Mist Separator

Refer to the section [11. Disassembly Drawing] (P27). Note 3) "Z" in Part No. (4) indicates semi-standard specifications. The pressure unit: psi. The temperature unit: oF. Note 4) Refer to the section [4. How to Order] (P9) for option and semi-standard symbols. -15- 6-3.

IDX-OM-W095

T . 11-1 11.1 . 11-1 11.2 . 11-1 11.3 . 11-2 11.4 . 11-3 11.5 . 11-4 12 V . 12-1 12.1 . 12-1 12.2 . 12-1 12.3 . 12-2 13 . 13-1 13.1 . 13-1 IDFC60/70/80/90 Series IDX-OM-W095 1 1.1 () 6.2 1.1.1 3 IDFC60/70/80/90 Series 1-1 IDX-OM-W095 1.2 6 1.2.1 1.2.2 50 1.2.3 0 IDFC60/70/80/90 Series 1-2 IDX-OM-W095 1.2.4 IDFC60/70/80/90 Series 1-3 IDX-OM-W095 1.2.5 SERIAL No.

Micro Mist Separator

Refer to the section [11. Disassembly Drawing] (P27). Note 3) "Z" in Part No. (4) indicates semi-standard specifications. The pressure unit: psi. The temperature unit: oF. Note 4) Refer to the section [4. How to Order] (P9) for option and semi-standard symbols. -15- 6-3.

AIR FILTER

P30 The page is deleted. 11.

Line filter

Bowl assembly specifications 11 to 18 7. Assembly of Optional parts 19 8. Operation and Adjustment 20 to 21 9. Troubleshooting 22 10. Replacement work procedure 23 to 29 1) Element assembly (AFF20) 23 to 24 2) Bowl assembly (AFF20) 25 1) Element assembly (AFF30/AFF40) 26 to 27 2) Bowl assembly (AFF30/AFF40) 28 to 29 11. Exploded Drawing 30 12.

Mist Separator

Bowl assembly specifications 11 to 18 7. Assembly of Optional parts 19 8. Operation and Adjustment 20 to 21 9. Troubleshooting 22 10. Replacement work procedure 23 to 29 1) Element assembly (AM20) 23 to 24 2) Bowl assembly (AM20) 25 1) Element assembly (AM30/AM40) 26 to 27 2) Bowl assembly (AM30/AM40) 28 to 29 11. Exploded Drawing 30 12.

Micro Mist Separator

Bowl assembly specifications 11 to 18 7. Assembly of Optional parts 19 8. Operation and Adjustment 20 to 21 9. Troubleshooting 22 10. Replacement work procedure 23 to 29 1) Element assembly (AMD20) 23 to 24 2) Bowl assembly (AMD20) 25 1) Element assembly (AMD30/AM40) 26 to 27 2) Bowl assembly (AMD30/AM40) 28 to 29 11. Exploded Drawing 30 12.

Speed Controller with Uni One-touch Fitting AS Series

12 13 14 Meter-in Black zinc chromate plated HNBR NBR NBR NBR NBR U seal Cassette Seal O-ring O-ring O-ring O-ring Spacer Gasket 9 10 11 12 13 14 15 16 17 HNBR NBR NBR NBR NBR NBR NBR, Stainless steel Note 1) Only AS221F-U01 and AS321F-U02 are electroless nickel plated.

LEJ-OM004xx

LEJ-OM00401 PRODUCT NAME Electric Actuator / Slider Type AC Servo Motor For Clean Room Ball Screw type MODEL / Series 11-LEJ Series The description of this manual is only a peculiar content to "11-LEJS For Clean Room". Please match and confirm the manual of each model to a detailed content of the product.

