Stations: 05, System, Port Combinations: Vacuum Pump System, Common PV: ø5/16", Common PS: ø1/4", Inch Size, Exhaust: 2 [Vacuum Pump System, w/o Silencer; (Ejector System has Individual Exhaust Port)], Wiring: D-sub Connector, 25 Pins, Option: None, Manifold Assembly, Delivery Condition: Delivered as Individual Parts, not Assembled

Tank Capacity: 05 (5 L), Material: A (Carbon Steel, SS400)

External Stopper: U (External Stopper), Size: 05, Rotation Angle: 90°

External Stopper: B (Basic Style), Size: 05, Rotation Angle: 90°

External Stopper: U (External Stopper), Size: 05, Rotation Angle: 180°

External Stopper: B (Basic Style), Size: 05, Rotation Angle: 100°

External Stopper: B (Basic Style), Size: 05, Rotation Angle: 190°

External Stopper: B (Basic Style), Size: 05, Rotation Angle: 180°

Body Style: Single Type, Applicable Tube OD: 05 (3/16)

Tank Capacity: 05 (5 L), Material: A (Carbon Steel, SS400)

Style: 05 (Straight Plunger), Model: C (Common in VFM/VZM)

Mounting: C (Single Clevis), Applicable Bore: 05 (for 50mm Bore)

Type: I (Single), Applicable Bore: 05 (for 50, 63mm Bore)

Type: Y (Double), Applicable Bore: 05 (for 50, 63mm Bore)

Body Size: 100 (M5 Basis), Applicable Tubing: 05 (3/16")

Body Size: 100 (M5 Basis), Applicable Tubing: 05 (3/16")

Bracket Type: C (Single Clevis), Applicable Bore Size: 05 (50mm)

Manifold Type: Base Mounted, Stations: 05, Port Size: ø4 Cassette

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: DB (EtherCAT - 16 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 05 Stations, P, E Port Location: D (D Side), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: C4 (ø4 One-touch Fitting), Mounting: A (DIN Rail Mounting, Name Plate, w/Station Number

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: DB (EtherCAT - 16 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 05 Stations, P, E Port Location: D (D Side), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: C4 (ø4 One-touch Fitting), Mounting: BA (Direct Mounting, Name Plate, w/o Station