SMC Corporation of America
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Pipe thread type Nil Rc F G (with Rc-G conversion tting) N NPT (with Rc-NPT conversion tting) Power supply 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) 40 3-phase 380 to 415 VAC (50/60 Hz) Specications Model HRS090-Al-20-l HRS090-Al-40-l Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge kg 1.15 Control method PID control Ambient temperature1 C

REC20-PS REC25-PS REC32-PS REC40-PS 20 25 32 40 REC20-PS REC25-PS REC32-PS REC40-PS !5 16 !7 18 !9 @0 @1 22 @3 Cylinder tube gasket NBR 2 Set of left nos. !5, !7, !9, @0, @1, @3 Hexagon socket head set screw Carbon steel 1 Nickel plated Rod seal A NBR 1 Rod seal B NBR 1 Seal kit includes a grease pack (10 g). Order with the following part number when only the grease pack is needed.

Approx. 18 to 23mm. IDF60-30 IDF70-30 IDF80-30 IDF90-30 16AWG (1.25mm2) 14AWG (2mm2) Cable O.D. Approx. 9 to 11mm. Cable O.D. Approx. 18 to 23mm. Power supply Connect the power cable and grounding cable to the terminal block. Use round crimp terminal for connection terminal.

Square Embedded Type Pressure Gauge Replacement 18 10-4. Right Angle Square Type Pressure Gauge Replacement 19 10-5. Plug (with O-ring) Replacement 20 10-6. Plug Assembly Replacement 21 11. Disassembly Drawing 22-23 12. Dimensions 24 -1- Common Supply Regulator Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Setting of the wireless unit system . 18 3.1 Flow of setting operation . 18 3.2 Reading and obtaining device information . 19 3.2.1 Entry of individual identification (Edit TAG) . 20 3.3 Remote setting . 21 3.4 Base setting . 23 3.5 Pairing . 29 3.5.1 Pairing procedure . 30 3.6 Dummy Remote . 35 3.7 Software Control . 36 3.8 Using a setting file . 38 3.9 Reading of factory data . 42 3.10

900 1000 1200 12.5 11.7 10.9 10.1 9.3 8.5 7.7 6.9 6.1 5.3 Aluminum alloy frame Ball screw Stainless steel frame 19.6 18.3 17.1 15.8 14.5 13.3 12.0 10.8 9.6 8.3 Horizontal specification kg Weight 13.8 12.9 12.0 11.1 10.2 9.4 8.5 7.6 6.7 5.8 Aluminum alloy frame 15.9 Slide screw Stainless steel frame 21.6 20.1 18.8 17.4 16.0 14.6 13.2 11.9 10.5 9.1 24.9 C Operating temperature range 5 to 40

Settable range: 0.7 to 5.10 V Minimum unit setting: 0.01 V When using one-touch fitting, KJL04-M5 34.4 mm 10 mm Series PFMV3 Mass: 10 g Mass: 10 g Connectors Easy connection and removal of wiring 18 mm Power supply / Output connector Flexible cable Measurement flow range (l/min) Model PFMV505 PFMV510 PFMV530 PFMV505F PFMV510F PFMV530F 0 to 0.5 0 to 1 0 to 3 0.5 to 0.5 e-con connector Sensor

0.05 MPa 20 0 Pilot valve 3 0.5 1 1.5 2 2.5 3 Regulator for tank pressure setting 1 Lubrication plug 14 Number of oil needle rotations (turns) Pressure gauge for tank pressure 15 Air flow rate (Representative Value) Oil filler strainer Oil level gauge Strainer 7 Fixed orifice 5 60 0.2 MPa Air flow rate L/min(ANR) 50 LMU2000.15 MPa 40 0.1 MPa ON/OFF valve for oil mist 4 30 Air adjusting needle

X116 54 4 40 6.6 12 19 17 18 M5 7 MACM6 X114 118 125 125 97 113 33.8 53 28 33.3 30 43 X115 59 6 98 60 X116 57 4 60 MACM10 X114 185 197 198 11 152 182 18 53.8 77 31 24 13 0 53.3 50 70 X115 83 6 108 X116 81 4 5 Centering Unit MACM Series Dimensions P: Port side photo sensor mounted type B: Port back side photo sensor mounted type Mounted example of EE-SX671 made by OMRON P: Port side photo

