Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM

N.O. (16) (16) 11 OUT port IN port 10 Push type Manual override 73.5 For LVM16R N.O. N.C. 3 2 1 25.5 (16) N.O. N.C. 3 2 1 11 11 IN port 3 x M6 x 1,1/4-28UNF OUT port (LVM13R,14R) 6 Plug (2) 5 11 6 2 (COM) port (LVM115) Plug (LVM16R) 10 1 (N.C) port 3 (N.O) port 13 For LVM115 2 x M3 Thread length 5 The broken lines indicate the bracket type. For direct mounting 6

0.01

to 60 (No freezing) Dustproof and jetproof (Equivalent to IP65) Environment with no corrosive or explosive gas 0.2 or less Free 30/150 or less 24/12 VDC, 100/110/200/220 VAC (50/60 Hz) 10% rated voltage B type VCA2: 6.5 W Valve type Fluid Withstand pressure MPa Body material Seal material Ambient temperature C Fluid temperature C Enclosure Atmosphere Valve leakage cm3/min (ANR) Mounting

INFORMATION Step Motor Controller 5 types of communication protocols New New

Terminal name Details 1 L+ +24 V 2 NC N/A 3 L 0 V 4 C/Q IO-Link signal * For , enter a number from the No. line in the table on page 6. Refer to the dimension drawings on page 6 for the mounting dimensions.

Dedicated Controller

For ordering information, refer to the option part numbers on page 82. 74 3 Controller Series LC1 Performance/Specifications General specifications Model LC1-1H1 LC1-1H2 Item 100/110V AC 10%, 50/60Hz (100V AC, 50/60Hz for LC1-1HV1) 200/220V AC 10%, 50/60Hz (200V AC 10% for LC1-1H32) (200V AC, 50/60Hz for LC1-1HV2) Power supply Leakage current 5mA or less Dimensions 80 x 120 x 244mm Weight

IZx-OMV0005

Wiring]. 2) Route the ionizer wiring separately to high power cables. 3) The ionizer must not be used in environments subject to range Check the power supply input is within the range of 24 VDC +/-10%.

VG342

Flow Characteristics With DIN terminal block With terminal block Port size Flow characteristics 2 3 (A R) b Cv C [dm 3/(sbar)] 1 2 (P A) b Cv C [dm 3/(sbar)] 26 38 0.38 0.30 7.0 9.8 27 38 0.37 0.32 7.4 9.8 27 40 0.36 0.22 7.3 9.8 25 40 0.37 0.20 6.8 9.6 2 1 (A P) b Cv C [dm 3/(sbar)] 3 2 (R A) b Cv C [dm 3/(sbar)] 1/2 3/4 Port size Effective area (mm2) 2 3 (A R) 1 2 (P A) 235

ALF400 to 900, ALT-5/-9

hole Applicable tubing O.D. 6, I.D. 4 Applicable tubing O.D. 6, I.D. 4 Model Number of distribution ports Applicable tubing A B C Number of distribution ports Applicable tubing A B C Model VA4-6 VA6-6 VA10-6 VA16-6 4 6 10 16 36.5 60 88 130 82.5 110.5 152.5 96.5 124.5 152.5 74 102 130 62 90 118 6 VB4-6 VB6-6 VB8-6 4 6 8 48 76 118 6 Note) Insert seal plug (PG1) into the distribution port which

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

Minimum operating pressure Without auto switch: 10 to 70C Ambient and fluid temperature (With no freezing) With auto switch: 10 to 60C Piston speed 50 to 500 mm/s Same dimensions as those of the standard cylinder (Series CA2) Cushion Interchangeable Thread tolerance JIS class 2 To 250 st : 251 to 1000 st : 1001 to 1500 st : +1.0 0 +1.4 0 +1.8 0 Stroke length tolerance Lubrication Not required

ALF400 to 900, ALT-5/-9

A B C Model VA4-6 VA6-6 VA10-6 VA16-6 4 6 10 16 36.5 60 88 130 82.5 110.5 152.5 96.5 124.5 152.5 74 102 130 62 90 118 6 VB4-6 VB6-6 VB8-6 4 6 8 48 76 118 6 Note) Insert seal plug (PG1) into the distribution port which is not used.

