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Note 2) Refer to the specifications of display unit for the flow rate value per pulse. 340 Clean Air Module LLB Series Dimensions LLB3-1-PRVSF V2 49.5 HAA HAW Mounting hole for 4 x M4 AT 45 37 35 IDF IDU 1.5 4 20.5 278.5 50 IDF FS A Valve open and locked position Rc 1/4 (NPT 1/4) Rc 1/4 (NPT 1/4) IDFA 90 (Lever operating direction) Max. 91 IDFB A Hand valve Valve closed position 5.5 39 IDH

55.4 28.9 PF3A702H 72.3 51 73 71 35.5 -56No.PF-OMX0007-A Lead wire with M12 connector (ZS-37-A) Pin number Description Colour 1 DC(+) Brown 2 FUNC White 3 DC(-) Blue 4 OUT Black : 4-wire lead wire with M12 connector for PF3A series.

36 DC24V A/B 800 //Z (V) DC2410% (W) 4) 63 102 (W) 5) 4 /9 4 /9 (W) 6) 70 113 7) (N) 20 39 78 157 (W) 8) 3.6 5 (V) DC2410% LEFS16A LEFS25A (mm) 100 200 300 (400) 100 200 300 (400) 500 (600) (kg) 0.90 1.05 1.20 1.35 1.84 2.12 2.40 2.68 2.96 3.24 (kg) 0.12 0.19 1( ) 23() 452000Hz 1 () 4 5 6 7 8 LEFS16A LEFS25A 12 LEFS16A LEFS25A 5 6 20 5 6 W(kg) 10 W(kg) W(kg) W(kg) 15 10

N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 CN4 CN4 No. No.

Series VS R8b S RUBBER SEAL/METAL SEAL SERIES VSR8/VSS8 2-position Single solenoid (FG-S) (A)(B) 4 2 5 1 3 (EA)(P)(EB) Double solenoid (FG-D) (Metal) (A)(B) 4 2 5 1 3 (EA)(P)(EB) Double solenoid (FG-D) (Rubber) (A)(B) 4 2 5 1 3 (EA)(P)(EB) 3-position Closed center (FHG-D) (A)(B) 4 2 5 1 3 (EA)(P)(EB) Exhaust center (FJG-D) (A)(B) 4 2 5 1 3 (EA)(P)(EB) Pressure center (FIG-D) (A)(B) 4 2 5

T3 Cylinder with Bypass Piping Component Parts T1 81.4 93.3 99.8 T2 63.4 73.8 80.3 T3 57.8 67.8 74.3 TH 47.9 57.3 57.3 TP Rc, NPT, G 1/8 Rc, NPT, G 1/4 Rc, NPT, G 1/4 Description No. 1 2 3 4 Qty. 1 1 1 1 Part no.

Bit Bit 31 to 0 Value If the Bit are 1 1 1 1 1 1 1 1, this indicates approximately 4 billion hours. * Default value is 0.

6 25 3 50 62 15 10 3 12 127 (135) 151 (159) 29 7 5.5 8 3.5 M10 x 1.25 1/8 26.5 2.5 73 4 6 28 3 57 70 15 10 3 12 128 (136) 154 (162) 35.5 8 5.5 10 3.5 M10 x 1.25 1/8 26.5 2.5 73 4 6.6 28 3 60 74 16 10 3 12 142 (151) 169 (178) 44 8.5 6 14 4 M14 x 1.5 1/8 28 2.5 81 4 6.6 33 3 68 84 16.5 10 4 12 (mm) Without rod boot With rod boot Bore size (mm) 20 25 32 40 l 0.25 ZZ 182 (190) e f h ZZ H 30 19

Symbol Pressure Nil Rc1/4 G1/2 0 None M Rc1/4 M201.5 1 0.2 MPa N Rc1/4 1/2NPT 2 0.3 MPa 1 1/4NPT G1/2 3 1.0 MPa 2 1/4NPT M201.5 3 1/4NPT 1/2NPT 4 G1/4 G1/2 Construction Note 1) 5 G1/4 M201.5 0 No terminal box 6 G1/4 1/2NPT With terminal box (Exsd BT5) TIIS (Japan) explosion-proof 1 Accessories Note 2) Applicable model Symbol Accessories IP8000 IP8100 Nil None (Standard)

port (P port) Note 4) (M3 x 0.5, piping not required) (68.4) (M5 x 0.8) Vacuum port (V port) Note 4) 57.3 PE 29.4 (M5 x 0.8) 3 20.2 P 20.3 9.7 V Exhaust part 0.8 17.7 22.8 87.2 10 Note 1) The above dimensions are for ZQ11U-K2 L-F.

Pin Remarks 1 24 V (PWR(V)) 2 0 V (PWR(V)) 3 24 V (PWR) 4 0 V (PWR) M12 4-pin plug A-coded connector(PWR) Fig. 3-4 Pin allocations of Power connectors Pin (BUS IN)Port1 Port type: MDI (BUS OUT)Port2 Port type: MDI-X 1 TD+ Transmit data+ RD+ Receive data+ 2 RD+ Receive data+ TD+ Transmit data+ 3 TDTransmit dataRDReceive data4 RDReceive dataTDTransmit dataM12 4-pin socket D-coded connector

ZQ1053M-K1Y5L-D31C 4 pcs. (Stations 1 to 4) ZQ1103M-K1Y5L-D31C 4 pcs. (Stations 5 to 8) ZY Maximum suction flow (l/min(ANR)) Air consumption (l/min(ANR)) Maximum suction flow (l/min(ANR)) Air consumption (l/min(ANR)) Maximum vacuum pressure Maximum vacuum pressure (kPa) Maximum vacuum pressure (kPa) Maximum vacuum pressure (kPa) ZQ 20 -80 -80 The stations are sequentially numbered.

Rc NPT G Nil N F OUT(2) 1 IN(1) Port size Class 3 Class 2 Port size 1/8 (6A) 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Class 4 Symbol 01 02 03 04 06 Voltage 1 2 3 4 36 100 VAC 200 VAC 110 VAC 220 VAC 230 VAC Orifice size Please consult with SMC regarding other voltages.

P. 13-4-17 to 13-4-19 13-4-4 4 Series ZM Vacuum Ejector: With Valve and Switch Construction: LZM1-KL-E Precautions Be sure to read before handling. Refer to pages 13-15-3 to 13-15-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to page 13-1-5 for Precautions on every series.

Fittings & Tubing Air Cylinders Rotary Actuators B LH 15 LT W 2 x LC (Knock pin position) Y X M W X Y 4 x LD LX Z LS + Stroke LZ ZZ + Stroke (mm) 7 7 6 6 LD 3 3 3 3 LT 4 4 4 4 LC 51 (60) 53 (61) 53 (61) 53 (61) LS Z 30 25 22 20 LH 135 (144) 125.5 (133.5) 123.5 (131.5) 118 (126) ZZ B 54 44 36 32 LX 4 3.5 3.5 3 M 16.5 16 15 15 X 8.5 8 7 7 Y 71 58 49 44 LZ 10 10 10 10 W Bore size 54.5 45 38.5

PSE3##A series Unit 4 Select from MPa, kPa, Pa, kgf/cm2, bar, mbar, psi, inHg, mmHg or mmH2O Display type LCD Number of displays 3-screen display (Main display, sub display x 2) Display Display colour 1) Main display: Red/Green 2) Sub display: Orange Number of display digits Main display: 4 digit (7-segments) Sub display: 4 digit (Upper 1 digit 11-segments, 7-segments for other) Operation