MIST SEPARATOR

Refer to "11. DISASSEMBLY DRAWING" (P23). Note 4) "Z" of the part with no. is semi-standard for indicated unit of pressure and temperature, which is psi and F. Note 5) The symbol for option and semi-standard are described as "4. HOW TO ORDER" (P7). 15 3) Bowl assembly / Auto drain for AFM40-A Option Semi-standard Semi-standard Standard Semi-standard Part no. Part no.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

PAX PB Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 17-5-53 12 Series LVD Special Tools How to order fitting jigs LQ G

Body Ported Type Vacuum Ejector ZH Series

11 One-touch One-touch One-touch 09 N02 11 One-touch Screw-in One-touch N01 N02 N02 Screw-in Screw-in Screw-in ZH15DA08 10 10 One-touch One-touch One-touch 08 03 10 One-touch Screw-in One-touch 02 03 03 Screw-in Screw-in Screw-in ZH15DA09 11 11 One-touch One-touch One-touch 09 N03 11 One-touch Screw-in One-touch N02 N03 N03 Screw-in Screw-in Screw-in ZH18DA10 12 12 One-touch

20

-X53 X-number With One-touch tube fitting VMG11-H06-11-X35m 23 Lever stroke Width across flats 22 23 27 30 B Note) 102 14 (Hex.) 117.5 KQ2H06-11 (02S, 35S) (mm) Type Connection size Model B 17 20.5 27.5 17 20.5 27.5 17 20.5 27.5 17 20.5 27.5 H06 H08 H10 H07 H09 H11 Metric size one-touch fitting Inch size one-touch fitting Note) Reference dimensions after installation RFKSS-GAP0030 Blow-gun

MICRO MIST SEPARATOR

Refer to "11. DISASSEMBLY DRAWING" (P23). Note 4) "Z" of the part with no. is semi-standard for indicated unit of pressure and temperature, which is psi and F. Note 5) The symbol for option and semi-standard are described as "4. HOW TO ORDER" (P7). 15 3) Bowl assembly / Auto drain for AFD40-A Option Semi-standard Semi-standard Standard Semi-standard Part no. Part no.

LJ1H

Refer to page 204 regarding brake wiring. 600 a = 2000 a = 1000 400 L3 (mm) a = 3000 a 200 L3 Mey 0 5 10 15 Transfer load m (kg) Refer to page 145 for deflection data. 32 33 Standard Motor/Vertical Mount Specification Series LJ1H20 Dimensions/LJ1H202PF Scale: 10% 12.5 9.5 Work piece mounting reference plane LJ1 LG1 LC1 LX LC6D/LC6C Switches 110 67 20 4-M6 x 1 thread depth 15 4-M8 x 1.25 thread

CV/MVGQ

28 32 14 24 1.6 4.5 8 4 14 84 12 M8 x 1 72 15 M4 x 0.7 9.5 60 34.5 12.5 52.5 28 42 20 33 2.3 5.5 8 5 20 85 18 M10 x 1 73 15 M5 x 0.8 9.5 61 40.5 12.5 52.5 10-15-15

Speed Controller: Standard Type Series AS In-line Type

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 15-9-34 Speed Controller: Standard Type In-line Push Locking Type Series AS Construction Dimensions Component Parts No.

Clean Series: 11 (Vacuum Suction Type), Magnet: D (Built-in Magnet), Series: J2, Mounting: B (Basic Style), Bore Size: 10mm, Stroke: 125mm, Cushion: Rubber Bumper, Standard, Head Cover Port Location: Perpendicular to Axis, Version: None, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs.

Clean Series: 11 (Vacuum Suction Type), Magnet: D (Built-in Magnet), Series: J2, Mounting: B (Basic Style), Bore Size: 10mm, Stroke: 30mm, Cushion: Rubber Bumper, Standard, Head Cover Port Location: Perpendicular to Axis, Version: None, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs.

Clean Series: 11 (Vacuum Suction Type), Magnet: D (Built-in Magnet), Series: J2, Mounting: B (Basic Style), Bore Size: 10mm, Stroke: 75mm, Cushion: Rubber Bumper, Standard, Head Cover Port Location: Perpendicular to Axis, Version: None, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs.