PSE530

0.15 mm2, Insulator O.D.: 0.8 mm Sensor cable/Option Compliant with CE marking Standards Piping Specifications Model M5 M5 x 0.8 male thread R06 R07 1/4 inch reducer type Port size 6 reducer type Pressure sensor: Silicon, O-ring: NBR Wetted parts material Body: Stainless steel 304 Body: PBT 41 g 38 g With sensor cable (3 m) Without sensor cable Mass 7 g 3.8 g 829

Silencer Compact Resin Type/Male Thread Series AN05 to 40

reduction 41 to 140F (5 to 60C) Note 3) Ambient and fluid temperature Note 1) It indicates the inlet pressure for solenoid valve.

Thermo-chiller

(0.45 MPa) 45 (0.45 MPa) 10 (0.45 MPa) 125 (0.45 MPa) 10 (0.45 MPa) Maximum ow rate [L/min] 120 16 130 16 180 16 Maximum pump head [m] 50 49 55 49 68 49 Settable pressure range5 [MPa] 0.10 to 0.50 0.10 to 0.49 0.10 to 0.55 0.10 to 0.49 0.10 to 0.68 0.10 to 0.49 Minimum operating ow rate6 [L/min] 20 2 25 2 40 2 Tank capacity [L] 42 7 42 7 60 7 Bypass circuit (With valve) Installed Electric

Exhaust Cleaner for Clean Rooms AMP Series

8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

Large Capacity Compressed Air Filters Series AFW

Temperature 45.30 38.30 8-5/8 2 18 215 AFW1400-N30FGM-E* 1,400 48.20 38.40 10.80 3 18 326 4 AFW2100-N40FGM-E* 2,100 50.30 39.30 12.80 4 20 439 AFW2800-N60FGM-E* 2,800 6 50.30 39.30 12.80 5 20 439 AFW3500-N60FGM-E* 3,500 54.30 40.40 14 6 20 536 AFW4200-N60FGM-E* 4,200 E D EL-AFW700-E* 55.10 40.60 16 8 24 647 AFW5600-N80FGM-E* 5,600 232 psi 32 8 250F 58.10 40.60 18 10 28 778 AFW7000-N80FGM-E

Inch size Rotary One-touch Fittings Standard Type KS Series Applicable Tubing: Inch Size

(inch) Connection thread UNF NPT Min. port size Weight (g) A D1 D2 L M Model Applicable tubing Nylon Urethane KSH03-34S KSH03-32 9 14 17 23 23 29 55 63 8 10-32 UNF 36.5 37.6 38.6 42 43.1 46.5 53.5 53.9 33 34.5 35.5 36.5 40 41 48 48.5 16 2.5 5 32 10.4 4.0 4.0 12 1 8 12.7 KSH07-34S 14.29 17 1 8 1 4 13.4 10.4 4 13.2 1 4 14 KSH07-35S KSH09-34S KSH09-35S KSH11-35S KSH11-36S 1 8 18.5

Speed Controller: Standard Type In-line Type AS Series

Valve Spring Seal NBR, Stainless steel 9 10 11 14143 14144 14147 Stainless steel NBR 652 AS Series Speed Controller: Standard Type In-line Type Dimensions: AS1000-M3 Dimensions: AS1000-M5 2 x 3.1 35 (Max. 41) 19 (Max. 21) AS-F 2 x 2.1 TMH ASD 27.5 Note 1) Male M5 x 0.8 Female M5 x 0.8 M3 x 0.5 M3 x 0.5 AS AS Reference dimensions Reference dimensions Note 1) Dimension for AS1000-M5-N AS-FE

Stations: 03, P, R Port Thread: 00N (NPT)

Stations: 04, A, B Port Size: C8 (One-touch fitting for ø8)

Stations: 04, A, B Port Size: One-touch fitting for ø8

Stations: 03, P, R Port Thread: NPT

XL-OMV0002

29 10.5 XLC-63 88 209 100 39 11 87 95 70 76.5 36 9 XLC-80 90 250 117 45.5 11 114 110 83 105 44 9 XLC-100 108 317.5 154 55 11 134 130 102 139 58 9 XLC-160 138 339 200 65 11 190 180 153 124 62 12.5 10 XL-OMV0002 5. 200 1680 100 100,160[ ]18 12 Assy O XLC-16,XLC-25,XLC-40,XLC-50,XLC-63,XLC-8 200 XLC-100,XLC-160 100 FKM 110 Pa 11 XL-OMV0002 . 6-1. 1 1 Assy Assy Assy 12 XL-OMV0002 6-2. 1

Pressure Sensor

There will be a drift on the analog output of approximate 1% immediately after the power supply is turned on, within 10 minutes. Maintenance Turn off the power supply, stop the supplied air, exhaust the residual pressure and verify the release of air before performing maintenance. There is a risk of unexpected malfunction. Perform regular maintenance and inspections.

SRP

mounting hole 40 8.5 20 28 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 41 1.6 Port size A B IN OUT Model Port size D C B A 30 30 23.5 14 M5 x 0.8 SRP111-M5 40 40 22.5 15 Rc 1/8 SRP111-01 C D 3 Series SRP Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

SRP

mounting hole 40 8.5 20 28 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 41 1.6 Port size A B IN OUT Model Port size D C B A 30 30 23.5 14 M5 x 0.8 SRP111-M5 40 40 22.5 15 Rc 1/8 SRP111-01 C D 3 Series SRP Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

0.02 35 or less1050/20Ball screw + Belt (Motor parallel)Sliding bearing (LEYGlM), Ball bushing bearing (LEYGlL)41 to 104F (5 to 40C)90 RH or less (No condenstation)l2830Servo motor (24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%404 (Horizontal)/6 (Vertical)590.33 (0.15) (Screw mounting), 0.37 (0.17) (DIN rail mounting)Non-magnetizing operation type4.53.624 VDC ?10%

0.021050/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l2830Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%404 (Horizontal)/6 (Vertical)590.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type4.5 (20)3.624 VDC ?10%

0.021050/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l2830Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%404 (Horizontal)/6 (Vertical)590.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type4.5 (20)3.624 VDC ?10%

0.021050/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l2830Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%404 (Horizontal)/6 (Vertical)590.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type4.5 (20)3.624 VDC ?10%

0.021050/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l2830Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%404 (Horizontal)/6 (Vertical)590.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type4.5 (20)3.624 VDC ?10%