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Part No: AXT100-B04A -46No.EX-OME0015-F Revision history A: All revised contents B: Revision C: Revision D: Contents revised in several places. E: Contents revised in several places. F: Contents revised in several places.

SY11 A 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0 0.22 100 kPA to 0.6 Large flow 0 to 0.7 N.C. SY13(A): 15 SY14(A): 26 (14) SY13(A): 13 SY14(A): 24 (12) (1) SY12 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0.6 0.14 100 kPA to 0 Standard 0 to 0.7 N.O. (1) SY12 A 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0.6 100 kPA to 0 0.22 Large flow 0 to 0.7 N.O.

SY11 A 3 4 0.22 100 kPA to 0.6 100 kPA to 0 M3 x 0.5 M3 x 0.5 Large flow 0 to 0.7 N.C. SY13(A): 15 SY14(A): 26 (14) SY13(A): 13 SY14(A): 24 (12) (1) SY12 3 4 100 kPA to 0 0.14 100 kPA to 0.6 M3 x 0.5 M3 x 0.5 Standard 0 to 0.7 N.O. (1) SY12 A 3 4 0.22 100 kPA to 0 100 kPA to 0.6 M3 x 0.5 M3 x 0.5 Large flow 0 to 0.7 N.O.

DC24 V D/A DC24 V 3 34 0 V 0 V 4 5 FE FE 5 FE FE 100 k 250 1 k 600 IP67 -34No.EX-OMN0037CN-A 0V 2 EX600 4 (-)2 (+) 4 3 4 -35No.EX-OMN0037CN-A LED LED OFF OFF 0 1 () () (SI ) -36No.EX-OMN0037CN-A EX600-AMB M12 (5 ) 1 2 (1 /) () DC24 V Class22 A 0.5 A/ 12 bit 010 V15 V05 V 020 mA420 mA 15 V 40 mA 100 k 250 (25 ) 0.05 F.S. (25 ) 0.15 F.S. (25 ) 0.5F.S. 0.6F.S.

Printed in Japan. 1st printing November, 2000 D-SMC.L.A. P-80 (D)

/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper 80 1400 C95 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175

500 1,000 100 250 500 1,000 100 250 500 1,000 100 250 * 500 1,000 100 250 * 500 100 250 500 1,000 100 250 500 1,000 100 250 500 100 250 500 0.6 1.5 3 6 1.1 2.75 5.5 11 1.5 3.75 7.5 15 2.1 5.25 10.5 21 2.5 6.5 13 1.2 3 6 12 2.3 5.75 11.5 23 3.4 8.5 17 5 12.5 25 Features: 1/4 4mm Economical and lightweight LLDPE resin provides excellent environmental stress crack resistance Six colors Excellent

V] F.S.=514[V] (1%F.S.40.010.04[V]) F.S. ( 25[]ON-OFF (1 k 1 M A/D 5 V A/D 5(V)1(M)/(1(k)+1(M))4.995(V)0.005V ) Ripple -8No.PS-OME0003CN-F 1 (DC+) 2 3 (DC-) 4 (IN15 V) A A PSE200/PSE300 (ZS-28-C) M() 37104-3101-000FL Tyco Electronics() 3-1473562-4 () XN2A-1430 () -9No.PS-OME0003CN-F PSE200 PSE300 15V 1 k () -10No.PS-OME0003CN-F (A/D ) () 20 2030 -11No.PS-OME0003CN-F PSE530 PSE531

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 , , ISO 15407-1 Interface Large capacity Size 01 (EVS1-01) and Size 02 (EVS1-02) Interface conforms to ISO 15407-1 Flow rate Cylinder driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000L/min (ANR) 400L/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Light weight Size 01 (3-position): 0.26kg Size 02 (3-position

Note Panel mount adapter Waterproof seal, screws included ZS-26-B Front protective cover ZS-26-01 Front protective cover + Panel mount adapter Waterproof seal, screws included ZS-26-C ZS-26-D 48 conversion adapter 48 conversion adapter This adapter is used to mount Series PSE200 on the panel fitting of Series PS100. Order panel mount adapter separately.

Combinations such as C-FV, D-FHV, J-ST are not possible.) : Not available F H R S U T V Symbol Auto drain specifications Nil Auto drain 3 Symbol Nil Description C D J Drain cock (Without auto-drain) N.C. auto drain N.O. auto drain C D 3 Refer to Auto Drain Specifications/Option Combinations.

M E N S I O N S AD S E R I E S A U I T O D R A I N S S Y M B O L S H O W T O O R D E R A U T O D R A I N S E R I E S AD AD402-02 (1/4) PT AD402-03 (3/8) PT AD402-04 (1/2) PT AD600-06 (3/4) PT AD600-10 (1) PT H O W T O O R D E R A U T O D R A I N S E R I E S NAD NAD402-N02 (1/4) NPT NAD402-N03 (3/8) NPT NAD402-N04 (1/2) NPT NAD600-N06 (3/4) NPT NAD600-N10 (1) NPT FOR FURTHER TECHNICAL DETAILS

Smooth Cylinder Series CQSY 12, 16, 20, 25 How to Order B 20 D 30 C CQSY M9BW B D 20 30 C CDQSY With auto switch Number of auto switches Nil S n With auto switch (Built-in magnet) 2 pcs. 1 pc. n pcs.

V 5 V, 12 V, 24 V, 100 V Heavy-duty cord Reed switch Parallel cord 100 V Heavy-duty cord 3-wire (NPN) 5 V, 12 V IC circuit Solid state switch Grommet 3-wire (PNP) 12 V MDSUA7 Relay, Connector Grommet Connector Grommet Connector Heavy-duty cord 2-wire 24 V MDSUA20 100 V PLC Reed switch 100 V IC circuit 48 V, 100 V 24 V or less Order example: MSUA20 single vane type (connection port side location

Terms Meaning 100 100BASE-TX Standard LAN transmission line with communication speed of 100 Mbps. A Auto negotiation The function that automatically optimizes the common communication parameters such as speed, duplex mode, and flow control between Ethernet devices. C Counts The MPC controls and reports position internally in Counts.

VQ4 Electrical entry Body (Pilot exhaust) G: Grommet E: Grommet terminal 20: Individual EXH T: Conduit terminal D, Y: DIN terminal VQ5 VQC VQZ SQ Coil rated voltage 30: Common EXH 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC 240 VAC (50/60 Hz) 9 Other 3 2 1 VFS 4 VFR 6 5 VQ7 7 Option Manifold only How to Order Pilot Valve Assembly Applicable

C, prevent water droplets from entering the inlet port. (No freezing of the fluid) * Note 2. ANR indicates the flow rate converted to the value at 20 deg. C, under the atmospheric pressure and the state of relative humidity 65%. * Note 3.

D-KS This catalog is printed on recycled paper with concern for the global environment.

10%3025Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3025Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)