Failure to observe this precaution could damage the filter element. 1.10-3 Regulator with Mist Separator AMR3000 to 6000 Dimensions AMR3000 AMR4000, 5000, 6000 N Bracket mounting dimension With auto drain Model Port size A B C D E F G H J K L M U (Body) V (Adapter) P 50 35 45 46.5 R 78 97 98 115 S 8 7 10 15 T 9 9 11 11 B 260 298 366 432 L 178 211 277 321 1 4, 3 8 1 4, 3 8 AMR3000 AMR4000
Suite D Poway, CA 92064 TEL: (858) 679-190s FAX: (858) 679-1904 ARGENTINA SMC Argentina S.A. CHILE SMC Pneumatics (Chite) Ltda.
Solenoid Specifications 100, 200 VAC, 50/60 Hz; 24 VDC Coil rated voltage How to Calculate the Flow Rate 15 to +10% of rated voltage Allowable voltage fluctuation For obtaining the flow rate, refer to page 31-10.
Ta 10 STa(S 10) = & I Ta (Nm) I: & 2 = & (rad/s2) 2 t 5.2 5.3 22 5.4 P A F 1 1 = (1) P A F 2 2 = (2) 2 1 D 4 A = (3) ) d D ( 4 A 2 2 2 = (4) F=[N] F=[N] = A=[mm] A=[mm] D=[mm] d=[mm] P=[MPa] 5.6 () 5.7 () 5.5 23 6. 6. 6. 6. ,, , ,, 6-1. 6.1 (m) DC AC 0.5 3 5 (L) (Z) (N) 3 (NPN) F7NV F79 3 (PNP) 5V,12V F7PV F7P IC F7BV J79 2 12V J79C 24V 3 (NPN) F7NWV F79W PLC 3 (PNP) 5V,
D-A93 D-M9B D-M9N, D-M9P Type Load voltage Load current range Indicator light Application 24 VDC, 100 VAC 24 VDC (10 to 28 VDC) 28 VDC or less 5 to 40 mA, 5 to 20 mA 2.5 to 40 mA 40 mA or less Relay, PLC 24 VDC Relay, PLC IC circuit, Relay, PLC Reed auto switch Solid state auto switch Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors
Description Note Material Description AS2000 AS3000 Aluminum alloy Body Chromated q Zinc alloy Aluminum alloy SPC Cap Nickel plated Body q w Brass Brass Zinc alloy Handle Chromated(Red painted) Needle w e Brass Brass Spring steel Ring Zinc chromated Lock nut e r Zinc alloy Lock nut Chromated Valve core r t Aluminum alloy Needle Chromated Aluminum alloy (Red painted) Aluminum alloy (Red
0 2N o q Size e Equivalent lead w Motor mounting position t Motor option y Stroke adjustment unit (Included) Nil Top mounting U Bottom mounting T 48 mm 25 32 Nil Without option B With lock Nil None M Motor side only E End side only W Both sides Nil U r Stroke : Standard/: Produced upon receipt of order Stroke Model 50 100 150 200 250 300 350 400 450 500 550 600 700 800 900 1000 1100 1200
Nil CNote2) Note1) DNote3) Option Attachment Semi-standard + r Nil G M b Withoutpressuregauge Roundtypepressuregauge(withlimitindicator) Roundtypepressuregauge(withcolorzone) Pressure gaugeNote4) + Note5) Nil K Checkvalve c Withoutattachment Mountingposition:AF+AR+K+AL + Nil SNote6) d Withoutattachment Mountingposition:AF+AR+S+AL Pressure switch + t Nil TNote6) T-interface e Withoutattachment
Take note that the leakage voltage will increase when a resistor is used in parallel with a switching element or when a C-R circuit (surge voltage suppressor) is used for protecting a switching device because of the leakage voltage passing through the C-R circuit. The suppressor residual leakage voltage should be as follows. 4.
