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Ultimate pressure P (Pa) is P=Q/S, where the sum of Weight flow rates for outgassing (Qg) and leakage Q(L) is Q(Pam3/s), and the exhaust speed is S(m3/s). The ultimate pressure is measured with Qg, Q(L)S shown as above, and the ultimate pressure of the pump itself. In the case of very low pressure, the exhaust characteristics of the actual pump can be the limiting factor.

nt [Rotation] 3 4 Number of rotation of ON adjustment needle 19% 60% 72% 71% OFF ON [] 2.6 Hz 3.0 Hz 3.5 Hz 4.4 Hz 2 5 21% 61% 70% 67% 0 2.5 Hz 3.2 Hz 3.6 Hz 4.4 Hz 0 2 4 6 8 7 Number of rotation of OFF adjustment needle 24% 58% 69% 67% ON At an inlet pressure of 0.3MPa.

circuit pressure (high pressure side) switch actuation 1 Compressor inverter parameter error 2 Reservation 3 Reservation 4 Reservation 5 Reservation 6 Reservation 7 Reservation 8 Reservation 9 Reservation Alarm given off status Alarm flag 5 0= Not occurred 1= Occurred 10 Reservation 11 Reservation 12 Reservation 13 Reservation 14 Reservation 15 Reservation HRLE Series 3.13 Register Map 3-19

TY 1st printing: SU 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015 SMC Corporation All Rights Reserved 19 XL-OMS0001-B

No.CE*-OMI0063-C / / CE1* Series 1. 16 2. 7 2-1. 7 2-2. 78 2-2-1. 7 2-2-2. 8 2-2-3. 8 2-3. 9 3. 3-1. 10 3-2. 10 3-3. 11 3-3-1. 11 3-3-2. 11 3-3-3. 11 4. 4-1. 12 4-2. 12 4-3. 12 5. 5-1. 13 5-2. 14 5-3. 14 6. 6-1. 1516 6-2. 16 CE1B12 17 CE1B20 18 CE1B32 19 CE1B40 20 CE1B50 21 CE1B63 22 CE1 Series/ 1. 1) (ISO/IEC)(JIS) 2) *1) ISO

Zuazobidea 14, 01015 Vitoria, Spain SWEDEN SMC Pneumatics Sweden AB,Ekhagsvgen 29-31, SE141 71 Segeltorp, Sweden SWITZERLAND SMC Pneumatik AG,Dorfstrasse 7, Postfach, 8484 Weisslingen, Switzerland SMC PnmatikSanayiTicaretveServis A.. GlbaharCaddesi, Aydn Plaza, No: 9 4 Gneli 34212 , Istanbul TURKEY SMC Pneumatics (U.K.) Ltd.

Although operable with lubrication, it may cause stick-slip. 12 3Maintenance 31 Notes ! Warning 1Do not enter the transfer line nor put the object. It may cause unexpected accidents. 2Do not enter your hands between finger and attachment. It may cause unexpected accidents. 3Confirm that no work is held by fingers before releasing the compressed air to remove the gripper from the line.

Aluminium alloy 36 Masking tape 10 Bearing holder Aluminium alloy 11 Socket Carbon steel Electroless nickel pated 12 Connect shaft Carbon steel Electroless nickel pated 13 Bearing 14 Reurn box Aluminium alloy Electroless nickel pated 15 Reurn plate Aluminium alloy Electroless nickel pated 16 Magnet 17 Wear ring holder Stainless Sise 25 , 150st only 18 Wear ring Resin Sise 25 , 150st only 19

No.EX-OME0004-F PRODUCT NAME Input block MODEL / Series / Product Number EX250-IE1 EX250-IE2 EX250-IE3 Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product parts 8 Mounting and Installation 9 Installation 9 Wiring 10 Internal circuit 12 Display/Setting 18 Troubleshooting 19 Specifications 20 Dimensions 21 Option 22 -1No.EX-OME0004-F Safety Instructions

Use M12-4 pin socket (female) A cord. 19 - Refer to page 15 and 16 for procedures for changing the stopper bolt and switch positions and for top cover replacement instructions. 20 - 21 - 22 - p. 23 p. 24 p. 23 p. 24 p. 25 p. 26 23 - 24 - 25 - 26 - 27 - Refer to pages 32 and 33 for the weight of clamp arms.

