HRX-OM-I051

FLT 09 Alarm10*1 10 Alarm11 Reservoir High Temp.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Set the mounting band perpendicularly to cylinder tube. 20 50 63 80 100 25 32 40 D-B7/B80 8 10 9 10 10 11 D-B73C/B80C D-C7/C80 8 10 9 10 10 11 D-C73C/C80C 8 10 9 10 10 11 D-B5/B64 11 11 MX Mounting correctly Mounting incorrectly 13 13 14 14 14 17 D-B59W 18 16 D-G79/K79 8 10 9 10 10 11 Auto Switch Mounting Bracket Part No.

ASR

Calle 18 69-05 Apart.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

0.4 MPa setting (Ex.)10-ARP30-02BG 0.005 to 0.4 MPa Set pressure range Note1) 0.2 MPa setting (Ex.)10-ARP30-02BG-1 0.005 to 0.2 MPa 0.6 MPa setting (Ex.)10-ARP30-02BG-3 0.008 to 0.6 MPa Within 0.2% F.S.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

0.4 MPa setting (Ex.)10-ARP30-02BG 0.005 to 0.4 MPa Set pressure range Note1) 0.2 MPa setting (Ex.)10-ARP30-02BG-1 0.005 to 0.2 MPa 0.6 MPa setting (Ex.)10-ARP30-02BG-3 0.008 to 0.6 MPa Within 0.2% F.S.

Low torque Metal seal type Rotary joint

* flange: MQR8-F (for MQRF8-M5) * flange: MQR12-F (for MQRF12-M5) * o 55 * o 45 * o 41 * o 50 * 4-4.5 mounting hole * 4-8 counter bore 5.5 4.5 mounting hole +0.05 4.1 depth10 54h8 24 x M5 x 0.8 10 counter bore depth1.5 30h8 (10 from end) 49h8 0 -0.033 25h8 16-M5 x 0.8 10 counter bore depth1.5 0 0.033 3 120 140 17 *7 (10 from end) 3 (87) 1 2 3 4 5 6 7 8 9 10 11 12 1 2 31 9 8.2 x 11 = 90.2

2 Phase Stepper Motor/Without Motor Brake Series LXP

[16.5] 10 4-M6 x depth 10 Section C 21.5 18 7.5 Section F B 4-M6 x 1 4.5 1 30.5 34 47.5 4-9.5 4-5.6 +0.1 0 8.4 5.4 34 0.02 78 91 94 64 50 10 B 4H9 +0.030 0 depth 6 26 63 73 30 D Stroke + 181 (Stroke: 50 to 100mm) Stroke + 198 (Stroke: 125 to 200mm) 12 5.5 43 Cross section BB Photo micro sensor wire (300mm) Motor wire (300mm) 4H9 +0.030 0 12 6 4.5 3.5 2 1 5 4H9 +0.030 0 3 Section F detail

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

3 2 A B Dimensions: 10 mm Stroke (mm) With a stroke of 10 mm A B C D F H I J Y Model ZPT10F10-B5-A10 10 12 10 12.5 27 38.5 74.5 1.5 ZPT13F10-B5-A10 13 15 23 10.5 13 27.5 39 75 2 ZPT16F10-B5-A10 16 18 Rc 1/8 Hexagon width across flats 13 Additional Dimensions by Stroke (mm) H I J Stroke M14 x 1 20 +10 +38 6.2 Hexagon width across flats 19 +28 30 +20 +48 40 +30 +84 5 5 D C +54 50 +40 +94 I

A_HEC-OM-K001

9 Appendix 9.5.4 Recirculating fluid Pressure Loss Fluid: Water HED003 35 30 Pressure loss kPa 25 HED003-HW13 20 15 10 HED003-HW19 5 0 0 2 4 6 8 10 12 14 16 18 20 Flow rate L/min Fig.9-13 Recirculating fluid Pressure loss (HED003) HED005, HED007 35 30 Pressure loss kPa 25 HED005-HW13 HED007-HW13 20 15 10 HED005-HW19 HED007-HW19 5 0 0 2 4 6 8 10 12 14 16 18 20 Flow rate L/min Fig.9-14 Recirculating

Vacuum Pad: Ball Joint Type

Mounting female thread Vacuum entry port 6 tube 4 tube 8 tube Mounting Connection 10 to 16 One-touch fitting M5 x 0.8 19 18 Female thread 4 tube M5 x 0.8 22 23 20 to 32 M5 x 0.8 10 to 16 6 tube M8 x 1.25 21 22 6 tube M5 x 0.8 58 60 40, 50 Pad dia.

IDX-OM-W019

Specification for Option S 10 1 Safety instructions. 10 1 10 2 Specifications . 10 1 Chapter 11 Specification for Option T 11 1 Safety instructions. 11 1 11 2 Specifications . 11 1 11 3 Remote operation . 11 2 11 4 How to connect the power supply and signal cable . 11 2 11 5 Electric wining diagram . 11 3 Chapter 12 Specification for Option V 12 1 Safety instructions. 12 1 12 2 Specifications

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Direct Operated Precision Regulator/Modular Style (For Special Applications) -ARP20 to -ARP40 10 20 21 10 20 21 JIS symbol Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) Regulator with backflow function Regulator -ARP20K to -ARP40K 10 20 21 10 20 21 Clean room compliant (10-ARP). Copper-free, fluorine-free (20-ARP).

Antistatic Tubing Series TA

Calle 18 69-05 Apart.

Please contact us for the latest version.sales@ocaire.com SS5YJ3 MFLD SYJ3000. MFLD, BASE MT, SYJ3000 SERIES. VALVE. SS5YJ3 BUILT IN FITTING

Please contact us for the latest version.sales@ocaire.com, MFLD, BASE MT, SYJ3000 SERIES, VALVE, SS5YJ3 MFLD SYJ3000, MJ, SS5YJ3 BASE MT .25960 lb, .25960 lb

Please contact us for the latest version.sales@ocaire.com, MFLD, BASE MT, SYJ3000 SERIES, VALVE, SS5YJ3 MFLD SYJ3000, MJ, SS5YJ3 BASE MT .14536 lb, .14536 lb

Please contact us for the latest version.sales@ocaire.com, MFLD, BASE MT, SYJ3000 SERIES, VALVE, SS5YJ3 MFLD SYJ3000, 1J, SS5YJ3 OTHER SIZE RATING, .45194 lb

Please contact us for the latest version.sales@ocaire.com, MFLD, BASE MT, SYJ3000 SERIES, VALVE, SS5YJ3 MFLD SYJ3000, UJ, SS5YJ3 BUILT IN FITTING .43651 lb, .43651 lb

Please contact us for the latest version.sales@ocaire.com, MFLD, BASE MT, SYJ3000 SERIES, VALVE, SS5YJ3 MFLD SYJ3000, 1J, SS5YJ3 OTHER SIZE RATING, .45052 lb

Please contact us for the latest version.sales@ocaire.com, MFLD, BASE MT, SYJ3000 SERIES, VALVE, SS5YJ3 MFLD SYJ3000, UJ, SS5YJ3 BUILT IN FITTING .15326 lb, .15326 lb