Soft Start-up Valve AV2000/3000/4000/5000

1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 82.5 23 67.5 10.5 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 84.5 27.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 112 100 76 3/8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth 6 32 42 3 57

Modular Type Lubricator Series AL

with barb fitting With drain cock With drain cock Metal bowl Metal bowl with level gauge Metal bowl with drain cock Metal bowl with drain cock Metal bowl with drain cock & level gauge Optional B specifications B B B B B B B Barb fitting Applicable tubing: T0604 Standard specification Accessory specification Bracket mounting size Port size Model R 35 60 80 110 110 110 110 G 27 40 54 54 66

CNA

(mm) Stroke range (mm) d BF FD FT FX FY FZ RT RY Z ZZ e f h ZZ l l 50 63 80 100 50 63 80 100 88 9 20 120 58 144 30 76 47 241 58 52 19 66 1/4 Stroke 240 1001 to 1200 1001 to 1200 105 11.5 23 140 64 170 40 92 48 263 58 52 19 66 1/4 Stroke 258 1001 to 1200 1001 to 1200 124 13.5 28 164 84 198 45 112 59 317 80 65 21 80 1/4 Stroke 310 1001 to 1400 1001 to 1400 140 13.5 29 180 100 220 50 136 60

IIIIIIIIII

WETTED MATERIALS Polysulfone, Silicone, Buna-N TEMPERATURE RANGE 40 150 F (4 66 C) REPEATABILITY < +/1% F.S.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

7 60 64 76 7 6H9 (+0.030 0 ) depth 66 6H9 (+0.030 0 ) depth 66 11 Motor mounting position: Right side parallel 153 G 70 60 64 *1 When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

66 NN 2 2 2 2 2 3 4 4 4 GA 23 23 23 23 32 72 88 97 122 HA 55 55 55 65 80 65 88 132 132 I 16 16 16 16 16 31 20 18 18 J 56 56 56 66 90 100 150 205 230 K 35 45 55 65 75 100 125 150 175 KA 170 223 248 NA 4 4 4 4 4 4 8 8 8 M 107 107 107 117 141 166 205 258 283 Z 105.5 105.5 105.5 115.5 139.5 164.5 203.5 256.5 281.5 ZZ 148.5 148.5 148.5 158.5 182.5 207.5 246.5 299.5 324.5 13-/22-MXQ2510 13-/22

ASP-X352

X352 ASP630F-U04-13-X352 45.7 9.4 16.1 11.6 45.5 51.1 1/8 Uni G 1/8 14.2 14 29.3 14 13.7 38.4 22.9 26.9 34.6 to 39.6 1/4 1/4 63.6 10.4 23 15.2 18.5 58 21 70.4 41.7 1/4 Uni G 1/4 17.9 18.7 46.4 34.7 28.2 36.7 to 41.7 8mm (5/16) 10mm 70.5 13.2 25 18.5 66.1 77.9 3/8 Uni G 3/8 23 24 23.1 44 20.8 54.1 43.9 32.6 41.9 to 46.9 3/8 12mm 79.4 18.7 29.8 20.9 80.3 87.5 1/2 Uni G 1/2 28.6 24 52.2 25.9 66

Quick-Connect, Agency Compliances: UL / CSA Approved Microswitch, Operating Speed: 25 MSEC, Materials: Body: Polysulfone1 Diaphragm: Polyurethane1 Spring: Stainless Steel Other: Nylon, Carbon Filled Nylon, Acetal , Body: Polysulfone1, Diaphragm: Polyurethane1, Spring: Stainless Steel, Other: Nylon, Carbon Filled Nylon, Acetal, Temperature Range: 40° - 150° F (4° - 66

Quick-Connect, Agency Compliances: UL / CSA Approved Microswitch, Operating Speed: 25 MSEC, Materials: Body: Polysulfone1 Diaphragm: Polyurethane1 Spring: Stainless Steel Other: Nylon, Carbon Filled Nylon, Acetal , Body: Polysulfone1, Diaphragm: Polyurethane1, Spring: Stainless Steel, Other: Nylon, Carbon Filled Nylon, Acetal, Temperature Range: 40° - 150° F (4° - 66

Quick-Connect, Agency Compliances: UL / CSA Approved Microswitch, Operating Speed: 25 MSEC, Materials: Body: Polysulfone1 Diaphragm: Polyurethane1 Spring: Stainless Steel Other: Nylon, Carbon Filled Nylon, Acetal , Body: Polysulfone1, Diaphragm: Polyurethane1, Spring: Stainless Steel, Other: Nylon, Carbon Filled Nylon, Acetal, Temperature Range: 40° - 150° F (4° - 66