Troubleshooting for Cylinder Operation 16 Data: Outside dimensions of CE1B12 17 Outside dimensions of CE1B20 18 Outside dimensions of CE1B32 19 Outside dimensions of CE1B40 20 Outside dimensions of CE1B50 21 Outside dimensions of CE1B63 22 Specifications are subject to change without prior notice.

SQ1000 SQ2000 Built-in silencer direct exhaust (-S) SSQ1000-SE SSQ2000-SE * Part numbers above are for a set of ten elements. 10 No.SQ1000V-OMQ0002-B 11 No.SQ1000V-OMQ0002-B 12 No.SQ1000V-OMQ0002-B 13 No.SQ1000V-OMQ0002-B 14 No.SQ1000V-OMQ0002-B 15 No.SQ1000V-OMQ0002-B 16 No.SQ1000V-OMQ0002-B 17 No.SQ1000V-OMQ0002-B 18 No.SQ1000V-OMQ0002-B 19 No.SQ1000V-OMQ0002-B 20 No.SQ1000V-OMQ0002-B 21

31 280 308 62 100 15.5 22 111.5 240 Caution Do not use this cylinder as a stopper.

01S AKH08-02S AKH08-03S AKH10-02S AKH10-03S AKH10-04S AKH12-03S AKH12-04S 8 10 M5 x 0.8 1/8 M5 x 0.8 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 3/8 1/2 24.3 24.6 25.8 26.9 30 31.7 21.2 20.6 22.2 22.9 24 27.7 36 35.5 48.3 40.8 41.3 54 46.5 5 10 4 2.8 12.7 Applicable tubing 2.8 6.5 6.5 6.5 10 8 13.5 6 14 17 22 16 24 43 45 39 80 62 80 H M 14 8 18.5 14 42 A 17 L 54.3 47.3 49.3 60.5 54.5 17 10 24 21 22 19

6 t Zinc chromated w Electroless nickel plated Black zinc chromated Accessory Accessory IN 2 Series ARJ310 Dimensions ARJ310-01 ARJ310F-01 Approx. 31 Approx. 56 Approx. 56 Approx. 35 32 22 M12 x 1 Panel fitting dimensions 12.5/Panel thickness: 4 or less Approx. 27 19 2 2 -5.5 Approx. 57.2 8.5 Approx. 82.5 15 Applicable tube O.D. 4, 6, 5/32, 1/4 Port size Rc, NPT 1/8 2 2 1 1 Pressure gauge

01S AKH08-02S AKH08-03S AKH10-02S AKH10-03S AKH10-04S AKH12-03S AKH12-04S 8 10 M5 x 0.8 1/8 M5 x 0.8 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 3/8 1/2 24.3 24.6 25.8 26.9 30 31.7 21.2 20.6 22.2 22.9 24 27.7 36 35.5 48.3 40.8 41.3 54 46.5 5 10 Applicable tubing 2.8 4 12.7 2.8 6.5 6.5 6.5 10 8 13.5 6 H 14 17 22 16 24 43 45 39 80 62 80 M 14 8 18.5 A 14 42 17 L 54.3 47.3 49.3 60.5 54.5 17 24 10 21 22 19

Cap AXT103-4 XT021-12 XT103-5 XT010-20 XT010-21 XT041-1 Resin Resin Bushing Spring Rubber plug for wire Round head combination screw Plug for cover r t y u i o Gasket XT013-31-2 NBR NXT030-8 !

Series SV2000 for EX120 Dedicated Output Serial Wiring. 6 7 8 10 10 10 10 10 10 10 11 11 11 11 11 11 12 12 13 13 13 15 16 16 17 19 20 21 21 23 23 24 24 24 24 24 25 26 27 27 30 30 31 32 33 34 35 36 37 37 39 40 40 41 42 44 45 45 50 50 51 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

(mm) H2 Q P L W H1 Model TMA-06 TMA-08 TMA-10 TMA-12 28 21.7 172.5 31.8 25.4 151.2 35 28.1 167.3 37 19 151 17.9 20.3 24.3 26.7 18.6 18.6 22 22 11.4 12.6 15 16.2 6 12 10 8 15-6-32 1 Related Products: Tube Cutter Series TK Tube Cutter: TK-2 Possible to cut a tube up to 18 mm.

This is recommended because it can absorb off-centering, compared with direct mounting type. 6.1 16 M 5 Part name Part number P368010-24 Fork lever assembly M N P368010-25 Fork lever assembly S Resin connector (Non-explosion proof specification) L2=31 (M type: 55) 39 (M type: 63) Optional cable connectors are available for different cable sizes.