5 Port Solenoid Valve Series SQ1000/2000

seals Type of actuation A, B port size 2 position 3 position 4 position One-touch fitting Effective area mm (Cv factor) Single/Double Double (Latching/ Double solenoid) Pressure center Exhaust center Series Closed center C3 C4 C8 C6 Dual 3 port valve (3.2) (4) (8) (6) Single SQ130 Metal seal SQ131 Rubber seal SQ230 Metal seal SQ231 Rubber seal 3.2 (0.18) 4.5 (0.25) 11.7 (0.65) 14.8 (0.82) 18

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

R E E B A H 2-P Port size 2-P A 2-M Thread depth N B H Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G1/2 E B A H D 2-P Port size (S) 2-M Thread depth N L K (mm) Electrical entry P Port size Model Grommet: G Conduit: C Conduit terminal: T M L K H F E D C B N A U S R Q R Q R Q M4 12.8 14 28 12.5 6.5 31 64 28 4.5 13.5 83 66 50 99 50 44 59 22 1/8 VCB21 M4 12.8 18

Vacuum Pump, HP 1/2 hp, Displacement 1.2 cfm, End Vacuum 0.05 torr, NPT Inlet 3/8 in, Voltage 115, Amps AC 3, Overall Length 18 in, Overall Height 18 in, Overall Width 9 in, 60 Hz, 1 Phase, Weight 50 lb, Max. dBA 55, Application For Schlenk Line Drying Manifolds, Vacuum Ovens, Freeze Dryers Up to 6L, Centrifugal Concentrators

Flow Sensor Series PFMV

Settable range: 0.7 to 5.10 V Minimum unit setting: 0.01 V When using one-touch fitting, KJL04-M5 34.4 mm 10 mm Series PFMV3 Mass: 10 g Mass: 10 g Connectors Easy connection and removal of wiring 18 mm Power supply / Output connector Flexible cable Measurement flow range (l/min) Model PFMV505 PFMV510 PFMV530 PFMV505F PFMV510F PFMV530F 0 to 0.5 0 to 1 0 to 3 0.5 to 0.5 e-con connector Sensor

Air Suction Filter

Model Symbol Port size A B ZFA100 1/8 18 ZFA200 1/4 20 28 -8- 2) Manifold Model Symbol Port size A B ZFA100 1/8 19 18 ZFA200 1/4 24 28 Model Symbol Single unit Note) Number of manifold stations 2 3 4 5 6 7 8 9 10 L1 38 56 74 92 110 128 146 164 182 200 ZFA100 L2 50 68 86 104 122 140 158 176 194 212 L1 48 76 104 132 160 188 216 244 272 300 ZFA200 L2 60 88 116 144 172 200 228 256 284 312 Note

Vacuum Pad with Ejector

Repair 16 10.1 Maintenance and Repair Precautions 16 10.2 Pad replacement 17 10.3 Ejector assembly replacement 18 10.4 Silencer assembly replacement 19 10.5 Supply (P) port one-touch fitting replacement 19 10.6 Ejector Body Assembly, Blanking Plate Assembly, Check Valve Replacement 20 11. Specification 22 12. Circuit examples 24 13.

OML0002-C

Outline Dimensions 18 7. Maintenance 7-1. Precautions for maintenance 19 7-2. How to maintain electrode needle 20 2 - 1. Safety instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

LZ-OM003xx

L[]ZB[]5 M10 x 1.25 [24.5Nm] L[]ZB[]3 M6 x 1.0 [5.2Nm] Caution 46 Mounting to workpiece Fem ale thread type Male thread type D o Mount the trunnion pin and the shaded part of the (1) (2) Rod nut Motor nut Auto switch mount range L[]ZB[]5 53 77 10e9 11 33 27.5 Tightening torque L[]ZB[]3:13 15Nm/L[]ZB[]5:20 22Nm Tightening torque L[]ZB[]3:18 20Nm/L[]ZB[]5:24 26Nm Incorrect mounting could lead

AIR FILTER

Applicable tube O.D. 10 NPT3/8" 18 Note 2 Note 2 Option Semi-standard Semi-standard Semi-standard 2 Port thread Part no. Port thread Part no. Rc Rc G G NPT AD48N(-Z)-A NPT AD48N-2(Z)-A AD48-A AD48-2-A Semi-standard 6 External appearance drawing and part no. B B B Port thread Part no. Rc G NPT AD48N-6(Z)-A AD48-6-A Applicable tube O.D.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Slider Type LEKFS Series With a 4-row circular arc on each side for high rigidity and high precision (zero clearance) MImproved moment resistance Improved Dynamic Allowable Moment 4-row circular arc Steel ball rotation center Work load [kg] (Overhang: 300 mm) Size Moment direction High rigidity guide LEKFS LEFS Rail guide (Rolling contact surface) 7.5 (10% increase) 6.8 25 Pitching (Mep) 32 18

240

Entry on the right side) Motor cable mounting direction: Nil (Top entry) Rod operating range Note 1) 2 x M5 x 0.8 thread depth 9 [1] 1 20 Motor cable length 300 2 x 5 Origin Note 2) Stroke end [Origin] Note 3) 20 [Stroke end] M5 x 0.8 thread depth 9 Manual override screw 21 42 28 12 Note 5) 28 Motor cable mounting direction: L (Entry on the left side) A 7 12 Stroke L2 L1 Mounting surface 18

Electromagnetic Digital Flow Switch

Use caution so that the electrical entry for the lead wire and M12 connector does not rotate and is limited to only one direction. 18 LFE Series Specific Product Precautions 2 Be sure to read this before handling the products. Refer to the back cover for safety instructions.

