Guide Cylinder Series MGG

5 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.

KB

KBH1-R1S KBH2-R1S KBH2-R2S KBH2-R3S KBH3-R2S KBH3-R3S KBH3-R4S KBH4-R3S KBH4-R4S R(PT) 1 2 R(PT) 3 8 R(PT) 1 2 R(PT) 3 8 R(PT) 1 4 R(PT) 3 8 R(PT) 1 4 KBE1-04 KBE1-06 KBE2-06 4 R(PT) 1 8 Air supply port: KBE, KBH, KBB, KBS, KBL 6 KBE2-08 KBE2-10 KBE3-08 8 10 10 8 KBE3-10 KBE3-12 KBE4-12 2 (P.2.1-77, 2.1-78) R1 KB 1 H S 12 Female connector elbow union: KBL Style With sealant (only male thread

Series CE1

hole H10 Shaft dg CW RR CL + Stroke A + Stroke (mm) Foot Front flange, Rear flange Rear flange Double clevis Bore size (mm) LT* LX FT* FV LA LB LE LH A LD LS LY LZ FD FG FL FX FZ M A A CD CL CU CW CX CZ RR T 32 40 50 63 59 65 148 5.8 11.2 6.6 52.5 30 112.4 57 72.5 71 5.5 69.5 8 48 56 65 34 139 161 10 151 14 20 18 36 10 57.5 71.5 65.5 7 11.2 6.6 33 158.4 64 79.5 78 5.5 76.5 8 54 62 72 40

Clamp Cylinder with Lock Series CLK1

Model A B Same side Different sides 4 6.5 8 8 Different sides Same side D-C7, D-C8 31.5 29.5 31 31 n-2 2 15 + 45 ( ) (n = 2, 4, 6...) Approx. Hs D-C7, D-C8 30.5 35 40.5 40.5 50 + 45 (n-2) 15 50 A B 4 6.5 8 8 n-2 2 15 + 50 ( ) (n = 2, 4, 6...) D-C73C 31.5 29.5 31 31 D-C73C 15 65 65 + 50 (n-2) Approx. Hs 33 37.5 43 43 n-2 2 D-H7, D-H7W D-H7F 15 + 45 ( ) (n = 2, 4, 6...)

o

(H) M3X0.5 n ports trotes 8 3 P 10-32 Nom (M5)4 ports a c e l i o r l i r::i:i:l:::r.:.:r:r:::r:::r::r:r:::ri:i:r:rrr:,:i:t:irl:i:r:r:l r'rt: -,., ,.. L .

o

(H) M3X0.5 n ports trotes 8 3 P 10-32 Nom (M5)4 ports a c e l i o r l i r::i:i:l:::r.:.:r:r:::r:::r::r:r:::ri:i:r:rrr:,:i:t:irl:i:r:r:l r'rt: -,., ,.. L .

Series MXP Precision Air Slide Table

A A F F A F L L L 1 N = 0.2248 lbf 6 6 6 L=80mm L=80mm L=80mm 0.05 0.06 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 0.04 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 0.05 0.04 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 40 Load (N) 0 10 20 30 50 Load (N) 0 10 20 30 40 Load (N) 40 10 10 10 L=100mm

MXH Series Compact Slide

) 20 6 21 17 2 1 19 5 18 8 10 20 6 21 16 2 1 19 5 18 10 8 3 24 13 9 7 22 14 4 11 15 12 3 24 13 23 22 7 4 11 MXH16, 20 (16, 20) 20 6 21 17 2 1 19 5 18 18 8 10 4 7 22 23 13 24 3 12 11 Parts list Parts list Description Material Note Description Material No.

Air Cylinder Series MB

24 7 7 8 8 10 10 14 154 158 182 182 228 228 267 10 10 14 14 22 22 25 160 164 190 190 238 238 279 42 42 53 53 73 73 90 9 9 10.5 10.5 12.5 12.5 13 MB-B03 MB-B05 MB-B08 MB-B12 Rotating angle Mounting plate Model without air cushion is designed to include rubber bumpers.

Compressed Air Preparation Filter

A A 1/4 G Maintenance space Drain J: Drain guide G Maintenance space Drain Thread type Rc, G: 10 One-touch fitting Thread type NPT: 3/8 One-touch fitting A 3/8 G Maintenance space Drain Figures indicate the auto drain (1.0 MPa).

