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lines in clean room environments TPH 06 04 B 20 Tube O.D.

The instructions described in this manual must be followed in addition to ISO 4414*1) and JIS B 8370*2) and other safety regulations. *1) ISO4414: Pneumatic fluid power Recommendations for the application of equipment to transmission and control systems. *2) JIS B 8370: General rules for pneumatic equipment.

VH*-OMQ0023-C PRODUCT NAME Pressure Relief 3 Port Valve With Locking Holes MODEL / Series / Product Number VHS20-(F,N)01~02A,B(-B,S)(-K,R,Z) VHS30-(F,N)02~03A,B(-B,S)(-K,R,Z) VHS40-(F,N)02~04A,B(-B,S)(-K,R,Z) VHS40-(F,N)06A,B(-B,S)(-K,R,Z) VHS50-(F,N)06~10A,B(-B,S)(-K,R,Z) VHS2510-(F,N)01~02A,B(-B,S)(-K,R,Z) VHS3510-(F,N)02~03A,B(-B,S)(-K,R,Z) VHS4510-(F,N)02~04A,B(-B,S)(-K,R,Z) VHS4510-(

C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-M9W D-M9V D-M9WV D-M9 D-M9W D-M9V D-M9WV D-M9 D-M9W D-M9V D-M9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E 16.5 25 4.5 18.5 49 6.5 7.5 38 21 MIW8-8D MIS12

Formula for Obtaining the Set Value A B ZSP P_1 or P_3 P_2(H_1) or P_4(H_2) PSE200 PSE300 P_1(P_3)=A-(A-B)/4 P_2(P_4)=B+(A-B)/4 Hi Auto-shift input PS H_1(H_2)=(A-B)/2 Lo ISA B Switch output response time at time of auto-shift input A Auto-shift input time C Precision indicator setting PSE PSE200 PSE300 15 ms or less 10 ms or more This function eliminates slight differences in the output

Series VS R8b S RUBBER SEAL/METAL SEAL SERIES VSR8/VSS8 2-position Single solenoid (FG-S) (A)(B) 4 2 5 1 3 (EA)(P)(EB) Double solenoid (FG-D) (Metal) (A)(B) 4 2 5 1 3 (EA)(P)(EB) Double solenoid (FG-D) (Rubber) (A)(B) 4 2 5 1 3 (EA)(P)(EB) 3-position Closed center (FHG-D) (A)(B) 4 2 5 1 3 (EA)(P)(EB) Exhaust center (FJG-D) (A)(B) 4 2 5 1 3 (EA)(P)(EB) Pressure center (FIG-D) (A)(B) 4 2 5

Switch Proper Mounting Position (Detection at Stroke End) and Its Mounting Height Auto Switch Proper Mounting Position (mm) D-A3 D-A44 D-G39 D-K39 D-G5NBL D-H7 D-H7C D-H7W D-H7NF D-H7BAL Auto Switch model D-C7 D-C80 D-C73C D-C80C D-M9 D-M9W D-B5 D-B64 D-B59W D-A9 D-G5NTL Bore size (mm) A B A B A B A B A B A B A B A B 20 55.5 30.5 59.5 34 56 31 50 25 53 28 49.5 24.5 55 30 51.5 26.5 25 55.5

Switch Proper Mounting Position (Detection at Stroke End) and Its Mounting Height Auto Switch Proper Mounting Position (mm) D-A3 D-A44 D-G39 D-K39 D-G5NBL D-H7 D-H7C D-H7W D-H7NF D-H7BAL Auto Switch model D-C7 D-C80 D-C73C D-C80C D-M9 D-M9W D-B5 D-B64 D-B59W D-A9 D-G5NTL Bore size (mm) A B A B A B A B A B A B A B A B 20 55.5 30.5 59.5 34 56 31 50 25 53 28 49.5 24.5 55 30 51.5 26.5 25 55.5

Switch Proper Mounting Position (Detection at Stroke End) and Its Mounting Height Auto Switch Proper Mounting Position (mm) D-A3 D-A44 D-G39 D-K39 D-G5NBL D-H7 D-H7C D-H7W D-H7NF D-H7BAL Auto Switch model D-C7 D-C80 D-C73C D-C80C D-M9 D-M9W D-B5 D-B64 D-B59W D-A9 D-G5NTL Bore size (mm) A B A B A B A B A B A B A B A B 20 55.5 30.5 59.5 34 56 31 50 25 53 28 49.5 24.5 55 30 51.5 26.5 25 55.5

65536 H 30 1875 LEFS40 A 20 1250 B 10 625 LEFB25 S 54 3375 LEFB32 S LEFB40 S LEJB40 T 27 131072 3375 LEJB63 T 42 2625 H 24 1500 LEJS40 A 16 1000 LEJ B 8 500 65536 H 30 1875 A 20 1250 LEJS63 B 10 625 *The travel distance of the actuator per 1 pulse should be 1 [m/pulse]. 26 - 4.5 Positioning Completed Width This signal indicates that servomotor movement has been completed during position control

Magnet: D (Built-in), Series: 85 (Standard), Head Cover Type: N (Basic Integrated Clevis), Bore Size: 25mm, Stroke: 100mm, Cushion: Rubber Cushion, Rod Boot: None, Mounting Bracket: N (Clevis), Accessory: None, Auto Switch Mounting Type: B (Band), Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: M (1m)

Magnet: Built-in, Mounting: Double Clevis, Bore: 16mm, Stroke: 75mm, Head Cover: Perpendicular to Axis, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 1m, Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting: Band Mounting, Cushion: Rubber Bumper, Series: J2

Magnet: Built-in, Mounting: Basic, Bore: 16mm, Stroke: 100mm, Head Cover: Perpendicular to Axis, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 1m, Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting: Band Mounting, Cushion: Rubber Bumper, Series: J2

Magnet: Built-in, Mounting: Double Clevis, Bore: 16mm, Stroke: 125mm, Head Cover: Perpendicular to Axis, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 1m, Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting: Band Mounting, Cushion: Rubber Bumper, Series: J2

Magnet: Built-in, Mounting: Rod Flange, Bore: 16mm, Stroke: 100mm, Head Cover: Perpendicular to Axis, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 1m, Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting: Band Mounting, Cushion: Rubber Bumper, Series: J2

Magnet: Built-in, Mounting: Rod Flange, Bore: 16mm, Stroke: 30mm, Head Cover: Perpendicular to Axis, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 1m, Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting: Band Mounting, Cushion: Rubber Bumper, Series: J2

Magnet: Built-in, Mounting: Rod Flange, Bore: 16mm, Stroke: 45mm, Head Cover: Perpendicular to Axis, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 1m, Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting: Band Mounting, Cushion: Air Cushion, Series: J2

Magnet: Built-in, Mounting: Single Foot, Bore: 10mm, Stroke: 15mm, Head Cover: Perpendicular to Axis, Pivot Bracket: None, Rod End Bracket: None, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 1m, Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting: Band Mounting, Cushion: Rubber Bumper, Series: J2