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OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 SGDE servo pack R U V 2 1MC M T 3 W 1CN 4 150 1 2 3 4 5 6 PULS PULS SIGN SIGN CLR CLR Be sure to ground.

PAT. 5 S Coupler Series KK Plug (P) Socket (S) Male thread type Male thread type Model Body size Port size Model Body size Port size 1 4 R KK4S-02MS 1/4 KK4P-02MS 1 4 R 3 8 -03MS R 1/4 1 2 -04MS R Female thread type Model Body size Port size 1 4 1/4 KK4S-02F Rc 3 8 -03F Rc Type with nut fitting (for polyurethane hose containing cloth) Model Body size Applicable hose bore size/O.D. mm 1/4

Functional option With end lock (R) Axial piping (P) For details of adjuster and functional options, please refer to "Optional specifications" on page 46. IN OUT Theoretical Output Table The dual rod ensures an output twice that of existing cylinders.

18 39 40 41 42 43 Qty. 1 1 2 2 2 2 4 2 4 Series MY2H Single Axis Type 16, 25, 40 MY2H G Bore size Stroke PG Q + Stroke (LL) L LA 4-B depth of counter bore C LD through hole 4-MM, depth M Cylinder mounting center line PA Work piece mounting center line U Long hole depth Y Guide center line NX PB PC PF QW X 4 x 2square nut J NT NH PE PD LB NW LW NV T-slot for body mounting NC LE H7 depth R

OUT< f I t N + L r , l t (oz) Ihe rersht i. oarentfiess is wilh allo swhch. 3.6(3.8) 3.8(4.2) Additonal ltight 0.3 0.4 0.1 0.2 0.6 1.1 (Example) NCDIPFIO-o5o-90 Basic (with auto switch) +Additional weiqht (Flange mount): 2.9 + 0.2: 3l (oz).

E l r ^ r ^ r ^ n i ^ \ Ambient and fluid temoerature l;NPTF (temale) Air connections lrPF (temale) Electrical connections Aluminum diecast N,laterial of body 6.7 (3) Weight lbs (kgf) { For split ranqe specilicatiofis, consult the faciory o How To Order o e Y I lccessories (optional) C'Serration joints (For NlP610) J Allen wrench (For tightening terminal cover) ' wlth joint, po1e, hex, nul

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | Solenr io vAc 3 _ KYPS" 4-2mVAC E l{vF 1100-oc{17 @io.rg None F Foot Bracket --R(PT),Mekic' T NPTF (Std.) N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D .

-t+ I lBlack lwhilel O-.O I | | Brue-(Blequi:9 :r Brown (Hed) lead wire: Connect lo the power source O (power source lerminal) io operate main circu( of switchln cas ol 2 wire systms connect wilh O side of load.

6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 REBHT32 @6 Parts list Parts list No. Description Material Note No.

CH kPa MPa kPa MPa MPa kPa kPa MPa kPa MPa OUT1 OUT2 CH 1 2 3 4 P R E S S U R E Copy function (page 14) Each channel's information can be copied to another channel.

Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations R

Voltage leaking When a resistor is used along with the switching element and a C-R element is used for protecting the switching element (surge voltage protector), be aware that there is an increase in leaked voltage when the leakage current flows through the resistor or the C-R element. Residual leaked voltage must be kept as follows.

YES Model selected Without shock absorber Model selected With shock absorber 522 Series CXT Non-rotating Accuracy of Slide Block p y r CXTM CXTL (Slide bearing) (Ball bushing bearing) p (= y) r p (= y) r Bore size (mm) 12 0.09 0.12 0.05 0.05 16 0.08 0.10 0.05 0.04 Pitching direction Rolling direction Yawing direction 20 0.07 0.08 0.04 0.03 25 0.07 0.07 0.04 0.03 32 0.08

1-C6 ind exhaust spacer, VQ1000/VQ20/VQ30 VALVE*** $59.55 + Add to Quote Add To Cart Add to Cart SMC VVQ1000-R-1-N7 ind exhaust spacer, VV5Q* MANIFOLD VQ 4/5 PORT*** $59.55

1-C6 ind exhaust spacer, VQ1000/VQ20/VQ30 VALVE*** $59.55 + Add to Quote Add To Cart Add to Cart SMC VVQ1000-R-1-N7 ind exhaust spacer, VV5Q* MANIFOLD VQ 4/5 PORT*** $59.55

1-C6 ind exhaust spacer, VQ1000/VQ20/VQ30 VALVE*** $59.55 + Add to Quote Add To Cart Add to Cart SMC VVQ1000-R-1-N7 ind exhaust spacer, VV5Q* MANIFOLD VQ 4/5 PORT*** $59.55

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, .88184 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, .68587 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, .58790 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, .67924 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?