Diaphragm: Polyurethane Spring: Stainless Steel Other: Nylon, Acetal , Body: Polysulfone, Diaphragm: Polyurethane, Spring: Stainless Steel, Other: Nylon, Acetal, Valve Housing: Nylon Plunger: Aluminum Seals: Buna-N Other: Brass , Housing: Nylon, Plunger: Aluminum, Seals: Buna-N, Other: Brass, Operating Temperature: 40° - 150° F (4° - 66

Diaphragm: Polyurethane Spring: Stainless Steel Other: Nylon, Acetal , Body: Polysulfone, Diaphragm: Polyurethane, Spring: Stainless Steel, Other: Nylon, Acetal, Valve Housing: Nylon Plunger: Aluminum Seals: Buna-N Other: Brass , Housing: Nylon, Plunger: Aluminum, Seals: Buna-N, Other: Brass, Operating Temperature: 40° - 150° F (4° - 66

Diaphragm: Polyurethane Spring: Stainless Steel Other: Nylon, Acetal , Body: Polysulfone, Diaphragm: Polyurethane, Spring: Stainless Steel, Other: Nylon, Acetal, Valve Housing: Nylon Plunger: Aluminum Seals: Buna-N Other: Brass , Housing: Nylon, Plunger: Aluminum, Seals: Buna-N, Other: Brass, Operating Temperature: 40° - 150° F (4° - 66

Diaphragm: Polyurethane Spring: Stainless Steel Other: Nylon, Acetal , Body: Polysulfone, Diaphragm: Polyurethane, Spring: Stainless Steel, Other: Nylon, Acetal, Valve Housing: Nylon Plunger: Aluminum Seals: Buna-N Other: Brass , Housing: Nylon, Plunger: Aluminum, Seals: Buna-N, Other: Brass, Operating Temperature: 40° - 150° F (4° - 66

Diaphragm: Polyurethane Spring: Stainless Steel Other: Nylon, Acetal , Body: Polysulfone, Diaphragm: Polyurethane, Spring: Stainless Steel, Other: Nylon, Acetal, Valve Housing: Nylon Plunger: Aluminum Seals: Buna-N Other: Brass , Housing: Nylon, Plunger: Aluminum, Seals: Buna-N, Other: Brass, Operating Temperature: 40° - 150° F (4° - 66

RSQ

For details about auto switches with pre-wire connector, refer to page 10-20-66. 10-8-3

CVJ3

For details about auto switches with pre-wire connector, refer to page 10-20-66. 10-15-10

Vacuum Pad with Ejector ZHP Series ø 63, ø 80

ZHP ZHP Male thread 5/16-18UNC F 3/8-16UNC G Female thread 5/16-18UNC H 3/8-16UNC ZU VQD-V Ejector Specications Recommended Work Load [N] ZHP-07l ZHP-10ZHP-12ZHP-15 Nozzle nominal size [mm] 0.7 1.0 1.2 1.5 ZHP63 ZHP80 Horizontal lifting 66 106 Vertical lifting 33 53 Max. suction ow rate [L/min (ANR)] 30 51 62 77 Air consumption [L/min (ANR)] 24 40 58 87 Use this product with the recommended

CNA

For details, refer to page 9-15-66. Normally closed (NC = b contact), solid state switch (D-Y7G/Y7H type) are also available.

C85

46 6 32 8 66 50 6.6 40 42 17 19 40 5 25 19 6.6 36 54 5 8 25 24 66 46 6 32 8 66 50 6.6 40 42 17 23 40 5 25 23 6.6 40 54 5 8 6-11-17 Series C85 Dimensions [First angle projection] Double acting, Double rod Rubber cushion: C85WE Bore Stroke Without magnet, Built-in magnet KV WH G1 WH + Stroke G1 SW BE BE D EE EE ND KK KK ND 8 NA C C K K KW AM AM NA HR F N1 N1 F Rail mounting type (A) Band

