Series AC Epoxy Coated F.R.L. Applicable Body Size All All 31, 41 31, 41 Symbol Nil B* C D Port Size 1/4 3/8 1/2 *Note: Bracket is not assembled and is supplied loose at time of shipment.
TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d CYP C H B H 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2 30 37 47.3 d M6 x 1.0
26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 50 55 to 1200 M18 x 1.5 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 63 69 to 1200 M18 x 1.5 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 80 80 to 1400 M22 x 1.5 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71 13 89 M10 x 1.5 depth 22 10 22 7 100 100 to 1500 M26 x 1.5 40 37 41
A A1 L1 NX MM NDH10 R1 U1 A A1 L L1 NX MM NDH10 NZ R1 U1 + 0.4 + 0.2 0.2 0.4 8 + 0.058 0 + 0.058 0 + 0.058 0 + 0.070 0 + 0.070 0 + 0.084 0 + 0.058 0 + 0.058 0 I-G02SUS Y-G02SUS 20 20 16 8 8 8 34 8.5 25 M8 x 1.25 10.3 11.5 34 8.5 16 21 25 M8 x 1.25 16 10.3 11.5 IY-G02SUS + 0.4 + 0.2 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 I-G03SUS Y-G03SUS 25, 32 25, 32 20 10 10 10 10 41 10.5 30 M10 x 1.25
Mass Unit: g Auto Switch Internal Circuit D-M9NA(V) D-M9NA(V) 8 D-M9PA(V) 8 D-M9BA(V) 7 Auto switch model 0.5 DC (+) Brown 14 14 13 1 Lead wire length (m) Switch main circuit Switch main circuit Switch main circuit OUT Black 41 41 38 3 68 68 63 5 Dimensions Unit: mm DC () Blue D-M9A M2.5 x 4 l D-M9PA(V) Slotted set screw Indicator light DC (+) Brown SMC 4 OUT Black 2.8 2.7 24 0.2 3 3.2 DC
flange) (mm) Model A 75.8 102.5 119 B 48 66 79 C 1 2 2 D 23.5 38 53 E 40 55 75 Fn 26 41 52 G 40.5 57 70 H 21.5 30 35 J XYH-25 XYH-40 XYH-50 100.2 130 178 494 XMH, XYH Series Glossary 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less outgassing.
Form w 1 Material e Vacuum inlet r Mounting Bracket Assembly Flat, Ball Joint Type Thin Flat Type with Ribs Deep Type Connection M5 x 0.8 thread B 10 B5 41 25 2.5 M5 x 0.8 5 16 42 26 25 48 30 3.5 10 N S U F GN GS N4 N6 U4 U6 41 25 2.5 M6 x 1 6 16 42 26 25 48 30 3.5 40 57 39 6 25 B8 48 30 3.5 M8 x 1.25 8 40 57 39 6 ZP Y D C2 B6 Construction p. 117 Adapter Assembly p. 123 Dimensions Per Vacuum
A A1 L1 NX MM NDH10 R1 U1 A A1 L L1 NX MM NDH10 NZ R1 U1 + 0.4 + 0.2 0.2 0.4 8 + 0.058 0 + 0.058 0 + 0.058 0 + 0.070 0 + 0.070 0 + 0.084 0 + 0.058 0 + 0.058 0 20 I-G02SUS Y-G02SUS 20 16 8 8 8 34 8.5 25 M8 x 1.25 10.3 11.5 34 8.5 16 21 25 M8 x 1.25 16 10.3 11.5 IY-G02SUS + 0.4 + 0.2 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 I-G03SUS Y-G03SUS 25, 32 25, 32 20 10 10 10 10 41 10.5 30 M10 x 1.25
Consumable parts 3-3-1 Replacement parts 20 25 32 40 Seal kit number CG1N20Z-PS CG1N25Z-PS CG1N32Z-PS CG1N40Z-PS Grease pack (Accessory) GR-S-010(10g) Rod seal Piston seal Contents of the Tube gasket seal kit Grease pack (10g) 1pc. of each 20 25 32 40 Wear ring CM-020-07-301B CM-025-07-302B CM-032-07-304B C1A040-07-305B Grease pack part number: GR-S-010(10g) GR-S-020 (20g) C a u t i o n
Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 07 (One-touch Fitting ø1/4"), VAC: 07 (One-touch Fitting ø1/4"), EXH: 07 (One-touch Fitting ø1/4"), Accessories: NS (w/o Standard Bracket, w/Silencer)
Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 07 (One-touch Fitting ø1/4"), VAC: 07 (One-touch Fitting ø1/4"), EXH: 07 (One-touch Fitting ø1/4"), Accessories: S (w/Standard Bracket, w/Silencer)
Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: S (-90 kPa), SUP: 07 (One-touch Fitting ø1/4"), VAC: 07 (One-touch Fitting ø1/4"), EXH: 07 (One-touch Fitting ø1/4"), Accessories: NS (w/o Standard Bracket, w/Silencer)
Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: S (-90 kPa), SUP: 07 (One-touch Fitting ø1/4"), VAC: 07 (One-touch Fitting ø1/4"), EXH: 07 (One-touch Fitting ø1/4")
Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 07 (One-touch Fitting ø1/4"), VAC: 07 (One-touch Fitting ø1/4"), EXH: 07 (One-touch Fitting ø1/4")
Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: S (-90 kPa), SUP: 07 (One-touch Fitting ø1/4"), VAC: 07 (One-touch Fitting ø1/4"), EXH: 07 (One-touch Fitting ø1/4"), Accessories: S (w/Standard Bracket, w/Silencer)
Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: S (-90 kPa), SUP: 07 (One-touch Fitting ø1/4"), VAC: 07 (One-touch Fitting ø1/4"), EXH: 07 (One-touch Fitting ø1/4"), Accessories: N (w/o Bracket, w/o Silencer)
Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 07 (One-touch Fitting ø1/4"), VAC: 07 (One-touch Fitting ø1/4"), EXH: 07 (One-touch Fitting ø1/4"), Accessories: N (w/o Bracket, w/o Silencer)
) 03 (3, 1/8"), 04 (4), 06 (6), 07 (1/4") only Table 1 Tubing Size Symbol Metric size Inch size Tubing O.D. 3 03 4 04 6 06 8 08 10 10 12 12 19 19 25 25 1/8" 03 1/4" 07 3/8" 11 1/2" 13 3/4" 19 1" 25 Symbol Note 1) GPS GB GB GPS Fitting type Note 1) Sizes with the same symbol number and 06 and 07 are common sizes. 6 c Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN
(Refer to page 40, 41) Standby OFF delay 0 to 9s 0s Common Sensor Sets enabling/disabling of automatic isolation. (Refer to page 40, 41) Auto isolation Enable/Disable Disable Common Isolation delay Sets isolation delay. (Refer to page 40, 41) 0 to 9s 3600s Common Sets whether it is necessary to input the security code or not.
Loosen the hexagon nut 41 of right cover 34 to remove the seal washer 40 and hexagon nut with the hexagon socket set screw 37 from the angle adjustment collar 39 . 17 15 10 3 14 11 5 12 19 9 14 12 1 4 11 6 34 35 37 40 41 15 39 45 - Assembly procedure 1. Apply the grease provided in the seal kit to parts shown in Table (20). Table (20) Parts where grease is to be applied 2.