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

(or 3 kPa) Repeatability Note 2) 0.4 MPa setting (Ex.)10-ARP30-02BG 1 L/min [ANR] or less (at P2 = 0.4 MPa) 0.2 MPa setting (Ex.)10-ARP30-02BG-1 0.6 L/min [ANR] or less (at P2 = 0.2 MPa) Air consumption 0.6 MPa setting (Ex.)10-ARP30-02BG-3 1.4 L/min [ANR] or less (at P2 = 0.6 MPa) 1/8 1/4 1/8 Pressure gauge port size 5 to 60C (No freezing) Ambient and fluid temperature With a digital pressure

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

(or 3 kPa) Repeatability Note 2) 0.4 MPa setting (Ex.)10-ARP30-02BG 1 L/min [ANR] or less (at P2 = 0.4 MPa) 0.2 MPa setting (Ex.)10-ARP30-02BG-1 0.6 L/min [ANR] or less (at P2 = 0.2 MPa) Air consumption 0.6 MPa setting (Ex.)10-ARP30-02BG-3 1.4 L/min [ANR] or less (at P2 = 0.6 MPa) 1/8 1/4 1/8 Pressure gauge port size 5 to 60C (No freezing) Ambient and fluid temperature With a digital pressure

Ionizer

Ionizer Emitter cartridge One-touch fitting End bracket Center bracket Feedback sensor o 1 2 3 4 5 6 7 8 9 10 11 12 i w y !1 !0 Autobalance sensor [High-precision type] Power supply cable u i Autobalance sensor [Body-mounting type] Connection cable A (12P) Connection cable B (6P) Sensor bracket NT IZS31-NT !2 645 A Series IZS31 Functions 1.

Lightweight and Compact

No anchor bolt is included. 77 A HRS090 Series Standard Type Cooling Capacity HRS090-A-20/40 (50 Hz) HRS090-A-20/40 (60 Hz) 12 12 10 10 Ambient temperature 32C Ambient temperature 32C Cooling capacity [kW] Cooling capacity [kW] 8 8 Ambient temperature 40C Ambient temperature 40C 6 6 4 4 Ambient temperature 45C Ambient temperature 45C 2 2 0 0 5 10 15 20 25 30 35 Circulating fluid temperature

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

head cap screw Note) Please refer to the page 8-19-8 for details on components and replaceable parts for flat cylinders with guides (MGPM, MGPL). 8-24-6 7 Cylinder with Turntable Series MGT Dimensions 4-YY depthYL XAH7 depth XL XB XAH7 a b c d e XAH7 MX XC XL (mm) X X0.02 a b c d e Bore size (mm) MTS XX section detail drawing 63 80 100 11 17.8 10 7 18.5 13.3 20.3 12 8 22.5 MY 2-R3 15.3 23.3

DOC1003626

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Abnormal low tank fluid level 1 Low tank fluid level 2 None 3 None 4 None 5 Fan failure Alarm flag 1 6 None 7 None 8 Abnormal rise of circulating fluid temperature 9 Circulating fluid temperature rise 10 Circulating fluid temperature drop 11 TEMP READY

212

Applicable model LVR20 LVR40 LVR50 03 3 x 2 LVR20 LVR40 LVR50 03 1/8" x 0.086" 04 4 x 3 05 3/16" x 1/8" 06 6 x 4 07 1/4" x 5/32" 10 10 x 8 11 3/8" x 1/4" 12 12 x 10 13 1/2" x 3/8" 19 19 x 16 19 3/4" x 5/8" LQ3 Metric size Inch size Symbol Applicable tubing size Applicable model Symbol Applicable tubing O.D.

25

NPT1/8 G1/8 Symbol 3 Actuation Air operated PAF Tube extension Diaphragm material Symbol 1 Material PTFE PA PB P07 P07N P07F Rc1/8 NPT1/8 G1/8 1/4" tube extension Female thread Tube extension Female thread/ Tube extension PB13 3 A P07 1 3 A 1 S PB13 With nut Port size The pump with nut is recommended when SMC fitting, LQ series, is used.

2/3 Port Valve

port Rc(PT) A B C D E F G H J 1 8 1 4 1 4 105 120 140 77 96 113 53 60 74 26.5 30 37 121.5 138 161 20 24 24 130.5 148 171 8 10 12 55 63 74 1 4 1 2 1 1 2 VND50D-32A VND60D-40A VND70D-50A Flange/32F, 40F, 50F Port size VX VN VQ Model Pilot port Rc(PT) Applicable flange A B C D E F G H J 8 10 12 50 40 32 1 8 1 4 1 4 130 150 180 211.5 227 251 135 140 155 135 147 163.5 20 24 24 100 105 120 36

IDX-OM-W020

. 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 5 . 5-1 IDFB Series 1 6 6-1 . 6-1 6-2 GWP . 6-2 6-3 . 6-3 6-4 . 6-5 6-5 . 6-7 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 7-4 . 7-1 8 K 8-1 . 8-1 8-2 . 8-1 9 R 9-1 . 9-1 9-2 . 9-1 9-3 . 9-1 10 S 10-1 . 10-1 10-2 . 10-1 11 T 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-3 12 V 12-1 . 12