REC20-PS REC25-PS REC32-PS REC40-PS 20 25 32 40 REC20-PS REC25-PS REC32-PS REC40-PS !5 16 !7 18 !9 @0 @1 22 @3 Cylinder tube gasket NBR 2 Set of left nos. !5, !7, !9, @0, @1, @3 Hexagon socket head set screw Carbon steel 1 Nickel plated Rod seal A NBR 1 Rod seal B NBR 1 Seal kit includes a grease pack (10 g). Order with the following part number when only the grease pack is needed.

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series.

76.8 18.8 1/4 17 24.2 53.5 48.5 47.5 42.5 8 15 29.4 38.3 17.9 80.3 20.9 10 18 31.9 41.4 19 93.6 23 8 15 31.1 41.7 21.2 117.0 20.9 3/8 19 26.5 58.7 53.7 52.7 47.7 10 18 33.6 44.2 21.2 124.9 23 12 20.8 35.4 46.3 21.8 137.8 24.8 1/2 24 30 65.9 58.4 54.3 46.8 12 20.8 37.6 50.5 25.8 186.8 24.8 Note) Reference thread dimensions after installation. 4

No.PS-OMH0006-F PRODUCT NAME Multi Channel Pressure Sensor Controller MODEL / Series / Product Number PSE200 Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product parts 9 Definition and terminology 10 Mounting and Installation 13 Installation 13 Wiring 15 Internal circuit and wiring example 17 Setting of Function 18 Pressure Setting 22 Setting of Special

No.PS-OMU0012-C PRODUCT NAME Sensor Monitor MODEL / Series / Product Number PSE3#0AC Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product parts 9 Definition and terminology 10 Mounting and Installation 13 Installation 13 Wiring 14 Pressure Setting 16 Outline of Settings 17 Initial Setting 18 3 Step Setting Mode 21 Simple Setting Mode 23 Function Selection

MHF2-8D MHF2-12D MHF2-16D MHF2-20D mm 8 12 16 20 MPa 0.150.7 0.10.7 oC -1060 mm 1) 0.05 120 c.p.m. 120 60 2) 1 N 19 48 90 141 8 12 16 20 () mm 16 24 32 40 32 48 64 80 65 155 350 645 85 190 445 850 3) g 120 275 650 1,225 1) 0.15mm 2) 0.5MPaL=20mm 3) 4 2 2-1 1. ( ) 2. 3. 4. 2-2. 1. 2. (1) (2) (3) 5 3. 4. 5. 6. (1) (2) ,2 , 7.

Functions . 14 3.1 Easy mode . 14 (1)Functions in easy mode . 14 (2)Tree structure of easy mode . 15 3.2 Normal mode . 16 (1) Functions in normal mode . 16 (2)Tree structure of easy mode . 18 4. System Structure . 19 5.

Cable colour: Signal Cable O.D. 6.6 mm 1 Brown: 24 VDC (For solenoid valve) Nominal cross section AWG22 2 White : 0 V (For solenoid valve) 3 Blue : 24 VDC (For control) Wire diameter (Including insulator) 1.65 mm 4 Black : 0 V (For control) 5 Gray : Not connected Min. bending radius (Fixed) 40 mm (2) Cable with power supply connector (SPEEDCON) Part number: PCA-140180 7 Cable length (L) 7

For details of each setting, refer to page 17 to 18 of this manual. Please refer to the PLC manufacturer's manual etc. for details of programming and addresses. For the PLC protocol and programming refer to the relevant manufacturer's documentation.

Construction / Parts list, seal list Double acting/ Finger open Single acting / Normal open Single acting / Normal close Double acting / Finger close 5 4 12 7 1 9 10 8 16 15 14 3 2 21 11 18 19 13 20 6 17 Components No. Description Material Remarks Components 12 Needle roller High carbon chromium No.