High Purity Chemical Valve

Dimensions LLAmA-mm-C Stations 4 x Mounting hole for W Y Dimensions (mm) A S K Model LLA2A LLA3A LLA4A LLA5A 11.5 L1 24 L2 L3 29 Sensor (Breathing port) U 34.5 2 x R (mm) H G Station 2 3 4 5 Model C Symbol P N L1 L2 L3 L1 L2 L3 L1 L2 L3 L1 L2 L3 62 93 124 155 E V LLA2A 75 106 137 168 Pitch = B A (OUT) port n x Q 118 149 180 211 P (IN) port 2 x Q 74 111 148 185 (Max.

LG1H

Not required. 200 L2 Mer 10 20 30 0 Transfer load m (kg) m a=1000 Half load 4000 a=2000 L3 (mm) Regeneration option model Driver type L3 a=3000 2000 A1 A2 B1 B2 Not required. Not required. Not required.

AS-FG/ASD-FG

Dimensions Metric size Inch size Model d Weight g D1 D2 L1 L2 L3 Model d Weight g D1 D2 L1 L2 L3 Max. Min. M1 Max. Min.

Compact

For vertical use, it is not necessary to consider L3 as it does not affect the moment.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

power consumption (0.5W) specification 56 Series VQ1000 VQ1000/Flat Cable Kit Stations VV5Q13J 0(D) U S Applicable connector: Flat cable connector (20P) (conforms to MIL-C-83503) L2 23.5 P = 11 13.2 L1 6.2 41 35 Indicator light 1.5 1.5 (11) 19.5 (Mounting hole dimension) Manual override 2-M4 mounting hole A B 1 0 A B 1 0 A B 1 0 A B 1 0 9 61.5 A A A A R4.5 26 62.5 97 = 4.5 (5.5) (35) (L3

VZ1000

387.5 376 11 20 423 412.5 392 15.5 L1 L2 L3 L4 3-3-93

5 Port Solenoid Valve Series SY3000/5000/7000/9000

385.5 27.1 58.6 49.1 + + + + + + L2 275 400 300 337.5 350 375 312.5 39 VQC 25.4 3/5 R 3/5 R L3 261 375 280 318 337 356 299 10 L4 12 17.5 15 15 11.5 14.5 12 VQZ One-touch fitting [1(P), 3/5(R) port] Applicable tubing O.D.: 12, 3/8" 17 18 19 16 stations 20 stations Stations SQ L1 423 498 448 460.5 485.5 L2 412.5 487.5 437.5 475 450 VFS L3 394 470 413 451 432 L4 14.5 14 17.5 17 14 VFR L plug

Manually Operated Integral Fitting Type/Threaded Type Series LVH

Dimensions LLHAStations 4 x Mounting hole for W Y K A D E L2 L1 N Non-locking type Locking type L3 G 60 (H1) (H2) C SMC SMC SMC SMC V 1/4 1/4 1/4 U 3/8 Pitch = B 2 x P port n x A port (mm) Dimensions (mm) A G D E C U Y W V N K H2 H1 B Model LLH2A LLH3A LLH4A Station 5 4 3 2 Model 10 67 19 65 19 5.5 M4 34 27 18 87 85.5 31 46.5 Symbol L1 L2 L3 L1 L2 L3 L1 L2 L3 19 76 27.5 94.5 27.5 6.5 M5 47

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

=L410.5 L5=L111.2 Dotted line: DIN rail mounting (-D) Dimensions n: Station (Max. 20) L n 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 389 759 352 722 315 685 278 648 L1 L2 L3 L4 L5 241 611 204 574 167 537 130 500 93 463 56 426 379 749 342 712 305 675 268 638 231 601 194 564 157 527 120 490 83 453 46 416 412.5 775 375 737.5 337.5 700 300 662.5 261.5 625 225 587.5 187.5 562.5 150 525

AS-FPQ/AS-FPG

However, note that only the AS221FPQ uses steel. 713 AS-FPQ/FPG Series Dimensions H (Hexagon width across flats) Applicable tubing O.D. d A L4 D1 L3 D2 M1 L1 L2 T M5 type Applicable tubing O.D. d H (Hexagon width across flats) A L4 D1 L3 D2 M1 L1 T L2 Model Weight (g) (3) Tubing O.D. d T H D1 D2 L1 L2 L3 (4) M1 L4 (1) (4) Max. Min. Max. 1 2 Min.

