Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: Common SUP, Common EXH, Side Ported, Stations: 2 Stations, Port Size: ø4 One-touch Fitting, Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: Common SUP, Common EXH, Side Ported, Stations: 2 Stations, Port Size: ø6 One-touch Fitting, Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: Common SUP, Common EXH, Side Ported, Stations: 2 Stations, Port Size: M5X0.8, Thread: NPTF

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: Common SUP, Common EXH, Side Ported, Stations: 2 Stations, Port Size: 1/8, Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: Common SUP, Common EXH, Side Ported, Stations: 2 Stations, Port Size: 1/8, Thread: NPTF

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: Common SUP, Common EXH, Side Ported, Stations: 2 Stations, Port Size: 1/8, Thread: NPT

Manually Operated Integral Fitting Type/Threaded Type Series LVH

LVD LVQ How to Order Manifold Base LQ1 LVN LLH 2 A 05 02 C TL/TIL Body class Material LQ3 Body class 2 3 4 Manifold PFA Symbol C Symbol 2 3 4 Thread type Thread type Rc NPT Symbol Nil N Base type Port size (port P) A Stacking type Manifold stations Port size 1/4 3/8 1/2 Symbol 02 03 04 Body class 2 3 4 02 2 stations 05 5 stations How to Order Valve LVH 2 0 02 C A Threaded type Body class

Speed Controller: Standard Type In-line Type AS Series

Nil Metric thread (M3, M5) Rc NPT G N F Bore size Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 1/8 1/4 3/8 1/2 AS1000 AS1000 AS2000 AS2000, 3000, 4000, 5000 AS3000, 4000, 5000 AS4000, 5000 650 A

Metering Valve with Silencer Series ASN2 1

ASN How to Order AQ ASN2 03 ASV JIS Symbol AK Option Nil S None With seal ASS Port size ASR M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 ASF Thread type Metric thread (M5) Unified thread (10-32 UNF) R NPT Nil N Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Flow rate (l/min (ANR)) Effective area (mm2) Number of needle rotations 15-11-1 2 Series ASN Construction Component

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

AS120-M5 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 646 B

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Port size ASV Model M3 x 0.5 ASV120F-M3 0.3 0.3 AK M5 x 0.8 ASV220F-M5 1.3 1.3 R 1/8 ASV310F-01 8 7 ASS R 1/4 ASV310F-02 8 7 R 1/8 ASV410F-01 14 13.5 ASR R 1/4 ASV410F-02 14 13.5 R 3/8 ASV410F-03 14 13.5 ASF R 1/4 ASV510F-02 27 23 R 3/8 ASV510F-03 29 27 R 1/2 ASV510F-04 29 27 10-32 UNF 1.3 1.3 ASV220F-U10/32 NPT 1/8 ASV310F-N01 8 7 NPT 1/4 ASV310F-N02 8 7 NPT 1/8 ASV410F-N01 14 13.5 NPT 1

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken lines indicate DIN rail mount type [-D] and connector top entry [-JU].

E-P HYREG ® VY1 Series

00 M5 01 00 01 02 00 02 03 04 M5 01 02 02 03 04 04 06 10 10 12 14 20 Without sub-plate M5 Without sub-plate M5 D B 1 8 Without sub-plate Base mounted Symbol 2 1 8 1 4 Internal pilot VY1D0 (5) Without sub-plate 1 4 4 3 8 1 2 (3) (3) A M5 3(R) 1 8 2(A) 1(P) (3) (3) 1 1 4 1 4 3 8 3 External pilot 1 2 Body ported 1 2 5 3 4 P1 1 1 VY1B0 (5) 7 1 1 4 1 4 1 1 2 1 3(R) 2(A) 1(P) 9 2 2 Note 3) Only

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

Speed controller with Model Port size 4 6 8 10 12 ASD One-touch fittings for AS121-M5 AS221-01 AS221-02 AS321-02 AS321-03 M5 x 0.8 AS 1 8 R metal body specifications 1 4 R AS-FE 1 4 Usesflameresistantresinasstandard. (ULstandardV-0) R 3 8 R KE AS421-04 1 2 R Note 1) :Brasspartsareelectrolessnickelplated,providedasstandard.

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Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6 mounting holes 37 Manual override M8 connector 15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 ports 12, 14 port 1/8-2 ports 2, 4 port 1/8 1 port 1/8-2 ports 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H

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Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6 mounting holes 37 Manual override M8 connector 15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 ports 12, 14 port 1/8-2 ports 2, 4 port 1/8 1 port 1/8-2 ports 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6 mounting holes 37 Manual override M8 connector 15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 ports 12, 14 port 1/8-2 ports 2, 4 port 1/8 1 port 1/8-2 ports 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0

AS-FG

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE KE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 N AS-FG AS-FG AS-FP AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 542. Use 1/8" tube.

AS-FG

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 KE N AS-FG AS-FG AS-FP Note) For applicable tubing O.D. selection, refer to the Model on page 680. Use 1/8" tube.

VEX1

N Port P1 0 3 ITV Thread type Fittings for M5 IC Nil F N T Rc G Note 1) Body size Port size Body size Port Port size 1(P), 2(A) 3(R) ITVH NPT NPTF 8 1 01 02 02 03 04 04 06 10 10 12 14 20 Nil 01 02 ITVX 1 4 1 ForVEX13 (NBR seals) Fixed orifice assembly (with O-ring) part no.: VEX1-A30-3 ForVEX133B(FKMseals) Fixed orifice assembly (with O-ring) part no.: VEX1-A30-3B Note)