Diaphragm: Polyurethane Spring: Stainless Steel Other: Nylon, Acetal , Body: Polysulfone, Diaphragm: Polyurethane, Spring: Stainless Steel, Other: Nylon, Acetal, Valve Housing: Nylon Plunger: Aluminum Seals: Buna-N Other: Brass , Housing: Nylon, Plunger: Aluminum, Seals: Buna-N, Other: Brass, Operating Temperature: 40° - 150° F (4° - 66

Diaphragm: Polyurethane Spring: Stainless Steel Other: Nylon, Acetal , Body: Polysulfone, Diaphragm: Polyurethane, Spring: Stainless Steel, Other: Nylon, Acetal, Valve Housing: Nylon Plunger: Aluminum Seals: Buna-N Other: Brass , Housing: Nylon, Plunger: Aluminum, Seals: Buna-N, Other: Brass, Operating Temperature: 40° - 150° F (4° - 66

Diaphragm: Polyurethane Spring: Stainless Steel Other: Nylon, Acetal , Body: Polysulfone, Diaphragm: Polyurethane, Spring: Stainless Steel, Other: Nylon, Acetal, Valve Housing: Nylon Plunger: Aluminum Seals: Buna-N Other: Brass , Housing: Nylon, Plunger: Aluminum, Seals: Buna-N, Other: Brass, Operating Temperature: 40° - 150° F (4° - 66

Diaphragm: Polyurethane Spring: Stainless Steel Other: Nylon, Acetal , Body: Polysulfone, Diaphragm: Polyurethane, Spring: Stainless Steel, Other: Nylon, Acetal, Valve Housing: Nylon Plunger: Aluminum Seals: Buna-N Other: Brass , Housing: Nylon, Plunger: Aluminum, Seals: Buna-N, Other: Brass, Operating Temperature: 40° - 150° F (4° - 66

D series Pin Clamp Cylinder G G Series CKQ D/CLKQ D P P How to Order Built-in standard magnet D A 50 177 R A L KQG C P4DWSC With magnetic field resistant auto switch Built-in strong magnet D A 50 198 R A L KQP C P79WSE With magnetic field

Clamping height Mounting tap: 4 x M10 x 1.5 Pin hole: 2 x 8H7 : Mounting tap : Pin hole D Clamp arm position (clockwise viewed from top) 66 180 from port Same direction as port Mounting surface (Two facing sides) Guide pin Port Port A C Clamp arm Guide pin Clamp arm 90 from port 270 from port Port Port B D Clamp arm Guide pin Clamp arm Guide pin Table 1.

XL-OMY0003

. <> 1 Ass 'y () ( ) < SUS304> 7 (SUS304) () () 3 < SUS316L> 6 (SUS316L) < SUS304> 5 (SUS304) () 2 4 (A6063) < A6063> C D E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003 5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003 6 6-1. 1 1P4P5

CA2

With Rod Boot Bore size (mm) e f h ZZ l Stroke range (mm) 40 50 63 80 100 20 to 500 43 11.2 59 1/4 stroke 154 20 to 600 52 11.2 66 1/4 stroke 167 20 to 600 52 11.2 66 1/4 stroke 178 Dimensions of the mounting brackets are the same as those of the standard double acting single rod type.

Cylinder with Lock

100 FD Stroke range (mm) Bore size (mm) 50 63 80 100 e l BF FT FX FY FZ H M RT RY ZZ f h ZZ d 1001 to 1200 88 9 20 120 58 144 67 6 30 76 241 58 19 66 1/4 stroke 240 52 1001 to 1200 1001 to 1200 105 11.5 23 140 64 170 71 10 40 92 263 58 19 66 258 1/4 stroke 52 1001 to 1200 1001 to 1400 124 13.5 28 164 84 198 87 12 45 112 317 80 21 80 1/4 stroke 310 65 1001 to 1400 1001 to 1500 140 13.5 29

C85

103 50 96 19 6.6 25 5 40 20 6.6 19 42 66 54 36 17 46 8 5 40 6 25 32 8 66 110 50 99 23 6.6 25 5 40 24 6.6 23 42 66 54 40 17 46 8 5 40 6 ( ): In the case of air cushion. { }: In the case of auto switch. 6-11-19 6-11-19 19 Series C85 Accessory Dimensions [First angle projection] Single Knuckle Joint/DIN648-DIN24335 Double Knuckle Joint/ISO8140-DIN71752 d 45 d3 d7 d b1 b3 f l l3 j g b e C

MXU

Maximum Load Weight (g) Weight (g) Cylinder stroke (mm) 5 Maximum load weight Model Model 10 15 20 25 30 MXU6 MXU10 MXU16 MXU6 MXU10 MXU16 100 66 72 81 88 97 103 200 115 124 138 147 166 174 400 216 215 251 250 285 300 8-3-3 4 Series MXU Allowable Moment Precautions Allowable moment (Nm) Correction value of moment center position distance (mm) Model Stroke Be sure to read before handling.