPN 1 output/ Voltage output ISE30A-01-C-ML switch Note 3) NPN 1 output/ Current output ISE30A-01-D-ML Note 1) This is an assembly of the bracket and resin panel nut. Note 2) l in part numbers for a round type pressure gauge indicates a type of connection thread.

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

ITVH N Bracket dimensions With auto drain Model Port size A M L K J H G F E D C B L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 U (Body) V (Adapter) 1 4, 3 8 1 4, 3 8 AMR3000 AMR4000 AMR5000 AMR6000 144 166 188 230 182 215 281 325 21.5 18 16 18.5 37 37 42 42 3.2 3.2 4.5 4.5 32 40 48 56 28 37 37 44 51 61 66 81 101 121 131 161 10 10 45 70 260 302

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E D 50 3/4, 1 Electric entry 1(P) 2(A) Port size Manual lockout Nil 1/4 (AVL2000) 02 D type DIN connector D Rated coil voltage 3/8 (AVL3000) 03 Port size D type DIN connector with indicator light & suppressor Manual lockout Nil 3(R) DZ 1/2 (AVL4000) 04 B A G 100VAC (50/60Hz) 1 3/4 (AVL5000) 06 D type DIN connector with M12 connector, indicator light & surge voltage suppressor AVL2000 push

E-P HYREG

D B Valve size PVQ Sub-plate VEXD-5 VEXB-2-2 P (Port size: M5) VY1 VY1 Thread type Port size Symbol A B Port size M5 Symbol Nil F N T Thread type Rc G (7) VBA VBAT 1 8 AP100 NPT NPTF VYD-7 VEXB-4-1 Base gasket 2 4 Valve size VEX1-9-1 P VEX4-2AP Sub-plate Port size Thread type Port size Thread type Symbol A B Port size Symbol Nil F N T Thread type Rc G (7) Symbol A B C Port size Symbol Nil

Compact Proportional Solenoid Valve Series PVQ

PVQ30 (1.6) 120 Current decreasing 100 Current increasing Flow rate (l/min) 80 Curve A P = 0.7 MPa 60 Curve C P = 0.35 MPa Curve B P = 0.5 MPa 40 Curve D P = 0.2 MPa 20 0 0 24 VDC 20 40 60 80 100 120 140 160 180 200 12 VDC 0 40 80 120 160 200 240 280 320 360 400 Current (mA) 686 Compact Proportional Solenoid Valve Series PVQ Q. Required flow rate = 0 to 75 l/min.

l

BBA1: D-A5/A6/F5/J5 D-F5BAL switch is set on the cylinder with the screws above when shipped. When a switch only is shipped, BBA1 screw is attached.

MHx-OMM0057

R R 1. 2. 2 9 - 3-7 1 ON OFF ON ON 1 2 1 1 1 2 3 3 0.3~0.5mm 4 5 0.3~0.5mm 10 - 2 ON OFF ON ON 1 2 1 1 1 2 3 3 0.3~0.5mm 4 5 0.3~0.5mm 11 - M2.54 5 6 5~6mm 0.05~0.1 Nm90 D-Y59/Y69/Y7P/Y7PV D-M9(V) D-Y7W/Y7WV D-M9W(V) D-M9A(V)L MHL2-10D 0.8 0.3 MHL2-16D 0.5 0.4 MHL2-20D 0.5 0.7 ON MHL2-25D 0.5 0.6 OFF MHL2-32D 0.5 0.6 MHL2-40D 0.5 0.9 1. 2. 12 - 3-8

Microspeed Cylinder: Double Acting/Single Rod Series CJ2X ø 10, ø 16 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Note 16 CJ-L016B CJ-F016B CJ-T016B 10 16 Foot bracket Flange bracket T-bracket Common for models D-C7, D-C8, and D-H7 BJ2-010 BJ2-016 Caution 1. For Series CJ2X, up to 0.1Nl/min (ANR) of internal leakage is anticipated due to cylinder structure. T-bracket is applicable to double clevis type (D). 2

High Precision Stroke Reading Cylinder Non-rotating Piston Type CEP1 Series ø 12, ø 20 Note) CE-compliant: When connecting to a multi-counter (CEU5  -D, power supply voltage 24 VDC). Refer to the multi-counter operation manual for details. Note)

V Relay, PLC 2-wire A90V IC circuit 100 V or less 1 Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance.

Heatless Air Dryer ID Series

(C) (Atm.temp.) 0.5 MPa SOL.2 AMF 0.7 MPa Fixed filter ZFC Silencer EXH.

STAINLESS STEEL CYLINDER

1000mm/sec 80 and 100 50 to 700mm/sec Action Double acting, Single rod Use the actuator with allowable kinetic energy or less.