CS1

100 157.5 50 36 59 15 8 35 16 85 47 90 43 14 31 19 36 Lube Non-lube Air-hydro M30 X 1.5 to 1400 1401 to 1600 100 161 128 M14 X 1.5 188 112 180.5 50 36 59 15 9 35 16 14 19 47 90 43 31 36 1/2 3/4 M36 X 1.5 to 1400 1401 to 1600 18.5 106 197 182 144 M16 X 1.5 206 118 14 19 53 90 43 36 45 56 40 59 17 9 39 M40 X 1.5 3/4 to 1800 1801 to 2000 18.5 125 227 204 162 115 M18 X 1.5 231 132 60 48 17 41

ZR

For nozzle size 10, 13, 15 + with function plate M3 x 0.35 x 93 4 6 6 6 6 For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate For nozzle size 10, 13, 15 + with function plate M3 x 0.35 x 37 M3 x 0.35 x 41 M3 x 0.35 x 42 M3 x 0.35 x 46 !0 Precautions Components Ejector unit Be sure to read before handling.

AC Servo Motor Driver (Pulse input type)

Changing PD04 from 00212100 to 0021210D 0 D 41 - (2) Symbol allocation using the setup software: Changing pins CN1-16 to Gain changing selection (CDP). Change PD04 from 00212100 to 0021210D in the I/O tab. Select Single Axis Write. Cycle the power the parametersto be enabled.

ZQ-OM01401

) 36 (33) 66 0.5 59 (54) 52 (49) 41 (39) 79 0.1 0.2 4 0.3 40 (30) 37 (29) 31 (23) 54 2) 46 (37) 49 (44) 41 (36) 68 0.5 63 (57) 57 (51) 46 (43) 82 0.1 0.2 6 0.3 43 (34) 39 (30) 35 (28) 54 2) 49 (41) 53 (50) 47 (43) 68 0.5 67 (64) 61 (59) 54 (51) 81 1) ( ) 2) ZQ05A0.35MPaZQ07AZQ10A0.43MPaZQ000A0.4MPa 3) (PD) V PD [MPa] ZQ05A ZQ07A ZQ10A ZQ000A 0.05 11 10 8 16 0.15 22 20 17 32 3.2 0.25

Series LQ3 High Purity Fluororesin Fitting

M L K J H E t W1 W2 M 14 20 25 29 37 49 58 69 89 100 117 136 14.5 20.5 24.5 30.5 36.5 48.5 6 7 7 9 9 10 11 16 21 24 32 41 10 17 22.5 24.5 27 30 16 21 26 32 41 50 17 24 28 36 43 55 8 8 8 8 13 13 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQ3P1A LQ3P2A LQ3P3A LQ3P4A LQ3P5A LQ3P6A 1/4 (E) (E) L Panel Aperture (K) Straight Union : LQ3U (mm) Inch Size H Model Tubing O.D.

CRBU

Port locations: Axial direction CRBUWl-lSE (mm) A B C D E(g6) F(h9) G H J K L M N P Q1 (Depth) Q2 R S1 S2 T U V W X Model 10.5 8.5 10.5 11 11.5 14 12 15.5 10.5 9.5 10.5 10 11 13 13 14 CRBUW10-lS CRBUW10-lSE CRBUW15-lS CRBUW15-lSE CRBUW20-lS CRBUW20-lSE CRBUW30-lS CRBUW30-lSE M3 (4) M5 X 0.8 M3 X 0.5 M5 X 0.8 M3 X 0.5 4 -0.004 -0.012 9 0 -0.043 29 22 14 8 3 25 31 41 15.5 M3 X 0.5 5 24 3.5

Environment

range [mm] R OA OB PA PB Q S T U PC W X Y Without lock With lock Without lock With lock Motorless 25 15 to 100 8 37 38 15.4 8.2 28 46 92 1 15.4 123 173 145 195 51 101 to 400 LAT 32 20 to 100 10 37 38 15.4 8.2 28 60 118 1 15.9 123 173 150 200 61 101 to 500 LZ [mm] Body Bottom Tapped Size Stroke range [mm] MA MB MC MD MH ML MO MR XA XB LC3F2 15 to 39 24 32 50 M5 x 0.8 6.5 4 5 40 to 100 42 41

15

Weight (g) D-M9P(V) D-M9B(V) D-M9N(V) Auto switch model 0.5 m (Nil) 8 7 1 m (M) 14 13 Lead wire length 3 m (L) 41 38 5 m (Z) 68 63 Dimensions (mm) D-M9 D-M9V Mounting screw M2.5 x 4 L Slotted set screw (flat point) 500 (1000) (3000) (5000) Indicator light 2.6 3.95 Mounting screw M2.5 x 4 L Indicator light 2.8 Slotted set screw 2 7.5 0.3 22.8 2.6 15.9 4.6 2.8 2.6 19.5 2.6 6 Most sensitive

Refrigerated Air Dryer

230 VAC (60 Hz) Three-phase 460 VAC (60 Hz) AMH AME Air flow capacity SCFM (m3/h [ANR]) Series Rated inlet condition Port size Outlet air pressure dew point Note) AMF 37F(2.8C) 45F(7.2C) 50F(10C) IDFB3E IDFB4E IDFB6E IDFB8E IDFB11E IDFB15E IDFB22E IDFB37E IDFB55E IDFB75E NPT3/8 10(17) 11(19) 12(20) ZFC NPT1/2 15(25) 16(27) 17(28) 25(43) 26(45) 28(47) SF 100F (37.8C) 100psi (0.7MPa) NPT3/4 41

RSQ

A 152.5 154 B 52.5 54 E 52 64 I 69 86 J 5 7 M 40 50 N 5.5 6.6 O counterbore 9 depth 7 11 depth 8 T 44 56 Z 14 19 W 66 80 U 35 41 Bore size (mm) 40 50 Data Note 1) Dimensions without auto switch are the same as drawing above. Note 2) These figures show the dimensions when equipped with D-A73 or D-A80 auto switches.

