Piping: Base Mounted: Side Ported, Stations & Port Location: 14 Stations (Type 20, 41, 42, 43), Port Size: ø6 One-touch Fitting, Type 42, Thread: -

Piping: Base Mounted: Side Ported, Stations & Port Location: 15 Stations (Type 20, 41, 42, 43), Port Size: ø6 One-touch Fitting, Type 42, Thread: -

Piping: Base Mounted: Side Ported, Stations & Port Location: 5 Stations (Type 20, 41, 42, 43), Port Size: ø6 One-touch Fitting, Type 42, Thread: -

Piping: Base Mounted: Side Ported, Stations & Port Location: 8 Stations (Type 20, 41, 42, 43), A, B Port: Base Mounted G1/8, Type 42

Digital Pressure Switch

[Measurement mode] 22 Pressure Setting 23 3 Step Setting Mode 24 Simple Setting Mode 26 Function Selection Mode 28 Function selection mode 28 Default setting 28 F 0 Units selection function 30 F 1 Setting of OUT1 31 F 2 Setting of OUT2 34 F 3 Digital filter setting 36 F 4 Auto-preset function 37 F 5 FUNC terminal setting 39 F 6 Fine adjustment of display value 41 F10 Sub display setting 42

Digital Pressure Switch

Wiring 20 Outline of Settings [Measurement mode] 23 Pressure Setting 24 3 Step Setting Mode 25 Simple Setting Mode 27 Function Selection Mode 29 Function selection mode 29 Default setting 29 F 0 Units selection function 31 F 1 Setting of OUT1 32 F 2 Setting of OUT2 35 F 3 Digital filter setting 37 F 4 Auto-preset function 38 F 5 FUNC terminal setting 40 F 6 Fine adjustment of display value 42

Digital Pressure Switch

Measurement mode] 20 Pressure Setting 21 3 Step Setting Mode 22 Simple Setting Mode 24 Function Selection Mode 26 Function selection mode 26 Default setting 26 F 0 Units selection function 28 F 1 Setting of OUT1 29 F 3 Digital filter setting 32 F 4 Auto-preset function 33 F 6 Fine adjustment of display value 35 F10 Sub display setting 36 F11 Display resolution setting 41 F80 Power saving mode 42

Fieldbus system Digital unit

Installation 12 Installation 12 Wiring 14 Digital input unit Model Indication and How to Order 17 Names and Functions of Product 17 Mounting and Installation 20 Wiring 20 LED Display 25 Specification 28 Specifications 28 Dimensions 31 Digital output unit Model Indication and How to Order 34 Names and Functions of Product 34 Mounting and Installation 36 Wiring 36 LED Display 40 Specification 42

High-precision Digital Pressure Switch

Setting 19 3-Step Setting Mode 20 Simple Setting Mode 22 Function Selection Mode 24 Function selection mode 24 Default setting 24 F 0 Display units and switch output specifications function 26 F 1 Setting of OUT1 27 F 2 Setting of OUT2 30 F 3 Digital filter setting 32 F 4 Auto-preset function 33 F 6 Fine adjustment of display value 35 F10 Sub display setting 36 F11 Display resolution setting 42

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

(Except in the case of the single numeric parameter) PLC Touch panel Function that can be executed in each mode Mode setting Single numeric parameter Half numeric parameters Full numeric parameters Number of definable numerical data items 1 6 12 Number of occupied stations 1 2 4 Max. number of connectable controllers 42 32 16 Step no. defining operation v Numerical data defining operation

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

63) 132.5 Cable length 250 24 Motor cable 65 (3) 15.2 (2.4) (94) (73.5) 5H9 (+0.030 +0 ) depth 8 (Depth of counterbore 3) C-C Lock cable Cable length 400 65 Body mounting reference plane Cable length 250 4 x M6 x 1 thread depth 12.5 (Depth of counterbore 3) (8.5) (B dimension range)1 (137) (2.4) (116.5) 44 (8.5) 5H9 ( +0.030 C C 5.5 +0 ) depth 8 60 (Depth of counterbore 3) Motor cable 42