When used as a switch output device Setting of NPN open collector 2 outputs Setting of PNP open collector 2 outputs Brown DC(+) q Brown DC(+) q Load Black OUT1 r Black OUT1 r Load Main circuit Main circuit + + 12 to 24 VDC 12 to 24 VDC White OUT2 w White OUT2 w Load Load Blue DC() e Blue DC() e When used as an IO-Link device Brown L+ q L+ Black C/Q r Main circuit C/Q IO-Link master White
SMC Corporation R&D Center Product Development Division-6 Address: 4-2-2, KINUNODAI,TSUKUBAMIRAI-CITY , IBARAKI-KEN 300-2493, JAPAN Phone:+81-297-52-6 Fax:+81-297-20-5007 E-mail:kaihatsu_6_g3@smcjpn.co.jp Notice: The content of this manual can be revised without a previous notice.
(example: If the pressure switch with output impedance of 1k is connected to the A/D converter to detect the analog output of 5V, the detected voltage by the A/D converter becomes 5(V) x 1(M)/(1(k) + 1(M)) 4.995(V), and there is an error of approximate 0.005 V). Output impedance The operation principle of the switch output. Normal output and reverse output can be selected.
Piping 01/N01 A B D ZS-24-A ZS-24-B ZS-24-D ZS-35-C ZS-35-D ZS-35-F ZS-35-G Bracket A Bracket B Bracket D E E Panel mount adapter Panel mount adapter + Front protective cover F W1/WF1/M5/C4/C6 Output specifications R T S V X Y NPN open collector 2 outputs + Analog voltage/Auto-shift switching PNP open collector 2 outputs + Analog voltage/Auto-shift switching NPN open collector 2 outputs +
(Additional range) Relation between analog input and digital display Set value A B 0.002 0 kPa 2 kPa -0.1 0 kPa -101 kPa F0.1 -100 kPa 100 kPa 0.1 0 kPa 100 kPa 0.5 0 kPa 500 kPa 1 0 MPa 1 MPa 2 0 MPa 2 MPa 5 0 MPa 5 MPa 10 0 MPa 10 MPa 20 0 MPa 20 MPa 25 0 MPa 25 MPa USEr Input value (setting) Input value (setting) Available display unit and minimum set value Pressure range Rated pressure
Ground the F.G. cable with a resistance of 100 ohms or less +24V Brown +24VDC +24V Power supply Blue 0V 0V 24VDC F.G. Internal circuit Ground the F.G. cable with a resistance of 100 ohms or less OUTPUT PLC +24V INPUT Yellow Maintenance signal +24V Purple Error signal 12 - Doc. no. IZ*-OMT0002 3-2-2.
[kPa] Vacuum pressure [kPa] 80 80 70 70 200 100 60 60 Air consumption Air consumption 150 50 50 75 40 40 100 50 30 30 20 20 50 25 10 10 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 1.0 2.0 3.0 4.0 5.0 6.0 Supply pressure [MPa] Supply pressure [MPa] Flow rate Characteristics Flow rate characteristics Supply pressure: 0.4MPa Supply pressure: 0.4MPa 100 90 100 90 Vacuum pressure [kPa] Vacuum pressure [kPa
0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
Stations: 06 (Stations), Wiring: F (D-sub Connector), Manifold Options: D [with Common Release Pressure Supply (PD) Port], Exhaust: F (Individual Port Exhaust), Pressure Switch for Vacuum/Pressure Sensor: H (Digital Pressure Switch for Vacuum, -100 to 100, PNP 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: without Option, 1st Nominal Nozzle Size
Magnet: D (Built-in), Mounting: D (Double Clevis), Bore: Ø16 (5/8 Inch), Stroke: 100 (1 Inch), Action: S (Spring Return), Port Location: R (In-line), Auto Switch: C73--Reed, DC Volt >5 <24, AC Volt <100, LED, Lead Wire or Prewired Connector: Z (5m), Number: S (1 pc.)