Air Cylinder CLA Series Fine Lock Model

M14X1.5 M 1 8 X 1 . 5 [418X1.5 M22X1.5 1,I26X1.5 7 t 2 O 27 n 20 45 153 a 22 85 tiz 1 1 7 162 209 43 1 . 2 59 170 t. 16 30 46 1 0 50 168 0 22 95 74 127 58 1 8 1 232 52 '|.2 66 189 3l 48.5 60 142 0 rE ;ij;5 28 1 0 90 144 58 1 9 1 244 52 1 . 2 66 199 37 55 1 5 23 70 204 0 34 140 1 0 192 71 ?

Air Cylinder Series CA2

With Rod Boot l Bore size (mm) e d f h ZZ Stroke range (mm) 40 50 63 80 100 20 to 500 56 43 11.2 59 1/4 stroke 154 20 to 600 64 52 11.2 66 1/4 stroke 167 20 to 600 64 52 11.2 66 1/4 stroke 178 20 to 750 76 65 12.5 80 1/4 stroke 213 Dimensions of the mounting brackets are the same as those of the standard double acting single rod type.

MXU

52 24 24 20 65.5 66 52 24 24 20 75.5 76 62 34 35 30 75.5 76 62 34 35 30 85.5 86 72 40 45 40 90.5 91 77 40 50 45 8-3-8 9 Compact Slide Series MXU Construction MXU6 (6) MXU10 (10) MX MTS MY CY MG CX MXU16 (16) D-X With auto switch 20Data Component Parts No. q Note Hard anodized No. !

VCW

(mm) Electrical entry P Port size A B C D E F H K L M N Model Grommet: G Conduit: C DIN terminal: D Conduit terminal: T Q R Q R Q R S Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 45 44 43 58 40.5 46.5 99 43 66 83 1/8 VCW21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 46 44 44 58 41.5 46.5 99 44 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 56.5 46 54.5 60 52 48.5 101 54.5 68 99 1/4

Pin Clamp Cylinder Series CKQ/CLKQ

Adjustable from 0.5 to 2 mm 70 70 Shim Mounting tap: M10 x 1.5 Pin hole: 8H7 Mounting tap: M10 x 1.5 Pin hole: 8H7 66 66 One 1 mm and two 0.5 mm shims are attached.

Soft Start-up Valve AV2000/3000/4000/5000

1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 82.5 23 67.5 10.5 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 84.5 27.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 112 100 76 3/8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth 6 32 42 3 57

Modular Type Lubricator Series AL

with barb fitting With drain cock With drain cock Metal bowl Metal bowl with level gauge Metal bowl with drain cock Metal bowl with drain cock Metal bowl with drain cock & level gauge Optional B specifications B B B B B B B Barb fitting Applicable tubing: T0604 Standard specification Accessory specification Bracket mounting size Port size Model R 35 60 80 110 110 110 110 G 27 40 54 54 66

CNA

(mm) Stroke range (mm) d BF FD FT FX FY FZ RT RY Z ZZ e f h ZZ l l 50 63 80 100 50 63 80 100 88 9 20 120 58 144 30 76 47 241 58 52 19 66 1/4 Stroke 240 1001 to 1200 1001 to 1200 105 11.5 23 140 64 170 40 92 48 263 58 52 19 66 1/4 Stroke 258 1001 to 1200 1001 to 1200 124 13.5 28 164 84 198 45 112 59 317 80 65 21 80 1/4 Stroke 310 1001 to 1400 1001 to 1400 140 13.5 29 180 100 220 50 136 60

IIIIIIIIII

WETTED MATERIALS Polysulfone, Silicone, Buna-N TEMPERATURE RANGE 40 150 F (4 66 C) REPEATABILITY < +/1% F.S.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

7 60 64 76 7 6H9 (+0.030 0 ) depth 66 6H9 (+0.030 0 ) depth 66 11 Motor mounting position: Right side parallel 153 G 70 60 64 *1 When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more.