Regulator Unit Combination: Filter Regulator, Port Size: NPT1/4, Filter Rating: 5μm, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Nylon Case, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: No (No Pressure Port Plug), Size of Body: 20, Check Valve: None, Residual

Regulator Unit Combination: Filter Regulator, Port Size: NPT1/4, Filter Rating: 5μm, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: No (No Pressure Port Plug), Size of Body: 20, Check Valve: None

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

S) (mm) Dimensions PB S Model LVD2-T LVD3-T LVD4-T LVD5-T PA 13 26 A B 26 29.5 Dimensions (mm) A B C D E F G H J K L M N P Q T U Model LVD2-T LVD3-T LVD4-T LVD5-T 30 30 61 56 14.5 104 35 13 4 20 44 7 30 6 31.5 17 M5 to 0.8 35 35 79.5 62 17.5 136 42.5 17.5 6 22 50 7 37 6 36 21 M5 to 0.8 35 35 82 62 20 137 45 17.5 6 22 50 7 39 6 36 21 M5 to 0.8 45 45 105.5 76 25 169.5 65 17.5 8 32 64 7 52 6

        Series VKF300

#$% 2,,#3 #3 4 0 ' ' & & ' ( % # ( ./, 01 /% & )# * %+ )% , 7 (% & )# *+ & 2% , & & ,( 5 #$ 6 # 7% & ' 5 #$ 6 ( % " #$ % , . / &'()* ! * + ! + ,! !"#$% & )# * % , 2,,#3 #3 4 0 ' ' & # ( ./, 01 /% & ' ( % & )# * % , 7 (% & )# *+ & 2% , & )# * )% , Series VKF300 " . / 0 1+ ++ )*+ ! "#$ ! %&'( )*+ , ' $ / !&+ !& , !"# $%& 0,, $6 $6 7 4 ( ( ' 1 $ ) !

PC Wiring System

Dimensions 4-3.2 circuit board mounting hole Circuit board type DC24V MADE IN JAPAN + PCW-EC16Z00 4 4 YMX-F4 42 0 1 2 3 4 5 6 7 8 9 A B C D E F 1 + *S2 S1 2 3 4 4 4 (28.5) 3 130 With cover (DIN rail mount compatible) With cover (DIN rail mount compatible) 16.7 DC24V MADE IN JAPAN + PCW-EC16Z01 28.3 YMX-F4 45 0 1 2 3 4 5 6 7 8 9 A B C D E F 1 + *S2 S1 4.1 2 3 4 (48.5) 5.1 (50) 133 10.5 10.5

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

73 93 112.5 123 4 72 83 103 125 135.5 5 82 93 113 137.5 148 6 92 103 123 150 160.5 7 102 113 133 162.5 173 8 112 123 143 162.5 173 9 122 133 153 175 185.5 10 132 143 163 187.5 198 L1 L2 (L3) (L4) (L5) 10 Base Mounted Plug-in SI Unit Series VQ100 VV3Q11-X11 (L5) (L4) (L3) L2 L2 (5.5) (35.0) (45.0) (23.5) (12.3) (21.5) Manual Override D Side U Side 1 2 3 4 5 n 2-M5x0.8 (E Port) 2-M5x0.8 (P

ASD

Weight (g) d T H D1 D2 D3 L1 L2 L3 Model 4 ASD230F-M5-04 9.3 12.9 17.5 29.4 12 25.5 28.6 25.8 28.3 9.6 10 7.8 11.7 M5 X 0.8 8 25 22.2 6 ASD230F-M5-06 11.6 13.7 20.6 32.5 13 34.6 39.6 6 14 ASD330F-01-06S 11.6 13.7 22.9 29 38.5 36.1 31.1 14.2 11.8 10.6 R(PT)1/8 12 32.1 27.1 15.8 33.9 38.9 8 ASD330F-01-08S 15.2 18.5 28.2 31 44.8 6 ASD430F-02-06S 12.8 17 25.2 53 43.5 18 8 36.7 ASD430F-02-08S

Digital Pressure Switch ( compatible)

The display 6 shows "HHH". (1) Adjust the pressure to (1) Check that the pressure is not The display within the set pressure range.

Digital Pressure Switch

Incorrect internal data processing of the product (Er0, 4, 6, 7, 8 and 9) Check if there is a noise source nearby. System error (Er0, 4, 6, 7, 8, 9) is displayed. (2) Check if the power supply voltage is in the range 12 to 24 VDC 10%. (2) Supply power in the range 12 to 24 VDC 10%.

KB

D L A2 A1 M Part No.

LZ-OM003xx

Warning 6. Test run (2)Test run details gradually. 5. Wiring

ITV

side. 50 56 D side U side 1 2 stations 50 9 3 (8) Dimensions in inch are noted in parentheses. 6.5 6.5 1 1 82 89.5 SUP, VACzport 3 3 (6, 1/4") 40 40 EXH, ATMcport 25 25 (6, 1/4") 5 5 2 2 2 OUTxport (4, 5/32") Note) 3.7 Breathing hole (M3 x 0.5) Note) For dimensions of the cable connector, refer to single unit on page 14-8-8.

PFxx-OMS0001CN

-35No.PF-OMS0001CN-A d.

PFxx-OMX0002

Otherwise, chattering will occur. 6: Analogue output or external input can be selected by pressing the buttons.

Coolant valve

Doc. no.SGC200-OMM0002-F PRODUCT NAME Coolant valve MODEL / Series / Product Number SGC/SGH Series Contents Safety Instructions -2,3 Precautions for Design -4 Selection -4,5 Mounting -5 Piping -5 Operating Environment -6 Maintenance and Inspection -6 Precautions -6 Manual Override Operation -6 Connecting cable -7 Leakage voltage -7 Response -7 Light/Surge Voltage Suppressor (Pilot valve:

E-MY2_E_D

B C E 8 3 4 6 Switch No.

ITV0000

6.

VXA21/22

The right side of the common port provides plug. 4.1-75 VVXA31/32 Dimensions Stations 2 3 4 5 6 7 8 9 10 Model L L1 L2 L1 L2 96 84 126 108 132 120 172 154 168 156 218 200 204 192 264 246 240 228 310 292 276 264 356 338 312 300 402 384 348 336 448 430 384 372 494 476 VVXA31 VVXA32 Symbol Model M 45.5 50.5 N 69 76 K 6 9 G 24 25 H 30 40 J 36 46 F 33 34 C 9 10 D 22 24 E 59 66 B 20 22 A 40 44

Vacuum Gripper

Piping Tube Connect a tube (applicable tube O.D. 6) to the air pressure supply (P) port. (Refer to the P.30 2 ) Tube attachment ) To remove the tube, push the release button and pull out the tube. Release Button Air pressure supply (P) port Applicable tubing O.D.: 6 Release valve V114 (N.C.) EXH. Pilot valve for supply V114 (N.C.)

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

D IN/OUT 2 positions IN Model Dimensions B MADE IN JAPAN -100kpa~0.5MPa PRESS. SMC B 19 19 23.5 23.5 D C 4 6 6 8 A 60 60 68 68 04 06 06 08 17 17 21 21 ZFC100A X17 Width across flats C ZFC2001115 Series ZFC Specific Product Precautions Be sure to read before handling. Refer to front matters 38 and 39 for Safety Instructions and pages 844 to 846 for Vacuum Equipment Precautions.