LV50-OMQ0002

Width across flats of attachment 3/8 24 mm 1/2 28 mm 3/4 35 mm 1 41 mm Ensure that the piping is tightened to the required torque. The tightening torque for connection threads is shown in the table below.

IP8001 Series

Mode button 1s Set button 1s or Mode button 1s Set button 1s Fig. 41-1 No.IP8S-OM09 57 Mode button 1s Set button 1s or Mode button 1s Set button 1s P constant I constant D constant Fig. 41-2 Mode button 1s Set button 1s or Mode button 1s Set button 1s P constant I constant D constant Fig. 41-3 Mode button 1s Set button 1s or Mode button 1s Set button 1s P constant I constant

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Supply port PD (mm) D FC GC 6 8 11 15 A B C EA EB FA FB FD FE FF FG GA GB GD 83 111 155 200 256 Model MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M3 x 0.5 M5 x 0.8 M6 x 1 22 34 43.5 58 73 2.6 3.3 5.1 6.8 8.6 9 12.5 16.5 20 24.5 28 37 54 71 80 4 4.5 6.5 10 12.5 7 9.5 12.5 17 22 16 21 29.5 40 47 15 19 25.5 37 51 34 44 64 84 95 18 23 28.5 41 55 57 26 35 48.5 66 87 6 (Effective depth

Rotary Gripper Series MRHQ

D-M9N-746 D-M9P-746 D-M9B-746 0.5 8 8 7 Lead wire length m Auto Switch Internal Circuit 3 41 41 38 5 68 68 63 MHZ D-M9N-746 MHF DC(+) Brown Auto Switch Dimensions Main circuit of switch Main circuit of switch Main circuit of switch MHL OUT Black D-M9N-746/D-M9P-746/D-M9B-746 MHR Mounting screwM2.5 x 4l Slotted set screw Indicator light DC(-) Blue MHK D-M9P-746 MHS 2.6 746 DC(+) Brown MHC

Escapements Series MIW/MIS

41 40 5H9 0 +0.030 M6 x 1 37 6.8 10 17 10 28 21h9 -0.052 0 55 6H9 0 +0.030 19.5-0.1 0 50 47 M8 x 1.25 51 8.6 12 34 22 12.5 1428 Escapements Series MIW/MIS Finger options Tapped on upper and lower faces Tapped on all faces Attachment mounting thread 4 x FD through Attachment mounting thread 2 x FD through FF FE FF FE Attachment mounting thread FD thread depth FG FC FC RSQ FA FF FE FA RSG

NVZseies

Nvv3zs-4lc-)-aF) 2-o1r irw3zs4rR-o2-o Applicau Yalng .NW3Z5-41-O2-e) NVzsl4-OOO NVZ5l4M-OOO .NW3Z5-4rR-O2-O NVz5:4R-OOO r{w3zs-41-o2-o ; -*o** E]2 stations :r{29.1 20 stations BLnk p|.le.3ty DXT201-15-1A lfthere are more lhan I siations, supply air and exhaust lrom bolh sides ol manitold, @ W,:f;::W#ffinaidvqhre' Blank PlateAss'g DXT20-1s-1A Apelic*b b..e . NW3Z'2GOI . NWSZ+2l-e)l .

VCHN

590 AMV 3/4 200 72 74 41 710 1 200 72 74 41 605 AMP 1 200 72 74 41 725 1 230 72 74 41 665 1 230 72 74 41 810 11/4 240 72 74 54 765 11/4 240 72 74 54 910 11/2 240 72 74 54 790 11/2 240 72 74 54 935 609 5.0 MPa 5.0 MPa Applications included air-blowing, charging fluid into a vessel, or discharging (Blow-molding equipment, etc.)

48

Weight [g] D-M9N(V) D-M9P(V) D-M9B(V) Auto switch model Precautions Caution 0.5 8 8 7 1 14 14 13 Lead wire length (m) 3 41 41 38 Fix the auto switch with the existing screw installed on the auto switch body.The auto switch may be damaged if a screw other than the one supplied is used. 5 68 68 63 How to Order D-M9 N Auto Switch Internal Circuit D-M9N(V) Series Lead wire length Nil M L Z 0.5

KR

18.5 17 26.5 10 23 40.0 28.4 1 2 KRY10-04S 54.5 66 31 41 22 1 4 3 8 KRY12-02S KRY12-03S 53.5 55 17 57.4 45.4 24 17 28.5 1 2 KRY12-04S 20.9 57.5 68 12 Connection thread (With seal) 22 Reference dimensions after R thread installation.

Step Motor Controller (Servo / 24 VDC)

Return to origin . 41 8.1 Return to origin . 41 8.2 Positioning operation . 41 8.3 Pushing operation. 42 (1) Pushing operation is successfully performed. . 42 (2) Pushing operation is failed (pushing the air) . 42 (3) Movement of the work piece after the completion of the pushing process .. 42 8.4 Controller input signal response time . 43 8.5 Methods of interrupting operation . 43 9.