LMU100/200 Series Mist Spray Unit

1 Filler seal 6 81021-8 1 Level gauge 7 Hard glass 81021-9 1 Type C retaining ring for hole 8 Stainless steel FG00193 1 O-ring 9 FKM KA00622 2 Pressure gauge 10 G46-10-01 1 Pressure gauge 11 G46-4-01-L 1 Pilot valve 12 81022P 1 O-ring 13 NBR KA00078 1 O-ring 14 FKM KA00099 2 Regulator 15 INA-13-717 1 VO307KG1-X328 1 2 5 1 2 5 VO315-00 G Solenoid valve 16 1 Solenoid valve 17 1 O-ring 18

Fluoropolymer Piping Equipment

Body Needle V seal Lock nut Adjustment handle Insert bushing Nut Collar A 1 2 3 4 5 6 7 8 PFA PCTFE PTFE PVDF PVDF PFA PFA PFA Body class 2 y u y u B Dimensions A (B) (max.S) D H Port A 2 x G SMC (J) SMC C E F K Port B E A B C D E F G H J K S Model 48 60 72 LVN20 LVN30 LVN40 24 30 36 12 18 22 88 110 124 34.5 43 52 6 9 11 4 5 6 14 25 25 20 26 33 18 24 30 2.4 7.5 8.0 940 LQ1/LQ3/LVN/LQHB Series

Centering Unit

M5 7 MACM6 X114 118 125 125 97 113 33.8 53 28 33.3 30 43 X115 59 6 98 60 X116 57 4 60 MACM10 X114 185 197 198 11 152 182 18 53.8 77 31 24 13 0 53.3 50 70 X115 83 6 108 X116 81 4 5 Centering Unit MACM Series Dimensions P: Port side photo sensor mounted type B: Port back side photo sensor mounted type Mounted example of EE-SX671 made by OMRON P: Port side photo sensor mounted type 4 19

06-mgzr-e

6 17 Rod seal A MGZ25-PS Rod seal B 17, 18, 19 and 20 are non-replaceable parts, so they are not included in the seal kit. MGZ32-PS Piston seal 18 MGZ40-PS Set of left nos. !6, @1 NBR Piston gasket 19 MGZ50-PS MGZ63-PS MGZ80-PS Tube rod gasket 20 @1 Cylinder tube gasket Seal kits consist of items !

06-rec-e

When re-tightening, tighten approximately 2 degrees more than the original position. 16, 18 and 22 are non-replaceable parts, so they are not included in the seal kit. 174

08-cg1-e

Refer to page 18. 3. Please note that disassembly by the spring reaction force, because it may cover will pop up. When disassembling cylinders, grip the double flat part of either the head cover or the rod cover with a vise and loosen the other side with a wrench or a monkey wrench, etc., and then remove the cover.

Booster Relay Series IL100

Preparation Equipment Industrial Filters Piping Materials Dimensions IL201 14.5 Panel fitting dimension Panel 35 58 45 Max. 4 2 x 6.6 2 10 62 21 5 105 2 52 OUT SIG IN OUT SIG 3 x Rc1/4 60 IL211 14.5 Panel fitting dimension 58 45 Panel 35 Max. 4 2 x 6.6 2 52 10 137 62 31 21 5 SIG OUT IN1 OUT1 SIG 2 IN2 OUT2 OUT 5 x Rc1/4 60 IL220 14.5 Panel fitting dimension 2 x 6.6 45 58 Panel 35 Max. 4 2 18

Lock-Up Valve IL201/211/220 Series

211/220 Series Dimensions IL201 14.5 Panel fitting dimension Panel 35 58 45 Max. 4 2 x 6.6 2 10 62 21 5 105 2 52 OUT SIG IN OUT SIG 3 x Rc1/4 60 IL211 Panel fitting dimension 14.5 IP 58 45 Panel 35 Max. 4 IW 2 x 6.6 2 52 10 1301 AW 137 62 31 21 5 IL1 SIG OUT IN1 OUT1 SIG 2 IL2 IL2 IN2 OUT2 IT OUT 5 x Rc1/4 CP 60 IS IL220 VFN 14.5 INT Panel fitting dimension 2 x 6.6 45 58 Panel 35 Max. 4 2 18