Load Mass (Horizontal Mounting)(kg): 40~57, Table Size Length L(mm): 170, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide type, Table Size Width W(mm): 121, Table Size Height H(mm): 84, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General Purpose, Maximum Load(kg): 50, Piping Format: Centralized

Load Mass (Horizontal Mounting)(kg): 40~57, Table Size Length L(mm): 170, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide type, Table Size Width W(mm): 121, Table Size Height H(mm): 84, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General Purpose, Maximum Load(kg): 50, Piping Format: Centralized

Load Mass (Horizontal Mounting)(kg): 40~57, Table Size Length L(mm): 170, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide type, Table Size Width W(mm): 121, Table Size Height H(mm): 84, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General Purpose, Maximum Load(kg): 50, Piping Format: Centralized

Load Mass (Horizontal Mounting)(kg): 40~57, Table Size Length L(mm): 170, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide type, Table Size Width W(mm): 121, Table Size Height H(mm): 84, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General Purpose, Maximum Load(kg): 50, Piping Format: Centralized

Load Mass (Horizontal Mounting)(kg): 40~57, Table Size Length L(mm): 170, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide type, Table Size Width W(mm): 121, Table Size Height H(mm): 84, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General Purpose, Maximum Load(kg): 50, Piping Format: Centralized

Load Mass (Horizontal Mounting)(kg): 40~57, Table Size Length L(mm): 170, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide type, Table Size Width W(mm): 121, Table Size Height H(mm): 84, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General Purpose, Maximum Load(kg): 50, Piping Format: Centralized

Load Mass (Horizontal Mounting)(kg): 40~57, Table Size Length L(mm): 170, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide type, Table Size Width W(mm): 121, Table Size Height H(mm): 84, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General Purpose, Maximum Load(kg): 50, Piping Format: Centralized

Load Mass (Horizontal Mounting)(kg): 40~57, Table Size Length L(mm): 170, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide type, Table Size Width W(mm): 121, Table Size Height H(mm): 84, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General Purpose, Maximum Load(kg): 50, Piping Format: Centralized

Load Mass (Horizontal Mounting)(kg): 40~57, Table Size Length L(mm): 170, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Rolling Guide] Linear guide type, Table Size Width W(mm): 121, Table Size Height H(mm): 84, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General Purpose, Maximum Load(kg): 50, Piping Format: Centralized

Stability of suction position,

Pad diameter 32, 40 Dimensions/With Ball Joint Adapter: Vacuum Inlet Vertical Pad form Flat type with groove ZP3E-TF32UMl-AL6 ZP3E-TF40UMl-AL6 14 14 Width across flats 8 2.5 M6 x 1 2.5 M6 x 1 Width across flats 8 Seal washer Seal washer 14.5 3 1.3 19.2 23.6 16 39.6 14.5 1.3 3 19.2 23.6 16 39.6 Width across flats 2.5(2) Width across flats 2.5(2) 17 17 31 31 14.41) 2.5 14.41) 2 30 (Rotating

Air Cylinder Series CS1

30 M30 x 1.5 35 98 110 318 82 75 40 133 341 364 0.2 stroke Lube Non-lube Air-hydro 15 31 24 M30 x 1.5 35 98 110 318 82 75 40 133 341 364 0.2 stroke 17 36 26 M36 x 1.5 39 106 120 346 82 75 40 141 367 388 0.2 stroke 20 41 31 M40 x 1.5 39 111 135 381 92 85 45 153 399 417 0.2 stroke Lube Non-lube 20 46 31 M45 x 1.5 39 111 135 381 96 90 45 153 399 417 0.2 stroke 25 56 35 M56 x 2 49 141 160 461

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

M30 x 1.5 35 98 364 Lube Non-lube Air-hydro 1/2 341 133 40 75 110 318 0.2 stroke 15 31 24 M30 x 1.5 35 98 364 3/4 141 367 75 40 120 346 0.2 stroke 17 36 26 M36 x 1.5 39 106 388 3/4 399 153 45 85 381 135 0.2 stroke 20 31 41 M40 x 1.5 39 111 417 3/4 1 399 45 153 381 90 135 0.2 stroke 20 31 46 M45 x 1.5 39 111 417 Lube Non-lube 477 176 55 105 160 461 0.17 stroke 25 56 35 M56 x 2 49 141 493

Step Motor Controller

While the test function operates at manual mode, only the output is valid. 31

Rotary Actuator/Vane Type

Size: 10 31 2 x M3 x 0.5 through 2 x 3.5 through 25 Chamfer (Rotation range is stated on page 70.) 25 31 41 B port A port 29 9h9 0 0.036 17 4g70.004 0.016 0.5 2 x 3.5 through 9 14 31 29 1 3 10.6 7 16.5 9.5 2 x M3 x 0.5 1 18.5 35 19.8 67 2 15 When D-M9m is used *1.

Step Motor Controller

In the unlikely event that malfunction is caused by ground, please disconnect the unit from ground. 31 These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Pin Clamp Cylinder Series CKQ/CLKQ

189 29 187 4.6 5.5 15 7 31 11 189 29 187 5.6 6 16 7 11 31 189 29 187 6.1 7 18 8 36 12 194 34 192 7.1 8.5 20 8 36 13 194 34 192 8.6 10.5 25 8 36 15.5 194 34 192 10.6 P (Port thread size) Nil G1/4 TN TF Rc1/4 NPT1/4 5 Series CKQ/CLKQ Dimensions CKQTB50 CKQTA50 (The angle of the cylinder port position against the mounting side is 90) Refer to How to Order on page1 for the mounting side and

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

: EtherNet/IP (87.9) 82 (85) 82 1 31 (35) 31 (35) 4.5 4.5 For body mounting For body mounting 1 152.2 170 152.2 170 161 161 18.2 4.5 For body mounting 18.2 4.5 For body mounting Trademark DeviceNet is a trademark of ODVA.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

SB) 5 3 5 90 5 90 90 20 20 20 20 A 20 20 (3 x SA) MHSHJ3-63D MHSHJ3-80D Section SD SD 4 4 10 5 11 3 5 5 3 90 5 90 20 20 20 20 (mm) NB A Model L 2H9 3H9 4H9 6H9 8H9 J 20 21 24 28 32 HB 65 75 88 106 130 HA 76 86 103 125 158 FX 22 26 32 40 50 EO 15.5 19 24 31 41 EC 11.5 15 18 23 31 DO 35.5 40 48 59 73 DC 31.5 36 42 51 63 AE 36 37 46 50 57 CA 9.5 10.5 11.5 13 14 CB 19 19 26.5 28 31 B 54 62 74

15

Additionally, when running the positioning operation, do not set within 2 mm of both ends. 11LEJS XAH9 XA 32 Up to 114 97.5 13 115 to 190 116.5 191 to 300 134 25ADimensions [mm] Size Motor type FA FB FC FD FE FF FG FH LEC [mm] LEYGlM (Sliding bearing) NZ, NX M4 x 0.7 7.5 46 30 3.7 47 45 NY M3 x 0.5 6 45 30 4.2 47 45 NM1 3.4 17 31 22 2.5 36 45 19 NM2 3.4 28 31 30 3.5 56 45 30 Size Stroke

SI unit ( device)

30 29 28 27 26 25 24 31 30 29 28 27 26 25 24 Force output 4 24-31 Output 28-31: Setting value F0 1 1 1 1 0 0 0 0 0F 0 0 0 0 1 1 1 1 Hold last state Structure of Output Switching Counts (index 68) The output switching count parameter consists of thirty-two sub-indices that represent bit fields with a size of 32 bits each.