For further details, refer to mounting positions under Replacement heaters/Part Nos. on page 46.
.' 80 46 .5 55 46.5 52.5 ; 100 55 62 55 59.5 Reed Type With Conduit Auto Switch Mounting Position And Height (mm) ~ Bore Size Il-A44 J (mm) A B H.
Grease pack part number: GR-S010 (10 g), GR-S-020 (20 g) 46 ISO Standards Air Cylinder: Standard Type Double Acting with End of Stroke Cushioning Series CP96 Dimensions Bore size Stroke Basic: CP96S(D)B Series C85 Series CP96 Series C96 Series C55 PL 2 x EE PL SW KK B WB WA B D R E Cushion valve 8 x RT L9 VD BG L2 L12 R E VA G WH A H L8 + Stroke ZZ + Stroke G With rod boot e d l f h h + L8
CAUTION 184 49 Valve seat side (XGT222, 223, and 224 common) Cassette type Full MESK/XGT224 305 50 85 36 (mm) A B C D Valve type Model XGT221-32 XGT221-46236 XGT222-32 XGT222-46236 XGT223-46236 XGT224-46236 222 32 235 45 Non-cassette type 236 46 249 59 222 32 Cassette type Standard 236 46 236 46 Cassette type Half MESK !
9 H M18 x 1.5 10 H Width across flats 16 45 Width across flats 16 Width across flats 37 28 4 x M4 x 0.7 Width across flats 24 3 x M3 x 0.5 G G 10 10 F F E E Y Y 3 3 18 34 C C A A B D B D Dimensions (mm) Dimensions (mm) A B C D E F G H Y A B C D E F G H Y Model Model ZPT40HBJ25-01-A18 ZPT63HBJ25-01-A18 72 127.5 83 138.5 50-01-A18 50-01-A18 107 162.5 118 173.5 40 41 28 43 20.5 32 13 63 65 46
F G H MB J K MM N P S V W ZZ C B flats 19.5 27 32 32 37 37 32 40 50 63 80 100 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 13 14 15.5 16.5 19 19 47 51 58 58 72 72 4 4 5 5 5 5 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6 7 7 10 10 M10 x 1.25 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9 135 139 156 156 190 190 46
Work load [kg] Size Model LEY25 LEC-MR-RB-032 LEY32 LEC-MR-RB-032 LEY63 LEC-MR-RB-12 Lead 6: LEY25B 20 16 Lead 12: LEY25A 10 8 0 0 200 400 600 800 1000 1200 Speed [mm/s] LEY32 (Motor mounting position: Top/Parallel) LEY32D (Motor mounting position: In-line) 50 60 Lead 4: LEY32DC Lead 5: LEY32C 50 40 46 Area where the regeneration option is required. 37 Area where the regeneration option is
Standard Products IDFAE Series Air flow capacity (m3/h [ANR]) Outlet air pressure dew point Rated inlet condition Page Model Refrigerant Port size 3C 7C 10C IDFA3E 12 15 17 Rc 3/8 IDFA4E 24 31 34 Rc 1/2 IDFA6E 36 46 50 P. 92 to 94 R134a (HFC) IDFA8E 65 83 91 Rc 3/4 IDFA11E 80 101 112 35C 0.7 MPa IDFA15E1 120 152 168 Rc 1 IDFA22E 182 231 254 R 1 IDFA37E R 11/2 273 347 382 P. 95 to 97 R407C
F G H MB J K MM N P S V W ZZ C B flats 19.5 27 32 32 37 37 32 40 50 63 80 100 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 13 14 15.5 16.5 19 19 47 51 58 58 72 72 4 4 5 5 5 5 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6 7 7 10 10 M10 x 1.25 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9 135 139 156 156 190 190 46
Hs 46 50 56 Approx. Ht 26 26 26 16
Series CLK1 Auto Switch Specifications Lead wire colors inside [ ] are those prior to conformity with IEC standards. Contact Protection Boxes/CD-P11, CD-P12 Auto Switch Internal Circuits Reed switches
22 8.6 14 1/4 47 40 130 60 146 110 130 50 M10 x 1.5 14 28 39 39 58 22 8.6 14 1/4 55 50 130 70 158 124 142 63 M10 x 1.5 9 M10 x 1.5 WA WB Bore size (mm) VB X XA XB XC XL YY YL Z st25 25
Servo amplifier Driver Controller (Note 6) CN1 (Note 6) (Note 2) 21 DICOM 24VDC (Note 4) CN1 Trouble (Note 5) 20 46 DICOM 48 ALM RA1 Zero speed detection DOCOM 23 ZSP (Note 3) Emergency stop Servo-on Reset Speed selection 1 Speed selection 2 EMG SON RES 42 15 19 (Note RA2 Limiting speed 25 VLC RA3 Ready (Note 10) 49 RD SP1 SP2 41 16 RA4 10m max.
-46- (2) Trigger Trigger is a condition which decides the display timing of the graph. If trigger conditions are not satisfied, waveform will not be displayed. Click of [Data] to set the condition. (In general, set the Motor speed.) (3) Level / Condition / Position are displayed. Click of Level / Condition to set the condition.
Operation . 44 11.1 Return to origin position . 44 11.2 Positioning operation . 46 11.3.
(mm) Model Maximum suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) Weight (With bracket) (kg) ZR1-W10S ZR1-W13S ZR1-W15S ZR1-W18S ZR1-W20S 1.0 1.3 1.5 1.8 2.0 22 38 54 62 84 46 78 95 150 185 0.132 0.134 0.136 0.154 0.156 ZX ZR Model/Max. Vacuum Pressure 53 kPa (L: Large flow type) ZM Nozzle dia.
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Aw/1CB:ble l (mm) Y12A 2S*g(>P'< 10{) 32~g{ 125 8 46 M30 x 1.5 64.:U 42 boc~~ze . d 1-1 B C D 27 28~oe. 72ji Y-14A 140 8 48 105 M30 x 1.5 47 36:21 NT-12 125, 140lM30 x 1.5 18 46 53.1 44 30 NT16 160 /M36x1.5 21 55 63.5 53 M36x 1.5 32 ~~' 4072J Y-16A 110 80~J 34 46 ' 1 160 8 55 * Use a single knuckle 101n1 or a double knuckle JOint Individually.
M4 x 0.7 M4 x 0.7 11 14 6.5 3.3 8 5 26 3 19 2 5 40 30 27 3.5 6 CY1S10-Z 7.5 12 31.5 6.5 25 27 17 13.5 17 M4 x 0.7 M4 x 0.7 10.5 16.5 8 4.4 10 5 33 6 28 2.5 6 40 34 45 4.6 6 CY1S15-Z 7.5 9.5 16.6 38 6.5 28 29.5 20.5 15 20.5 M4 x 0.7 M5 x 0.8 10.5 16.5 5.4 12 2 5 6 52 39 11 60 5.8 28 40 8 CY1S20-Z M6 x 1 M6 x 1 10 9.5 21.6 44 8.5 36 37.5 24 19 20 10.5 22 5.4 16 2 5.5 8 45 16 70 28 62 5.8 46
Heater: Indicator: 5 Aluminum High Vacuum Angle Valve XLA/XLAV Series Dimensions XLA: Air operated (b) E C E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95
/Flange Rod end width across flats 10 10 21 21 46 46 Data Part no.