WRF100

Switch mounting bracket Note 2) 0.2 25 25 13 Fulcrum 12 12 20 10 10 2 x M10 x 1.5 through 45 F 30 90 110 107 Note 3) 2 x 4 x M10 x 1.5 depth 12 70 0 2 x 2 x 8H7( ) depth 12 0.015 1 193 25 52 380 (58.7) 95 133 70 0.05 (70) 85 75 270 0.3 (173) Rc1/ 4 (10) 100 100 Unclamp side port (30.2) (30.2) 306 139 360 Limit switch Note 1) Rc1/ 4 Clamp side port 0 4 x 8H7( ) through 0.015 82 0.05 143 115

Slit Valve

10 O-ring: FKM Internal leak Note 2) (Pam3/s) O-ring: Kalrez 6.5 x 10 9 6.5 x 10 8 Internal leak Note 2) (Pam3/s) at reversed pressure [Reversed pressure: 0.1 MPa (abs) or less] O-ring: FKM O-ring: Kalrez 6.5 x 10 7 6.5 x 10 11 External leak Note 2) (Pam3/s) Gate part 5 to 150 Operation temperature Note 3) (C) Actuator part 5 to 60 Inert gas Fluid 0.6 to 1 Operating time Note 4) (s) FKM,

Series KDM Rectangular Multi-connector

Two types, with 10 and 20 connector tubes, are available. Usable from vacuum (10 torr) to 145psi {1MPa} Irregular shape permits engagement in a proper position. One-touch tube connection One-touch fittings substantially cuts down man-hour for piping. Model . o N t r a P h c n I . o N t r a P c i r t e M e b u T . D .

SYJ300-OMU0003

No.SYJ300-OMU0003 -2- / *3) 1 1.5 *3)1 1 () No.SYJ300-OMU0003 -3- SYJ Series 3 / 1 DC () () () () EXH () () 4 No.SYJ300-OMU0003 SYJ Series 3 / ( ) 1 ( ),COMCOM 2 C-R () C-R Sol.1: DC 3% AC 8% Sol.2: (SSR)AC 1) (C-R) OFF 2) () 1.NPN 3) AC,, , SSR SSR 1) Sol.1: Sol.2: 2) ,1V + 2.NPN 5 No.SYJ300-OMU0003 SYJ Series 3 / 1 -10 1)M5 M3 1/4 0.4~0.5Nm M5 1/6~1/4 1~1.5Nm ()

CEx-OML0058

C a n t h e s y s t e m b e D o n o t u s e i t s i n c e i t w i l l A r e t h e r e a n y o p e r a t e d b e l o w r e s u l t i n a m i s c o u n t . m a g n e t i c i n f l u e n c e 1 4 . 5 m T ?

MONOSASHI-KUN

For connector with mark C, one piece of cylinder side connector (male) is enclosed. CE1 without connector can be directly connected to terminal block of counter. CE1-ROOC CE1-RO5 CE1-R10 CE1-R15 CE1-R20 CE1-R*C 3.

EXxx-OMY0006CN

-10 EX245-FPS1 68 No.EX##-OMY0006CN Fig. 10-11 EX245-FPS2 Fig. 10-12 EX245-FPS3 69 No.EX##-OMY0006CN 11.

reduces flow setting time

Model AS1ll1FS-M5l AS2ll1FS-01 AS2ll1FS-02 AS3ll1FS AS4ll1FS Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Model AS1ll1FSGl-M5 AS2ll1FSGl-01 AS2ll1FSGl-02 AS3ll1FSGl AS4ll1FSGl Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

Solid State Auto Switch

-C D-T791C D-T792C -21No.D-S-OMB0023-C D-S991/D-S9P1/D-T991 D-S992/D-S9P2/D-T992 -22No.D-S-OMB0023-C D-S99V1/D-S9PV1/D-T99V1 D-S99V2/D-S9PV2/D-T99V2 -23No.D-S-OMB0023-C Pre-wired connector D-#APC/D-#BPC D-#DPC -24No.D-S-OMB0023-C Revision history A: Limited warranty and Disclaimer are added.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.