AS-FPQ/AS-FPG

However, note that only the AS221FPQ uses steel. 713 AS-FPQ/FPG Series Dimensions H (Hexagon width across flats) Applicable tubing O.D. d A L4 D1 L3 D2 M1 L1 L2 T M5 type Applicable tubing O.D. d H (Hexagon width across flats) A L4 D1 L3 D2 M1 L1 T L2 Model Weight (g) (3) Tubing O.D. d T H D1 D2 L1 L2 L3 (4) M1 L4 (1) (4) Max. Min. Max. 1 2 Min.

SZ3000

L n 2 5 6 7 8 9 10 4 3 Internal Pilot Manifold L Dimension n: Stations L n 2 5 6 7 8 9 10 4 3 External Pilot Manifold L Dimension n: Stations L1 L2 L3 L4 L1 L2 L3 L4 98 87.5 70 14 110.5 100 80.5 15 123 112.5 91 16 135.5 125 101.5 17 135.5 125 112 12 148 137.5 122.5 13 160.5 150 133 14 173 162.5 143.5 15 185.5 175 154 16 110.5 100 80.5 15 123 112.5 91 16 135.5 125 101.5 17 135.5 125 112 12

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

AS ASP ASN AQ ASV Dimensions AK Universal type Weight (g) T H1 H2 D1 D2 D3 L1 L2 L3 L4 L5 A M1 Max. Min. Max. Min.

Speed Controller with One-touch Fittings Series AS In-line Type 1

In-line Type Applicable tubing O.D. d Inch Size Metric Size Applicable tubing O.D. d Applicable tubing O.D. d Model Weight D1 D2 L1 L2 M1 L3 Max. Min. (g) Model Weight D1 D2 L1 L2 M1 L3 Max. Min.

Electric Actuator with Integrated Guide

Allowable Moment (Nm) Allowable dynamic moment LTF6 Model Mounting orientation Load movement direction 200 L1 (mm) L3 (mm) Pitching Rolling Vertical Vertical 100 m a a=1000 a=2000 a=3000 L1 Mep 0 6 4 2 Transfer load m (kg) 200 100 a=1000 a=2000 a=3000 a L3 Mey 6 4 2 0 Transfer load m (kg) m : Transfer load (kg) a : Work piece acceleration (mm/s2) Me: Allowable dynamic moment L : Overhang

LJ1H

Refer to page 204 regarding brake wiring. 250 600 a = 1000 200 400 L3 (mm) a = 2000 8kg a = 3000 Speed (mm/s) a 200 150 L3 Mey 100 0 5 10 15 Transfer load m (kg) 50 Refer to page 145 for deflection data. 0 100 200 300 400 500 600 Stroke (mm) 34 35 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

Note 2) 3/16", 3/8", 1/2" are made of brass (Electroless nickel plated). 15-9-95 Dimensions L5 Elbow type D3 H Applicable tubing O.D. d (Hexagon width across flats) L4 L3 A D1 M1 L1 L2 D2 T Metric Size Inch Size d T H D2 D3 L1 L2 L3 L4 L5 A M1 d T H D1 D2 D3 L1 L2 L3 L4 L5 A M1 D1 Model Model AS121F-M5-23T AS121F-U10/32-01T 1/8" 8.4 17.3 22.1 12.3 3.2 8.4 5/32" 9.3 12.7 17.3 22.1 12.3 12.7

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

L4 (1) A (2) Model d T Weight (g) H D1 D2 L1 L2 L3 L4 (1) A (2) Max.

F

M1 Weight Model Applicable D1 D2 L1 L2 L3 M1 Weight Tube OD : d Max Min gf (Inch) (Metric) Tube OD : d Max Min gf 7.8 10 41.1 4.4 14.5 1/8 23.4 20.6 5.8 NAS1001F 3.2 7.8 41.1 4.4 23.4 20.6 14.5 5.8 8.9 42.3 4.9 5/32 24 21.2 6.2 AS1001F 10 4 8.9 42.3 4.9 24 21.2 6.2 14.5 8.9 43.8 5.2 5/32 32.6 27.6 11.4 15.5 6 11 47 6 25 22.2 7.2 11.8 16.5 11.4 50 6.2 NAS2001F 3/16 33.6 28.6 17.1 AS2001F

VCL

1/4 n-1/8 : Thread type LQ H H P = J (Pitch) 2 LVN L Dimension (mm) TI/ TIL n (stations) Model Dimensions 3 5 6 7 8 9 10 2 4 PA L1 103.5 138 172.5 207 241.5 276 310.5 345 69 VV2CL2 L2 115.5 150 184.5 219 253.5 288 322.5 357 81 PAX L3 127.5 162 196.5 231 265.5 300 334.5 369 93 L1 115.5 154 192.5 231 269.5 308 346.5 385 77 PB VV2CL3 L2 127.5 166 204.5 243 281.5 320 358.5 397 89 L3 139.5 178