XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

Lock unit

Chamfer Chamfer (1) For male thread (2) For female thread 30 30 D-2 D-2 D D Fig. 2 Rod end style Do not apply excessive lateral load or external force to the lock unit. They may break the lock unit. Do not use the product in applications where the rod rotates. Do not apply loads with impact, strong vibration or rotational forces while the lock mechanism is activated.

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

sub plate None With surge voltage suppressor With light/surge voltage suppressor (D type only) Nil S W Z E Please inquire separately regarding applicable voltage.

Digital Flow Switch (Remote type sensor unit)

Bracket (ZS-33-M) Bracket (ZS-33-MS) -37No.PF-OMJ0016-J Lead wire and connector (ZS-33-D) Connector cover (ZS-33-F) -38No.PF-OMJ0016-J Revision history A: Contents revised in several places. B: Contents revised in several places. C: Modified errors in text. D: Contents are added. E: Contents revised in several places. F: Contents revised in several places.

LCD Readout Digital Pressure Switch Series ZSE3 (For Vacuum)/ISE3 (For Positive Pressure) For General Pneumatics Easy pressure setting with the digital display Can be integrated with a vacuum unit, Series ZX ZSE ISE ZSP PS ISA PSE IS ISG ZSM Built-in fail

Output specifications ZSE ISE 21 NPN open collector 2 outputs without analog output ZSP 22 NPN open collector 2 outputs with analog output (1 to 5 V) PS Positive pressure ISE3 ISA PSE Vacuum ZSE3 IS ISG Suffix Nil None ZSM D For replacement with ZX series Note 3) Compliant with piping specifications OX and OXY only.

Low Maintenance Filter Series FN1

Description Material Model Bore size (Nominal size B) FNR100 N V-10 FNR101 N V-10 1 2 3 Stainless steel SUS304 Cover 194 (257) Rc 1 Stainless steel SUS304 Bowl 332 (385) Stainless steel SUS304 V-band Note Parts list Note Replacement parts No. Description Material No.

Dedicated Controller Series LC1 Uniaxial Type

V O Speed max 10ms ON OFF BUSY BUSY ON OFF max 60ms V O Speed Response time with respect to controller input signals Timing for alarm reset The following requisites exist for delay of response with respect to controller input signals.

KRM

K M H 2-4.5 mounting hole D N-FA Applicable tubing O.D. MS T VMG Applicable tubing O.D.

Dedicated Controller

V O Speed Max. 10ms ON OFF BUSY ON OFF BUSY Max. 30ms Max. 60ms V O Speed Timing for alarm reset Response time with respect to controller input signals ON OFF ALARM -RESET Max. 5ms The following factors exist for delay of response with respect to controller input signals.

Peltier-type Chiller Thermo-con/ Compact Type

D-G

HRX-OM-S004

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRS Series 3.3Installation 3-27 HRX-OM-S004 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Air Gripper Unit for Collaborative Robots

Auto switch Auto Switch Specifications D-M9N-5(With indicator light) Auto switch model D-M9N-5 Electrical entry direction In-line Wiring 3-wire Output NPN type Applicable load IC circuit,Relay,PLC Power supply voltage 5 , 12 , 24 VDC (4.5 to 28 V) Current consumption 10 mA or less Load voltage 28 VDC or less Load current 40 mA or less Internal voltage drop 0.8 V or less at 10 mA (2 V or less

Miniature Guide Rod Cylinder Series MGJ

D-X Individual -X 261

Series SY100 3 Port Solenoid Valve Rubber Seal

Lead wire Hook Caution Plug Connector Lead Wire Length Gently operate locking manual override styles B, D using small screwdriver. [Torque: 0.1Nm or less] Standard length is 300mm, but the following lengths are also available.

RHC

D-A9V/M9V/M9WV/D-M9A(V)L types cannot be mounted. Do not indicate suffix N for no lead wire on D-A3/A44/G39/K39 models. -X Lead wire length symbols: 0.5 mNil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example) H7CN Individual -X Since there are other applicable auto switches than listed, refer to page 1214 for details.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

SYJ3000T Series Q 12, 24DC Coil rated voltage V Q Starting 0.55 Power consumption W Electrical circuit (For power saving type) Holding 0.22 Red (+) Specifications other than above are the same as standard models.

HRX-OM-T002

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-17 Connection of RS-232C HRS090 Series 3.3Installation 3-27 HRX-OMT002 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

(With NPN output) 1 V or less (With load current of 80 mA) 1 s (0.25, 0.5, 2, 3) Yes 1% F.S.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

(With NPN output) 1 V or less (With load current of 80 mA) 1 s (0.25, 0.5, 2, 3) Yes 1% F.S.

SI unit for CC-Link

EX120-SMJ1 EX121-SMJ1 -32No.EX-OMB0014-H EX122-SMJ1 EX124D/U-SMJ1 -33No.EX-OMB0014-H EX126D-SMJ1 -34No.EX-OMB0014-H Revision history C: Complete revision D: Terminal screw change Switch cover change (EX124U/D, EX126D) E: Modified errors in text.