LJ1H

A B C D 41 42 Standard Motor 200W Series LJ1H30 High Rigidity Direct Acting Guide Motor Output Rolled Ball Screw 20mm/10mm lead Vertical Mount How to Order Stroke LJ1H303 NA 1 K F 2 Cable entry direction Top entry Power supply voltage Cable entry direction Cable length Left entry 100VAC (50/60Hz) 200VAC (50/60Hz) Actuator cable Axial Right Left Top Bottom Brake cable Left Axial Axial Axial

Moisture Control Tube

x 5000 4 100 O.D. 2 mm tube Vc = = = 75 mm3 D2s 4 x 42 x 6 4 50 Kv = = 837 Vt Vc 0 0 300 600 900 1200 1500 Kv value Note) For dual piston cylinder, the volume ratio will be 1/2 of the volume ratio calculated above. (2) If your operating conditions are different from these basic conditions, apply a correction factor.

ChemicalThermo-con

5.7 (145) 5.2 (132) Fan 1.3 (32) 17.6 (447) 0.8 (20) 7.4 (187) 6.5 (165) Display panel 8.7 (222) HRG HRS HRZ HRZD HRW HEC HEB HED Technical Data Related Products AL SI OUT 7.4 (189) COMMUNICATION ALARM 7.0 (177) 5.9 (149) 1.7 (44) CHEMICAL 4.3 (109) 8.46 (215) Fluid leak sensor PURGE OUT IN PURGE FG B B A FG + EXT.SENSOR REMOTE ON/OFF POWER I N O N IN WATER WATER SIGNAL DC OUT AC 1.65 (42

53

Altitude [m] q Upper limit of ambient temperature [C] w Cooling capacity coefficient Less than 1000 m 45 1.00 Less than 1500 m 42 0.85 Less than 2000 m 38 0.80 Less than 2500 m 35 0.75 Less than 3000 m 32 0.70 15. In locations where strong impacts or vibrations occur. 16.

Environment

LEFB/Belt Drive Horizontal 4 Work load: W [kg] LEFB25 2 LEFB16 0 0 500 1000 1500 2000 Speed: V [mm/s] 42 Model Selection LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification * This graph shows the amount of allowable overhang (guide unit) when the center of gravity of the workpiece overhangs in one direction.

Modular Type Lubricators Series AL

H F G JIS Symbol (A) Lockable at the time of exhaust E 2 C D 1 3 (P) (R) Effective area mm2 (Cv) Model Port Size EXH 1/8 1/4 3/8 IN, OUT 1/4 3/8 1/2 IN to OUT 14 (0.76) 31 (1.68) 55 (2.98) OUT to EXH 16 (0.87) 29 (1.57) 42 (2.28) VHS20 VHS30 VHS40 A Paint color (Standard) Handle: Red Body: Platinum silver Use an air filter on the IN side for operating protection.

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

ITVH N Bracket dimensions With auto drain Model Port size A M L K J H G F E D C B L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 U (Body) V (Adapter) 1 4, 3 8 1 4, 3 8 AMR3000 AMR4000 AMR5000 AMR6000 144 166 188 230 182 215 281 325 21.5 18 16 18.5 37 37 42 42 3.2 3.2 4.5 4.5 32 40 48 56 28 37 37 44 51 61 66 81 101 121 131 161 10 10 45 70 260 302

AMR3000 to 6000

42 21.5 18 16 18.5 182 215 281 325 144 166 188 230 Adapter Assembly Installation Procedure For details, refer to Best Pneumatics Vol. 16.

AMR3000 to 6000

5000, 6000 N Bracket mounting dimension With auto drain Model Port size A B C D E F G H J K L M U (Body) V (Adapter) P 50 35 45 46.5 R 78 97 98 115 S 8 7 10 15 T 9 9 11 11 B 260 298 366 432 L 178 211 277 321 1 4, 3 8 1 4, 3 8 AMR3000 AMR4000 AMR5000 AMR6000 100 120 130 160 180 210 246 290 264 302 370 436 10 10 70 70 103 121 131 161 51 61 66 81 28 37 37 44 32 40 48 56 3.2 3.2 4.5 4.5 37 37 42